ELECTRICAL TESTS UNDER NEEDLESLow-Leakage-Current Testing

MOTICAM1080XDigital camera

This camera is very helpfull for direct vision to put probes easily.

- Compatible with our trinoculars microscopes
- C mount
- Multi-outputs for direct vision on monitor (HDMI) and USB

MOTICAM4000High definition digital camera

High-definition digital camera for inspecting and assisting with the placement of tips on wafers.

This camera uses a C-mount to be mounted on most microscopes on the market.
Its high definition gives it the possibility of placing the tips on very small pads.
It has several outputs to allow a wide variety of uses (HDMI 4K, USB...).
An SD card can be connected to take quick pictures.

MOTICAM1080NDigital camera

This camera is very helpfull for direct vision to put probes easily.

- Compatible with our trinoculars microscopes
- C mount
- Multi-outputs for direct vision on monitor (HDMI) and USB

S1160B-8N8" manual analytical probe station

Probe station under tips for precision analyses, such as IV, CV, on chips alone, on wafers, on components, etc. Modular, the S1160 can accommodate several options and accessories for a multitude of applications (temperature, low current measurements, etc.).

- Rapid elevation of the plate by manual arm (contact / non-contact)
- Accepts binocular and trinocular microscopes
- Wafers up to 8'' (200mm wafers)
- Angular adjustment of the Wafer
- Accommodates up to 8 DC micropositioners or a pin board
- Massive chassis for better stability

COMMON REFERENCES:

S1160A-8N: Optical bridge movement for turret microscope
S1160B-8N: Movement of the optical bridge for trinocular stereozoom microscope
S1160C-8N: Fixed optical bridge for trinocular stereozoom microscope

CM2108" high accuracy manual probe station

The Checkmate series represents the most accomplished probing stations, available for wafer up to 12".

- Upgradability from one version to another
- Manual or Semi-automatic version
- Test on Probecards available
- Optional thermal charactherization (-60°C to +300°C)
- High voltage (HV) and low current (fA) measurements possible
- Allows up to 8 DC micropositioners or probe card

MOST POPULAR REFERENCES

CM210 : Version 200 mm
CM310 : Version 300 mm

WL210LE8" high accuracy RF manual probe station with local enclosure

This probe station is derivated of the Checkmate series. It includes an additional local chamber that allow temperature measurement (hot/cold) or very low current application

- fA measurements (low leakage)
- Light-tight environnement
- Electrical shielding
- Configuration : 4 HF port or 8 DC/Kelvin port or HF/DC combination
- 300mm version available
- Compatible with high performances ERS chuck (patented air cooling system, temperature from -60°C to +300°C)

CM4656" semi-automatic probe station

Semi-automatic probing stations for full wafer electrical characterization.

- Software : mapping, auto-alignment, pattern recognition, autofocus...
- X-Y stage drives by induction motor for high speed and accuracy
- Probecard application available
- High voltage (HV -10kV) and low leakage (fA) measurements
- Tool developed for design validation (R&D) and yield monitoring (production)

CM2508" semi-automatic probe station

Semi-automatic probe stations for full wafer electrical characterization up to 8" (200 mm).

- Software : mapping, auto-alignment, pattern recognition, autofocus...
- Probecard application available
- Temperature characterization up to +600°C
- High voltage (HV - 10kV) and low leakage (fA) measurements
- Tool developed for design validation (R&D) and yield monitoring (production)
- Configuration : up 10 ports DC/Kelvin
- Compatible with high performances ERS chuck (patented air cooling system, temperature from -60°C to +300°C)

MOST POPULAR REFERENCES

CM250 : Version 200 mm
CM350 : Version 300 mm

WL350-LE12" HF semi-automatic probe station with local enclosure

Semi-automatic probing stations for full wafer HF electrical characterization.

- Software : mapping, auto-alignment, pattern recognition, autofocus...
- Probecard application available
- Thermal characterization from -60°C to +300°C
- HF measurements up to 110 GHz
- Tool developed for design validation (R&D) and yield monitoring (production)
- Configuration : up 4 ports HF (N, S, E, W) and 4 DC
- Optional local enclosure for EMI shielding and light-tight

MOST POPULAR REFERENCES

WL250 : 200 mm version
WL350 : 300 mm version
WL250-LE : 200 mm with local enclosure
WL350-LE : 300 mm with local enclosure

WL250-LE8" HF semi-automatic probe station with local enclosure

CM35012" semi-automatic probe station

Semi-automatic probe stations for full wafer electrical characterization up to 12" (300 mm).

