PROBE STATIONSAnalytical Manual Probe StationsSubmicronic high precision models

WL210E 8'' High accuracy manual probe station with local enclosure

Part Number

WL210E

Designation

8'' High accuracy manual probe station with local enclosure

APPLICATIONS

IV / CV Measurements & Failure analysis

Low-Leakage-Current Testing

Description

This probe station is derivated of the Checkmate series. It includes an additional local chamber that allow temperature measurement (hot/cold) or very low current application

- fA measurements (low leakage)
- Light-tight environnement
- Electrical shielding
- Configuration : 4 HF port or 8 DC/Kelvin port or HF/DC combination
- 300mm version available
- Compatible with high performances ERS chuck (patented air cooling system, temperature from -60°C to +300°C)

DOCUMENTS

WL210E brochure (pdf)

Technical Specifications

Wafer size

200 mm

Sample holding

Vacuum hole, zone selection

Stage Drive

Motorized

Chuck travel X-Y

200 mm

Chuck material

Nickel

Resolution

Coarse 10 TPI - Fine 100 TPI (Resolution : 1um)

Accuracy

1 µm

Chuck stage Z travel

250µm - Pneumatic

Planarity

< 10 µm

Chuck planarity adjustment

Yes

Theta range

+/- 6 Degree

Theta resolution

< 0.1 Degree

Rotation lock

Yes

Z range platen

38mm with lock

Contact/no contact platen lever

4 mm with +/- 1 µm repeatability

Platen

Steel for vacuum or magnetic micropositioner

Scope stage travel

X-Y 50x50mm - Résolution 10µm

Microscope lift

100mm (4 in) vertical Pneumatic

Calibration Chuck

Calibration chuck with independant angular setup

Local enclosure

Yes

Light isolation

Yes

EMI shielding

> 30 dB @ 1kHz to 1MHz

Roll Out Stage for easy wafer loading

Yes

Option

Upgradable with, Hot/Cold chuck (-60°C to +400°C), High Power chuck, Local enclosure (Dark box and F

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