CM210-310      High accuracy manual probe station

Description Technical Specifications Documents Associated Products

CM210-310      High accuracy manual probe station

Description Technical Specifications Documents Associated Products

Part Number

CM210-310

Designation

High accuracy manual probe station

Description

The Checkmate series represents the most accomplished probing stations, available for wafer up to 12".

- Upgradability from one version to another
- Manual or Semi-automatic version
- Test on Probecards available
- Optional thermal charactherization (-60°C to +300°C)
- High voltage (HV) and low current (fA) measurements possible
- Allows up to 8 DC micropositioners or probe card

MOST POPULAR REFERENCES

CM210 : Version 200 mm
CM310 : Version 300 mm

DOCUMENTS

Technical Specifications

Wafer size

200 or 300 mm

Sample holding

Vacuum ring, zone selection

Chuck travel X-Y

200/300 mm

Chuck material

Nickel

Resolution

0.1 µm

Accuracy

1 µm

Chuck stage Z travel

250µm - Pneumatic

Planarity

< 10 µm

Chuck planarity adjustment

Yes

Theta range

+/- 6 Degree

Theta resolution

< 0.1 Degree

Rotation lock

Yes

Z range platen

38mm with lock

Contact/no contact platen lever

4 mm with +/- 1 µm repeatability

Platen

Steel for vacuum or magnetic micropositioner

Scope stage travel

X-Y 50x50mm - Résolution 10µm

Microscope lift

100mm (4 in) vertical Pneumatic

Option

Probe card, dark box, themral chuck, triax chuck...

Associated products

S47 - Probe card adapter
Mechanical fixture for mounting a probecard of 4.5" width (114 mm) on a prober.

- Provide signals to the DUT while making analysis with separate needles controlled from micropositionners
- 2 models are available, one with no adjustment, another with theta adjustment

SP150 - Ultra-stable submicronic micropositioner SP150
High-precision ultra-stable micropositioner with inline controls knobs, the SP150 will allow easy landing on pads as well as internal lines with a submicron accuracy.

- The down Z movement of the tip is totally vertical
- The knobs with micrometric graduations (100TPI) allow an optimal density on the platen.
- Standard head (down movement by the Z fine knob) or Pivot head for a quicker Z positioning
- The SP150 today represents the state-of-the-art in term of accuracy of positioning
UxTB - Coaxial Probe holder with teflon isolation
Specifically designed for low noise measurements, the coaxial probe holder allows probing at low leakage
SP100 - High precision micropositioner SP100
High-precision micropositioner with inline controls knobs, the SP100 will allow easy landing on pads as well as internal lines within micron accuracy.

- The down Z movement of the tip is totally vertical
- The knobs with micrometric graduations (100TPI) allow an optimal density on the platen.
- Pivot head (Quick down Z for pre-positioning then fine movement) or Standard head with Z knob
MS12Z - Mono zoom videoscope
This microscope is composed by a single objective and an internal zoom.
It allows a wide range of magnification without turret disadvantage for probing application.


- Light and compact
- Large working distance WD (ideal for high frequencies measurements applications)
- C-mount for camera
- High brightness (optical fiber)
For technical and commercial information, quote, ordering or request of visit by our representative. +33 (0)476 561 617

5 rue de la Verrerie

38120 Le Fontanil-Cornillon

Grenoble / France

Fax : +33(0) 476 757 484

RCS Grenoble B 381 001 171 - APE 4652Z

TVA FR 48 381 001 171