The CVMap serie systems allow measuring-characterizing-monitoring a number of parameters of semiconductors materials and of processes
• Compatible for all wafer or substrate size up to 12'
• Manual or automatic loading
• Specific models with 3-Point-Contact allow characterization on isolated substrates (SOI...)
• A serie of models combine resistivity measurements by Mercury Probe with C(V) measurements
The Mercury Contact Probe is a soft contact that will eliminate the potential damage caused by Needles on sensitive layers