280I      Semi-automatic 4 point probe measurement system

Description Technical Specifications Documents Associated Products

280I      Semi-automatic 4 point probe measurement system

Description Technical Specifications Documents Associated Products

Part Number

280I

Designation

Semi-automatic 4 point probe measurement system

Description

Measurement range 1 mohm/sq to 8E11 ohm/sq, manual (1pt, 5pts) or semi-automatic with analysis and mapping up to 6000 points upon model.

- Standard measurements range, optional extended range, data storage and retrieval, powerfull search functions in the data results base
- Mapping patterns polar or cartesian up to 650 points, diameter scan, custom patterns, wafer edge correction
- Automatic detection of current range and P/N
- This series of sheet resistivity measurement systems will fullfill all needs in term on electrical sheet resistivity qualification, either in R&D and manual mode or in a production mode


MOST POPULAR REFERENCES

  • 280SI : Standard range 1mohm/sq up to 800Kohm/sq
  • 280DI : Extended range 1mohm/sq up to 8E11ohm/sq

DOCUMENTS

Technical Specifications

Wafer size

4, 6 or 8 "

Movement

Semi-automatic (Y and Theta)

Compatibility

CP4 probe head

Software

Measurement management "auto range", mapping, results analyze, 3D curve

SMU

Internal

Computer

Windows10 Pro included

Associated products

CW - Calibration wafer
Wafer to calibrate 4 point probe system

- Silicium wafer
- 4'' (100 mm)

CP4 - Cylindrical 4 point probe head
4 point probe head for sheet resistivity measurements, usable on 280 serie and others or on in-house mounting assembly.

- Adjustable pressure on the probe head
- Tip radius of different sizes adapted to most electronics layers
- Termination by 9-pins connector for direct plug in
- Application at ambient temperature only
For technical and commercial information, quote, ordering or request of visit by our representative. +33 (0)476 561 617

5 rue de la Verrerie

38120 Le Fontanil-Cornillon

Grenoble / France

Fax : +33(0) 476 757 484

RCS Grenoble B 381 001 171 - APE 4652Z

TVA FR 48 381 001 171