CM250-350      Semi-automatic probe station

Description Technical Specifications Documents Associated Products

CM250-350      Semi-automatic probe station

Description Technical Specifications Documents Associated Products

Part Number

CM250-350

Designation

Semi-automatic probe station

Description

Semi-automatic probe stations for full wafer electrical characterization up to 12'' (300 mm).

- Software : mapping, auto-alignment, pattern recognition, autofocus...
- Probecard application available
- Temperature characterization up to +600°C
- High voltage (HV - 10kV) and low leakage (fA) measurements
- Tool developed for design validation (R&D) and yield monitoring (production)
- Configuration : up 10 ports DC/Kelvin
- Compatible with high performances ERS chuck (patented air cooling system, temperature from -60°C to +300°C)

MOST POPULAR REFERENCES

CM250 : Version 200 mm
CM350 : Version 300 mm

Technical Specifications

Wafer size

200 or 300 mm

Sample holding

Vacuum ring, zone selection

Stage Drive

Semi-automatic

Chuck travel X-Y

200/300 mm

Chuck material

Nickel

Resolution

0.5 µm

Repeatability

7 µm

Accuracy

5 µm

Chuck stage Z travel

12.5 mm

Z chuck repeatability

1 µm

Planarity

< 10 µm

Chuck planarity adjustment

Yes

Theta range

+/- 7.5 Degree

Theta resolution

0.000035 Degree

Theta repeatability

< 1.5 µm

Z range platen

38mm with lock

Contact/no contact platen lever

4 mm with +/- 1 µm repeatability

Platen

Steel for vacuum or magnetic micropositioner

Scope stage drive

Motorized

Scope stage travel

X-Y 50x50mm - Résolution 10µm

Software

Mapping, auto-alignement, autofocus, pattern...

Roll Out Stage for easy wafer loading

Optional

Option

Probe card, dark box, themral chuck, triax chuck...

Associated products

MW-DB - Customized dark box
For probing systems that do not have local chamber option, Microworld manufactures Dark Boxes designed to completely enclose a micro probe station or other system.

- Electrical and light isolation
- Feed-thru connectors adapted to the instrumentation to be connected
- Goose-neck for cable access
- Customizable design dimensions.

S47 - Probe card adapter
Mechanical fixture for mounting a probecard of 4.5" width (114 mm) on a prober.

- Provide signals to the DUT while making analysis with separate needles controlled from micropositionners
- 2 models are available, one with no adjustment, another with theta adjustment

SP150 - Ultra-stable submicronic micropositioner SP150
High-precision ultra-stable micropositioner with inline controls knobs, the SP150 will allow easy landing on pads as well as internal lines with a submicron accuracy.

- The down Z movement of the tip is totally vertical
- The knobs with micrometric graduations (100TPI) allow an optimal density on the platen.
- Standard head (down movement by the Z fine knob) or Pivot head for a quicker Z positioning
- The SP150 today represents the state-of-the-art in term of accuracy of positioning
S1070 - Hot/cold chuck
The trip-temp chuck and controller (ambient-hot-cold) ranges from -65°C to +300°C and allows a complete temperature characterization of devices, whether they are partial wafers or full wafers up to 12".

- The temperature parameters setting is by the front panel or GPIB control
- The transition time from hot to cold or reverse is one of the fastest on the market
- It is possible to program a ramp while heating up
- For negative temperatures (below some °C), a local enclosure with N2 or air dryier is available
TRXCHUCK - Triaxial chuck
The triaxial chuck will allow ultra-low current measurement down to fA when used with specific micropositioners with trixial arm and hermetic box for light and shield isolation.

- It is composed of 3 parts of which the middle part can be polarized,
- A high-temperature version is also available when associated with a hot or tri-temp chuck
- Available for wafers up to 300 mm (12")
- The triaxial chuck typically replaces the standard chuck onto a manual or semi-automatic prober to perform low level current measurement.

MW-SCA50 - Coaxial HF-Low-current probe
The coaxial Probe is designed for low-level signal probing (lower than 10fA@200°C)

- The probe's single unit design is especially desirable for the best possible electrical characteristics
- The Coaxial Probe is also offered with optional Ground Plane, Kelvin and resistor series /parallel configurations
- The Probes are constructed of microwave-quality components with a 50 Ohm semi-rigid cable shield being achieved through the utilization a Teflon dielectric
- The probe contact protrudes from the shielding by .150" (3mm) to maintain low-level signal noise to the probe
- Tips available (replaceable) from 0.5µm to 20 µm
- The connector is a standard SSMC
SP100 - High precision micropositioner SP100
High-precision micropositioner with inline controls knobs, the SP100 will allow easy landing on pads as well as internal lines within micron accuracy.

- The down Z movement of the tip is totally vertical
- The knobs with micrometric graduations (100TPI) allow an optimal density on the platen.
- Pivot head (Quick down Z for pre-positioning then fine movement) or Standard head with Z knob
MS12Z - Mono zoom videoscope
This microscope is composed by a single objective and an internal zoom.
It allows a wide range of magnification without turret disadvantage for probing application.


- Light and compact
- Large working distance WD (ideal for high frequencies measurements applications)
- C-mount for camera
- High brightness (optical fiber)
TA-VIS-9090 - Active antivibration table
The table allows pneumatic filtering of vibrations, the 4 dampers efficiently filter the mechanical noise from the ground or neighbourhood for an ultra fine probe analysis, inspection or assembly.

- Platens available in several dimensions upon size and weight of the equipment
- Individually adjustable air pressure sensors at each corner
ERS-AC3 - Thermal chuck
For 50 years ERS has been developing thermal chucks compatible with all probetest stations.

They have the following properties :
- High temperature: 300 ° C
- Low temperature: Patented airflow technology allows cooling down to -60 ° C
- Chuck TRIAX for low current measurement (FemtoAmp)
- Chuck High Voltage
- Non magnetic chuck
For technical and commercial information, quote, ordering or request of visit by our representative. +33 (0)476 561 617

5 rue de la Verrerie

38120 Le Fontanil-Cornillon

Grenoble / France

Fax : +33(0) 476 757 484

RCS Grenoble B 381 001 171 - APE 4652Z

TVA FR 48 381 001 171