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Analytical Manual Probe Stations

PROBE STATIONS - Analytical Manual Probe Stations

The manual probers can test all types of single die or several dies on an entire or partial wafer up to 300 mm
• Manual motion of the vacuum chuck and of the microscope
• Basic low-cost model, or economical multi-applications or submicronic high precision
• Specific configurations for demanding tests : low current, high power...
• Configurable and upgradable with choice of options : Thermal chuck, triaxial connections, isolating box (dark box)...
• Standard frequency DC or high frequency (RF)
H1xx
Manual economical probe station
Manual economical probe station
Economical probe station available in 4 models for wafers up to 100 mm.

- Quick platen lift
- Up to 6 micropositioners and a probecard

MOST POPULAR REFERENCES

H-100 : Manual positioning of the chuck
H-120 : Manual positioning + X-Y knobs
H-150 : Precision chuck positioning by knobs
H-150W : RF special chuck version
S1160-x
General purpose probe station
General purpose probe station
The S1160 will support a broad range of precision probing applications including IV, CV, dies, wafers...
Modular, it can accept many options and accessories for multi-purpose (temperature, low current...) applications

- Quick platen lift allows contact / no contact
- Accept microscope (bino / trino)
- Accpet wafers up to 8'' (wafers 200mm)
- Angular wafer setup
- Allows up to 8 DC micropositioner or probe card
- Heavy body for better stability
WL1160-x
Manual RF probe station
Manual RF probe station
Economical while professional prober for RF and Microwave probing applications, available for single die, partial or full wafer up to 8".

- DC to 110 GHz measurement
- Stable platen and specific anti-resonant chuck construction
- Individual chuck for RF probes with independant rotation
- Quick lift platen and fine Z adjustment
- Allows binocular or trinocular microscope (Tilt-back clearing option)
- Accept up to 4 RF micropositioners and 4 DC micropositioners simultaneously
CM170-WL170
High stability manual probe station
High stability manual probe station
From two model combination, the CM170/WL170 probe stations allows stability and accuraccy for moderate price.

- Large platen for frequency extender head use
- Multiple applications (optical, probecards, HF...)


MOST POPULAR REFERENCES

CM170 : DC to 100 MHz measurements
WL170 : DC to 110 GHz measurements
WL170-THz : mmW up to 1.1 THz (special raised chuck)
CM210-310
High accuracy manual probe station
High accuracy manual probe station
The Checkmate series represents the most accomplished probing stations, available for wafer up to 12".

- Upgradability from one version to another
- Manual or Semi-automatic version
- Test on Probecards available
- Optional thermal charactherization (-60°C to +300°C)
- High voltage (HV) and low current (fA) measurements possible
- Allows up to 8 DC micropositioners or probe card


MOST POPULAR REFERENCES

CM210 : Version 200 mm
CM310 : Version 300 mm
WL210-310
High accuracy HF manual probe station
High accuracy HF manual probe station
The WaveLink series represents the most accomplished HF probing stations, available for wafer up to 12".

- No resonnance up to 500 Ghz
- Upgradability from one version to another
- Manual or Semi-automatic version
- Optional thermal charactherization (-60°C to +300°C)
- Allows up to 4 RF micropositioners and 4 DC micropositioners simultaneously


MOST POPULAR REFERENCES

WL210 : Version 200 mm
WL310 : Version 300 mm
WL210E
8'' High accuracy manual probe station with local enclosure
8'' High accuracy manual probe station with local enclosure
This probe station is derivated of the Checkmate series. It includes an additional local chamber that allow temperature measurement (hot/cold) or very low current application

- fA measurements (low leakage)
- Light-tight environnement
- Electrical shielding
- Configuration : 4 HF port or 8 DC/Kelvin port or HF/DC combination
- 300mm version available
- Compatible with high performances ERS chuck (patented air cooling system, temperature from -60°C to +300°C)
Economical probe stations for single chip or wafer up to 200 mm, for geometry of pads or lines of few microns
• Standard manual DC versions or high frequency microwave model
• The microscope post accepts bino type (basic) or high power type (turret multi-objectives on SS160 only)
• Up to 10 positioners (upon model) with magnetic or vacuum base
• Optional thermal chuck for temperature applications
• Range of accessories and options

H1xx
Manual economical probe station
Manual economical probe station
Economical probe station available in 4 models for wafers up to 100 mm.