- Software : mapping, auto-alignment, pattern recognition, autofocus...
- Probecard application available
- Temperature characterization up to +600°C
- High voltage (HV - 10kV) and low leakage (fA) measurements
- Tool developed for design validation (R&D) and yield monitoring (production)
- Configuration : up 10 ports DC/Kelvin
- Compatible with high performances ERS chuck (patented air cooling system, temperature from -60°C to +300°C)

MOST POPULAR REFERENCES

CM250 : Version 200 mm
CM350 : Version 300 mm

PSM1000Turret microscope

Turret microscope for fine inspection and high magnifications.
The PSM1000 is useful for precision contact on very small surfaces.

- It can be used as a stand alone or mounted onto analytical probe station
- A range of accessories is available including a variety of objectives (NIR, NUV, polarizer, analyzer...)
- The trinocular head accepts a choice of digital cameras
- Spectroscopic applications available

AZOOMµSingle-objective microscope

This microscope allows the same magnification than a multi-objectives turret miscoscope in a smaller footprint.
Its trinocular head allows the use of digital camera and/or a laser.

- The illumination is made by LED
- C-mount for camera
- High working distance (WD)

MS12ZMono zoom microscope

This microscope is composed by a single objective and an internal zoom.
It allows a wide range of magnification without turret disadvantage for probing application.

- Light and compact
- Large working distance WD (ideal for high frequencies measurements applications)
- C-mount for camera
- High brightness (LED optical fiber)

SMZ171Stereozoom microscope

Stereozoom microscope with middle magnification for probe tip placement.

- High working distance (WD = 110mm)
- C-mount for digital camera (trinocular version)
- Several objectives and eyepieces for wide range of magnification
- LED or optical fiber illumination available

MOTICAMS12Digital Camera

Camera adaptable on all trinocular microscopes, useful for probe tips placing.

- Capture and measurement software supplied
- High resolution camera

S725SMicropositioner S725 with spring head

This micropositioner will allow landing on pads or lines down to 20µm.
Spring head (for fragile surface or temperature), allows limiting the pressure of needles on the pads.

S725PMicropositioner S725 with pivot head

This economic micropositioner will allow landing on pads or lines down to 20 µm.
Pivot head (quick Z down before fine adjust, ideal for probe station).

S725HTMicropositioner S725 for high temperature

This economic micropositioner will allow probe tips to land on pads or lines down to 20 µm.
Special model for temperature probe test measurement, up to 600°C.

S926SPrecision micropositioner S926 with spring head

This precision micropositioner allows placing probe tips on pads or lines within accuracy of the micrometer.
The spring head is perfect for temperature applications or fragile layers.

S926PPrecision micropositioner S926 with pivot head

This precision positioner allows placing probe tip on pads or lines within accuracy of the micrometer.
The pivot head is perfect for a quick positioning in Z and fine adjust.

SP100High precision micropositioner SP100

High-precision micropositioner with inline controls knobs, the SP100 will allow easy landing on pads as well as internal lines within micron accuracy.

- The down Z movement of the tip is totally vertical.
- The knobs with micrometric graduations (100TPI) allow an optimal density on the platen.
- Pivot head (Quick down Z for pre-positioning then fine movement) or Standard head with Z knob.

SP150Ultra-stable submicronic micropositioner SP150

High-precision ultra-stable micropositioner with inline controls knobs, the SP150 will allow easy landing on pads as well as internal lines with a submicron accuracy.

- The down Z movement of the tip is totally vertical.
- The knobs with micrometric graduations (100TPI) allow an optimal density on the platen.
- Standard head (down movement by the Z fine knob) or Pivot head for a quicker Z positioning.
- The SP150 today represents the state-of-the-art in term of accuracy of positioning.

UxTBCoaxial Probe holder with teflon isolation

This probe holder allows to mount a probe tip with an angle of 45°.

It is useful for low noise IV measurements with it teflon insulation.

UxGBCoaxial Probe holder with ceramic isolation

This probe holder allows to mount a probe tip with an angle of 45°.

It is useful for low noise IV measurements with it insulation and for high temperature, up to 600°C.

