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Semi-automatic Probers

PROBE STATIONS - Semi-automatic Probers

The semi-automatic probers will allow the user to perform a complete testing on a partial or entire wafer, automatically and very repeatably
• A pattern recognition software (New) eliminate the false positioning by recognizing exactly where the tips need to land
• The stations are available in several configurations depending on the wafer size and automation needed
• High frequency RF models 
• Control of motion by external GPIB or built in software
• Variety of accessories and options matching all specific applications, temperature measurements, FemtoAmp, high power...
• A perfect choice for die characterization, design validation, failure analysis and low-medium production (manual wafer loading)
CM465
6'' semi-automatic probe station
6'' semi-automatic probe station
Semi-automatic probing stations for full wafer electrical characterization.

- Software : mapping, auto-alignment, pattern recognition, autofocus...
- X-Y stage drives by induction motor for high speed and accuracy
- Probecard application available
- High voltage (HV -10kV) and low leakage (fA) measurements
- Tool developed for design validation (R&D) and yield monitoring (production)
CM250-350
Semi-automatic probe station
Semi-automatic probe station
Semi-automatic probe stations for full wafer electrical characterization up to 12'' (300 mm).

- Software : mapping, auto-alignment, pattern recognition, autofocus...
- Probecard application available
- Temperature characterization up to +600°C
- High voltage (HV - 10kV) and low leakage (fA) measurements
- Tool developed for design validation (R&D) and yield monitoring (production)
- Configuration : up 10 ports DC/Kelvin
- Compatible with high performances ERS chuck (patented air cooling system, temperature from -60°C to +300°C)


MOST POPULAR REFERENCES

CM250 : Version 200 mm
CM350 : Version 300 mm
WL250-350
HF semi-automatic probe station
HF semi-automatic probe station
Semi-automatic probing stations for full wafer HF electrical characterization.

- Software : mapping, auto-alignment, pattern recognition, autofocus...
- Probecard application available
- Thermal characterization from -60°C to +300°C
- HF measurements up to 110 GHz
- Tool developed for design validation (R&D) and yield monitoring (production)
- Configuration : up 4 ports HF (N, S, E, W) and 4 DC
- Optional local enclosure for EMI shielding and light-tight


MOST POPULAR REFERENCES

WL250 : 200 mm version
WL350 : 300 mm version
WL250-LE : 200 mm with local enclosure
WL350-LE : 300 mm with local enclosure
For technical and commercial information, quote, ordering or request of visit by our representative. +33 (0)476 561 617

5 rue de la Verrerie

38120 Le Fontanil-Cornillon

Grenoble / France

Fax : +33(0) 476 757 484

RCS Grenoble B 381 001 171 - APE 4652Z

TVA FR 48 381 001 171