- Quick platen lift
- Up to 6 micropositioners and a probecard

MOST POPULAR REFERENCES

H-100 : Manual positioning of the chuck
H-120 : Manual positioning + X-Y knobs
H-150 : Precision chuck positioning by knobs
H-150W : RF special chuck version
S1160-x
General purpose probe station
General purpose probe station
The S1160 will support a broad range of precision probing applications including IV, CV, dies, wafers...
Modular, it can accept many options and accessories for multi-purpose (temperature, low current...) applications

- Quick platen lift allows contact / no contact
- Accept microscope (bino / trino)
- Accpet wafers up to 8'' (wafers 200mm)
- Angular wafer setup
- Allows up to 8 DC micropositioner or probe card
- Heavy body for better stability
WL1160-x
Manual RF probe station
Manual RF probe station
Economical while professional prober for RF and Microwave probing applications, available for single die, partial or full wafer up to 8".

- DC to 110 GHz measurement
- Stable platen and specific anti-resonant chuck construction
- Individual chuck for RF probes with independant rotation
- Quick lift platen and fine Z adjustment
- Allows binocular or trinocular microscope (Tilt-back clearing option)
- Accept up to 4 RF micropositioners and 4 DC micropositioners simultaneously
A range of submicronic probe stations of high precision and accuracy for tests on small pads or very small internal nodes. Accepts from individual die to partial wafer or entire wafer up to 12"
• Solid base providing a low level of noise once seated on a vibration table
• Several configurations of chuck, standard, triax, thermally controlled...
• Can accept high-end positioners for an optimum accuracy
• Custom configurations upon specsheet



 
CM170-WL170
High stability manual probe station
High stability manual probe station
From two model combination, the CM170/WL170 probe stations allows stability and accuraccy for moderate price.

- Large platen for frequency extender head use
- Multiple applications (optical, probecards, HF...)


MOST POPULAR REFERENCES

CM170 : DC to 100 MHz measurements
WL170 : DC to 110 GHz measurements
WL170-THz : mmW up to 1.1 THz (special raised chuck)
CM210-310
High accuracy manual probe station
High accuracy manual probe station
The Checkmate series represents the most accomplished probing stations, available for wafer up to 12".

- Upgradability from one version to another
- Manual or Semi-automatic version
- Test on Probecards available
- Optional thermal charactherization (-60°C to +300°C)
- High voltage (HV) and low current (fA) measurements possible
- Allows up to 8 DC micropositioners or probe card


MOST POPULAR REFERENCES

CM210 : Version 200 mm
CM310 : Version 300 mm
WL210-310
High accuracy HF manual probe station
High accuracy HF manual probe station
The WaveLink series represents the most accomplished HF probing stations, available for wafer up to 12".

- No resonnance up to 500 Ghz
- Upgradability from one version to another
- Manual or Semi-automatic version
- Optional thermal charactherization (-60°C to +300°C)
- Allows up to 4 RF micropositioners and 4 DC micropositioners simultaneously


MOST POPULAR REFERENCES

WL210 : Version 200 mm
WL310 : Version 300 mm
WL210E
8'' High accuracy manual probe station with local enclosure
8'' High accuracy manual probe station with local enclosure
This probe station is derivated of the Checkmate series. It includes an additional local chamber that allow temperature measurement (hot/cold) or very low current application

- fA measurements (low leakage)
- Light-tight environnement
- Electrical shielding
- Configuration : 4 HF port or 8 DC/Kelvin port or HF/DC combination
- 300mm version available
- Compatible with high performances ERS chuck (patented air cooling system, temperature from -60°C to +300°C)
For technical and commercial information, quote, ordering or request of visit by our representative. +33 (0)476 561 617

5 rue de la Verrerie

38120 Le Fontanil-Cornillon

Grenoble / France

Fax : +33(0) 476 757 484

RCS Grenoble B 381 001 171 - APE 4652Z

TVA FR 48 381 001 171