PROBE STATIONSAnalytical Manual Probe Stations

PROBE STATIONS - Analytical Manual Probe Stations

Standard use
Submicronic high precision models

The manual probers can test all types of single die or several dies on an entire or partial wafer up to 300 mm
• Manual motion of the vacuum chuck and of the microscope
• Basic low-cost model, or economical multi-applications or submicronic high precision
• Specific configurations for demanding tests : low current, high power...
• Configurable and upgradable with choice of options : Thermal chuck, triaxial connections, isolating box (dark box)...
• Standard frequency DC or high frequency (RF)

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Standard use

Economical probe stations for single chip or wafer up to 200 mm, for geometry of pads or lines of few microns
• Standard manual DC versions or high frequency microwave model
• The microscope post accepts bino type (basic) or high power type (turret multi-objectives on SS160 only)
• Up to 10 positioners (upon model) with magnetic or vacuum base
• Optional thermal chuck for temperature applications
• Range of accessories and options

H150

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Manual probe station

Economical probe station available in 3 versions for wafers up to 100 mm.

- Quick platen lift
- Up to 6 micropositioners and a probecard

S1160

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General purpose probe station

The S1160 will support a broad range of precision probing applications including IV, CV, dies, wafers...
Modular, it can accept many options and accessories for multi-purpose (temperature, low current...) applications

- Quick platen lift allows contact / no contact
- Accept microscope (bino / trino)
- Accept wafers up to 8'' (wafers 200mm)
- Angular wafer setup
- Allows up to 8 DC micropositioner or probe card
- Heavy body for better stability

MOST POPULAR REFERENCES

S1160A-8N : Moving of optical bridge for turret microscope
S1160B-8N : Moving of optical bridge for trinocular stereozoom microscope
S1160C-8N : Fixed optical bridge for trinocular stereozoom microscope

WL1160

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Manual RF probe station

Economical while professional prober for RF and Microwave probing applications, available for single die, partial or full wafer up to 8".

- DC to 110 GHz measurement
- Stable platen and specific anti-resonant chuck construction
- Individual chuck for RF probes with independant rotation
- Quick lift platen and fine Z adjustment
- Allows binocular or trinocular microscope (Tilt-back clearing option)
- Accept up to 4 RF micropositioners and 4 DC micropositioners simultaneously

MOST POPULAR REFERENCES

WL1160A : Moving of optical bridge for turret microscope
WL1160B : Moving of optical bridge for trinocular stereozoom microscope
WL1160C : Fixed optical bridge for trinocular stereozoom microscope

MW-D3

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Dark box with chuck

This small probe station has been designed for high themperature application, it includes a chuck (ambient or hot chuck) and a circular platen that allow several magnetic micropositioner.

- A microscope can be used to contact small pads
- An economical solution for a variety of probing applications

Submicronic high precision models

A range of submicronic probe stations of high precision and accuracy for tests on small pads or very small internal nodes. Accepts from individual die to partial wafer or entire wafer up to 12"
• Solid base providing a low level of noise once seated on a vibration table
• Several configurations of chuck, standard, triax, thermally controlled...
• Can accept high-end positioners for an optimum accuracy
• Custom configurations upon specsheet

CM170-WL170