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WL1160-x      Manual RF probe station

Description Technical Specifications Documents Associated Products

WL1160-x      Manual RF probe station

Description Technical Specifications Documents Associated Products

Part Number



Manual RF probe station



Economical while professional prober for RF and Microwave probing applications, available for single die, partial or full wafer up to 8".

- DC to 110 GHz measurement
- Stable platen and specific anti-resonant chuck construction
- Individual chuck for RF probes with independant rotation
- Quick lift platen and fine Z adjustment
- Allows binocular or trinocular microscope (Tilt-back clearing option)
- Accept up to 4 RF micropositioners and 4 DC micropositioners simultaneously


Technical Specifications

Wafer size

Sample holding

Stage Drive

Chuck travel X-Y

Chuck material


Chuck stage Z travel


Chuck planarity adjustment

Theta range

Rotation lock

Z range platen

Contact/no contact platen lever


Scope stage drive

Scope stage travel

Microscope lift

Compatible optics

Calibration Chuck


100, 150 or 200 mm

Vacuum hole, zone selection


200 mm


1.6 TPI


< 10 µm


30° coarse - 15° fine Degree


30 mm

10 mm with a repeatability of +/- 1µm

Steel for vacuum or magnetic micropositioner


X-Y 50x50mm - Résolution 10µm


Stereozoom microscope

Calibration chuck with independant angular setup

Microscope, hot chuck, probe card...

Associated products

SM40 - RF & Microwave micropositioner
The SM40 micropositioner is specifically designed for RF probing, it has one inch translation capabilities in all axes and a cross-roller bearings to prevent accidentally moving the tip if bumped.

- Accepts all types of coplanar RF probes
- Perfectly stable with screw-lock fixation on the platen (optional magnetic base)
- An integral co-planarity adjustment provides for adjusting multicontact planarities (GS, GSG, GSGSG configurations)
- It is available with various head configurations allowing the microwave head to be introduced from the front, rear

SMZ168 - Stereozoom microscope
Stereozoom microscope with trinocular head for probe tip placement.

- High working distance (WD = 113 mm)
- C-mount for digital camera
- Several objectives and eyepieces for wide range of magnification
MWRF-40A - RF probe 40 GHz
Serie of probes for RF Microwave applications up to 40GHz, GSG, GS, SG or "dual" configurations (dual = 2 probes on 1 positionner)

• These probes are available in different pitch from 25µm to 2540µm
• Various mounting styles for positionners
• Female K connector 2,9mm
• Available in BeCu, Nickel or Tungsten
• Non Magnetic option
• High temperature and high current / high voltage versions, please ask us
MW-CS - Calibration substrate for RF probes
Accurate, easy-to-use calibration substrates, calibration coefficients, to correct the measurement system (network analyzer + cabling + probe) whenever it produces a reading different than the standard.
For technical and commercial information, quote, ordering or request of visit by our representative. +33 (0)476 561 617

5 rue de la Verrerie

38120 Le Fontanil-Cornillon

Grenoble / France

Fax : +33(0) 476 757 484

RCS Grenoble B 381 001 171 - APE 4652Z

TVA FR 48 381 001 171