SRS3      Calibration wafer

Description Technical Specifications Documents Associated Products
Description Technical Specifications Documents Associated Products

Part Number

SRS3

Designation

Calibration wafer

Description

This NIST wafer is used to calibrate 4PP systems

- 3'' wafer
- NIST certification during 1 year

MOST POPULAR REFERENCES

  • SRS3-0.002 : Resistivity of 0.002 ohm.cm
  • SRS3-0.01 : Resisitivity of 0.01 ohm.cm
  • SRS3-0.03 : Resistivity of 0.03 ohm.cm
  • SRS3-0.1 : Resistivity of 0.1 ohm.cm
  • SRS3-0.3 : Resistivity of 0.3 ohm.cm
  • SRS3-0.9 : Resistivity of 0.9 ohm.cm
  • SRS3-3 : Resistivity of 3 ohm.cm

Technical Specifications

Resistivity Range

0.002 to 3 Ohm.cm

Wafer size

76.2 mm

Material

Silicon

Thickness

508 µm

Certificate life

1 year

Associated products

MW-Pack4PP-M - 4 point probe manual measurement package medium resistivity range
Manual sheet resistivity measurement systems for laboratory, for research and small productions. The stand includes several features to ensure accurate resistivity measurements. The system is used to characterize materials made by semiconductor doping, metal deposition, resistive paste printing, glass coating...

A manual lever makes is used to make the Z movement to be in contact with the sample, with a repeatability of the order of one micron. In addition, a control wheel located on the right side allows to precisely refine the Z movement. The sample is mounted on a movable support, which makes it possible to be places under the four point probe head easily between each measuring point.


- A micro-switch insures that the current will be injected only after contact of the 4 needles
- The measurement itself is provided from an external sourcemeter and voltmeter typically Keithley family (supplied upon version)
- The system is modular including the measurement and display onto a PC

Th software manages the tests, displays results and allows printouts or export of the data. The user inputs the size and shape of the sample, edge exclusion and number of points to be tested. The user may also define pass/fail criteria and which parameter (Sheet Resistance, Resistivity, or V/I) to display. A graphic picture of the target probe points is displayed. Prompts tell user to move to the next position. Upon completion of testing all points, the average, standard deviation, minimum and maximum are prominently displayed. Upon completion, a summary report may be printed showing the data and pass/fail status.
S302 - 4 point probe stand
The configuration is composed of a stand holding the probe head with a quick Z lever and a chuck for wafer of 4, 6, 8 or 12 inches, the sample positioning is manual as well as the contact of the tips by a rotating lever.

- A micro-switch insures that the current will be injected only after contact of the 4-point probe head
- The  measurement itself is provided from an external sourcemeter and voltmeter typically Keithley family, which can be supplied if requested
- The system can be upgraded to include the measurement and display onto a PC
- Perfect tool for for laboratories, universities, research centers... in the material characterization.
280I - Semi-automatic 4 point probe measurement system
Measurement range 1 mohm/sq to 8E11 ohm/sq, manual (1pt, 5pts) or semi-automatic with analysis and mapping up to 6000 points upon model.

- Standard measurements range, optional extended range, data storage and retrieval, powerfull search functions in the data results base
- Mapping patterns polar or cartesian up to 650 points, diameter scan, custom patterns, wafer edge correction
- Automatic detection of current range and P/N
- This series of sheet resistivity measurement systems will fullfill all needs in term on electrical sheet resistivity qualification, either in R&D and manual mode or in a production mode


333A - Semi-automatic 4 point probe measurement system
Measurement range 1 mohm/sq to 8E5 ohm/sq, manual (1pt, 5pts) or semi-automatic with analysis and mapping up to 6000 points upon model up to 12'' wafer.

- Standard measurements range, optional extended range, data storage and retrieval, powerfull search functions in the data results base
- Mapping patterns polar or cartesian up to 650 points, diameter scan, custom patterns, wafer edge correction
- Automatic detection of current range and P/N
- This series of sheet resistivity measurement systems will fullfill all needs in term on electrical sheet resistivity qualification, either in R&D and manual mode or in a production mode


For technical and commercial information, quote, ordering or request of visit by our representative. +33 (0)476 561 617

5 rue de la Verrerie

38120 Le Fontanil-Cornillon

Grenoble / France

Fax : +33(0) 476 757 484

RCS Grenoble B 381 001 171 - APE 4652Z

TVA FR 48 381 001 171