- Silicium wafer
- 4'' (100 mm)
Part Number
280I
Designation
Semi-automatic 4 point probe measurement system
APPLICATIONS
Measurement range 1 mohm/sq to 8E11 ohm/sq, manual (1pt, 5pts) or semi-automatic with analysis and mapping up to 6000 points upon model.
- Standard measurements range, optional extended range, data storage and retrieval, powerfull search functions in the data results base
- Mapping patterns polar or cartesian up to 650 points, diameter scan, custom patterns, wafer edge correction
- Automatic detection of current range and P/N
- This series of sheet resistivity measurement systems will fullfill all needs in term on electrical sheet resistivity qualification, either in R&D and manual mode or in a production mode
MOST POPULAR REFERENCES
Wafer size
4, 6 or 8 "
Movement
Semi-automatic (Y and Theta)
Compatibility
CP4 probe head
Software
Measurement management "auto range", mapping, results analyze, 3D curve
SMU
Internal
Computer
Windows10 Pro included