TRXTriax probe holder

Very low-noise probe holder (± 2 fA when used with a triaxial chuck and in an electrically shielded environment).

Can be mount onto S725P, S926P, SP100P, SP150P micropositioners.

TA-VIS-7575Active antivibration table

The table allows pneumatic filtering of vibrations, the 4 dampers efficiently filter the mechanical noise from the ground or neighbourhood for an ultra fine probe analysis, inspection or assembly.

- Platens available in several dimensions upon size and weight of the equipment
- Individually adjustable air pressure sensors at each corner

MW-DBCustomized dark box

For probing systems that do not have local chamber option, Microworld manufactures Dark Boxes designed to completely enclose a micro probe station or other system.

- Electrical and light isolation
- User safety for high voltage applications
- Feed-thru connectors adapted to the instrumentation to be connected
- Goose-neck for cable access
- Customizable design dimensions

S1080Thermal chuck controller

The trip-temp chuck and controller (ambient-hot-cold) ranges from -60°C to +300°C and allows a complete temperature characterization of devices, whether they are partial wafers or full wafers up to 12".

- The temperature parameters setting is by touch screen panel or remote control
- The transition time from hot to cold or reverse is one of the fastest on the market
- It is possible to program a ramp while heating up

PACEMeasurement and control software

PACE is a software that provide solution to combine measurement tools, automatic characterisation sequences, import and export datas.

PACE is composed of 3 windows :
- Measurement window : configuration and control of measurement tools
- Measurement sequence window : configuration and control of the sequence execution
- Mapping window : mapping configuration and control of the probe station (for semi-auto probe station)

Interface can be customised to match customer needs :
- MEMS test on PCB holder
- Import of GDS file for wafer mapping
- Control of vector network analyser (Rohde & Schwarz), SMU (Keithley, Keysight...)

ERS-AC3Thermal chuck

For 50 years ERS has been developing thermal chucks compatible with all probetest stations.

They have the following properties :
- High temperature: 300° C
- Low temperature: Patented airflow technology allows cooling down to -65° C
- Chuck TRIAX for low current measurement (FemtoAmp)
- Chuck High Voltage
- Non magnetic chuck

TRXCHUCKTriaxial chuck

The triaxial chuck will allow ultra-low current measurement down to fA when used with specific micropositioners with trixial arm and hermetic box for light and shield isolation.

- It is composed of 3 parts of which the middle part can be polarized,
- A high-temperature version is also available when associated with a hot or tri-temp chuck
- Available for wafers up to 300 mm (12")
- The triaxial chuck typically replaces the standard chuck onto a manual or semi-automatic prober to perform low level current measurement.

MW-SCA50Coaxial HF-Low-current probe

The coaxial Probe is designed for low-level signal probing (lower than 10fA@150°C)

- The probe's single unit design is especially desirable for the best possible electrical characteristics
- The Coaxial Probe is also offered with optional Ground Plane, Kelvin and resistor series /parallel configurations
- The Probes are constructed of microwave-quality components with a 50 Ohm semi-rigid cable shield being achieved through the utilisation a Teflon dielectric
- The probe contact protrudes from the shielding by .150" (3 mm) to maintain low-level signal noise to the probe
- Tips available (replaceable) from 0.5 µm to 20 µm
- The connector is a standard SSMC

MW-SCA250Coaxial Kelvin probe

The Kelvin Coaxial Probes are designed for low-level signal probing. The single unit design is especially desirable for the best possible electrical characteristics and improbes tip control over conventional dual tips design

- The Probes are constructed of microwave-quality components
- The 50 ohm semi-rigid cable consists of 8 mil tungsten wire forming the inner conductor and probe point, with isolation from the gold plated copper shield being achieved through the utilisation a Teflon dielectric
- The probe contact protrudes from the shielding by .150" (3 mm) to maintain low-level signal noise to the probe tips available from 0.5 µm to 12.5 µm
- Standard SSMC connector, series / parallel resistor configurations available in option

ABOUT : Low-Leakage-Current Testing

The Low-Leakage Test requests a specific environment in order to minimize the current leakages and obtain reliable results. The environment will add to the probe station itsefl the following :
• Triax chuck and probe tips
• Dark box
• Specific connecting with low leakage cables...
Under these conditions it will be possible to measure your devices at very low currents (few fA) and possibly in temperature