Semi-automatic probe stations for full wafer electrical characterization up to 8" (200 mm).
- Software : mapping, auto-alignment, pattern recognition, autofocus...
- Probecard application available
- Temperature characterization up to +600°C
- High voltage (HV - 10kV) and low leakage (fA) measurements
- Tool developed for design validation (R&D) and yield monitoring (production)
- Configuration : up 10 ports DC/Kelvin
- Compatible with high performances ERS chuck (patented air cooling system, temperature from -60°C to +300°C)
MOST POPULAR REFERENCES
CM250 : Version 200 mm
CM350 : Version 300 mm