WL210E      8'' High accuracy manual probe station with local enclosure

Description Technical Specifications Documents Associated Products

WL210E      8'' High accuracy manual probe station with local enclosure

Description Technical Specifications Documents Associated Products

Part Number

WL210E

Designation

8'' High accuracy manual probe station with local enclosure

Description

This probe station is derivated of the Checkmate series. It includes an additional local chamber that allow temperature measurement (hot/cold) or very low current application

- fA measurements (low leakage)
- Light-tight environnement
- Electrical shielding
- Configuration : 4 HF port or 8 DC/Kelvin port or HF/DC combination
- 300mm version available
- Compatible with high performances ERS chuck (patented air cooling system, temperature from -60°C to +300°C)

MOST POPULAR REFERENCES

  • WL210E : 200mm

DOCUMENTS

Technical Specifications

Wafer size

200 mm

Sample holding

Vacuum hole, zone selection

Stage Drive

Motorized

Chuck travel X-Y

200 mm

Chuck material

Nickel

Resolution

Coarse 10 TPI - Fine 100 TPI (Resolution : 1um)

Accuracy

1 µm

Chuck stage Z travel

250µm - Pneumatic

Planarity

< 10 µm

Chuck planarity adjustment

Yes

Theta range

+/- 6 Degree

Theta resolution

< 0.1 Degree

Rotation lock

Yes

Z range platen

38mm with lock

Contact/no contact platen lever

4 mm with +/- 1 µm repeatability

Platen

Steel for vacuum or magnetic micropositioner

Scope stage travel

X-Y 50x50mm - Résolution 10µm

Microscope lift

100mm (4 in) vertical Pneumatic

Calibration Chuck

Calibration chuck with independant angular setup

Local enclosure

Yes

Light isolation

Yes

EMI shielding

> 30 dB @ 1kHz to 1MHz

Roll Out Stage for easy wafer loading

Yes

Option

Upgradable with, Hot/Cold chuck (-60°C to +400°C), High Power chuck, Local enclosure (Dark box and F

Associated products

SM40 - RF & Microwave micropositioner
The SM40 micropositioner is specifically designed for RF probing, it has one inch translation capabilities in all axes and a cross-roller bearings to prevent accidentally moving the tip if bumped.

- Accepts all types of coplanar RF probes
- Perfectly stable with screw-lock fixation on the platen (optional magnetic base)
- An integral co-planarity adjustment provides for adjusting multicontact planarities (GS, GSG, GSGSG configurations)
- It is available with various head configurations allowing the microwave head to be introduced from the front, rear

MWRF-40A - RF probe 40 GHz
Serie of probes for RF Microwave applications up to 40GHz, GSG, GS, SG or "dual" configurations (dual = 2 probes on 1 positionner)

- These probes are available in different pitch from 25µm to 2540µm
- Various mounting styles for micropositioners
- Female K connector 2.9mm
- Available in BeCu, Nickel or Tungsten
- Non Magnetic option
- High temperature and high current / high voltage versions, please ask us
SP100 - High precision micropositioner SP100
High-precision micropositioner with inline controls knobs, the SP100 will allow easy landing on pads as well as internal lines within micron accuracy.

- The down Z movement of the tip is totally vertical
- The knobs with micrometric graduations (100TPI) allow an optimal density on the platen.
- Pivot head (Quick down Z for pre-positioning then fine movement) or Standard head with Z knob
MS12Z - Mono zoom videoscope
This microscope is composed by a single objective and an internal zoom.
It allows a wide range of magnification without turret disadvantage for probing application.


- Light and compact
- Large working distance WD (ideal for high frequencies measurements applications)
- C-mount for camera
- High brightness (optical fiber)
ERS-AC3 - Thermal chuck
For 50 years ERS has been developing thermal chucks compatible with all probetest stations.

They have the following properties :
- High temperature: 300 ° C
- Low temperature: Patented airflow technology allows cooling down to -60 ° C
- Chuck TRIAX for low current measurement (FemtoAmp)
- Chuck High Voltage
- Non magnetic chuck
For technical and commercial information, quote, ordering or request of visit by our representative. +33 (0)476 561 617

5 rue de la Verrerie

38120 Le Fontanil-Cornillon

Grenoble / France

Fax : +33(0) 476 757 484

RCS Grenoble B 381 001 171 - APE 4652Z

TVA FR 48 381 001 171