ApplicationELECTRICAL TESTS UNDER NEEDLESLow-Leakage-Current Testing

Low-Leakage-Current Testing

The Low-Leakage Test requests a specific environment in order to minimize the current leakages and obtain reliable results. The environment will add to the probe station itsefl the following :
• Triax chuck and probe tips
• Dark box
• Specific connecting with low leakage cables...
Under these conditions it will be possible to measure your devices at very low currents (few fA) and possibly in temperature
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CM210-310
High accuracy manual probe station
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High accuracy manual probe station
The Checkmate series represents the most accomplished probing stations, available for wafer up to 12".

- Upgradability from one version to another
- Manual or Semi-automatic version
- Test on Probecards available
- Optional thermal charactherization (-60°C to +300°C)
- High voltage (HV) and low current (fA) measurements possible
- Allows up to 8 DC micropositioners or probe card

MOST POPULAR REFERENCES

CM210 : Version 200 mm
CM310 : Version 300 mm
WL210E
8'' High accuracy manual probe station with local enclosure
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8'' High accuracy manual probe station with local enclosure
This probe station is derivated of the Checkmate series. It includes an additional local chamber that allow temperature measurement (hot/cold) or very low current application

- fA measurements (low leakage)
- Light-tight environnement
- Electrical shielding
- Configuration : 4 HF port or 8 DC/Kelvin port or HF/DC combination
- 300mm version available
- Compatible with high performances ERS chuck (patented air cooling system, temperature from -60°C to +300°C)
CM250-350
Semi-automatic probe station
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Semi-automatic probe station
Semi-automatic probe stations for full wafer electrical characterization up to 12'' (300 mm).

- Software : mapping, auto-alignment, pattern recognition, autofocus...
- Probecard application available
- Temperature characterization up to +600°C
- High voltage (HV - 10kV) and low leakage (fA) measurements
- Tool developed for design validation (R&D) and yield monitoring (production)
- Configuration : up 10 ports DC/Kelvin
- Compatible with high performances ERS chuck (patented air cooling system, temperature from -60°C to +300°C)

MOST POPULAR REFERENCES

CM250 : Version 200 mm
CM350 : Version 300 mm
PSM1000
Turret microscope
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Turret microscope
Turret microscope for fine inspection and high magnifications.
The PSM1000 is useful for precision contact on very small surfaces.

- It can be used as a stand alone or mounted onto analytical probe station
- A range of accessories is available including a variety of objectives (NIR, NUV, polarizer, analyzer...)
- The trinocular head accepts a choice of digital cameras
- Spectroscopic applications available
SMZ171
Stereozoom microscope
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Stereozoom microscope
Stereozoom microscope with middle magnification for probe tip placement.

- High working distance (WD = 110mm)
- C-mount for digital camera (trinocular version)
- Several objectives and eyepieces for wide range of magnification
- LED or optical fiber illumination available
S725S
Micropositioner S725 with spring head
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Micropositioner S725 with spring head
This micropositioner will allow landing on pads or lines down to 20µm.
Spring head (for fragile surface or temperature), allows limiting the pressure of needles on the pads.
S725P
Micropositioner S725 with pivot head
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Micropositioner S725 with pivot head
This economic micropositioner will allow landing on pads or lines down to 20 µm.
Pivot head (quick Z down before fine adjust, ideal for probe station).
S725HT
Micropositioner S725 for high temperature
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Micropositioner S725 for high temperature
This economic micropositioner will allow probe tips to land on pads or lines down to 20 µm.
Special model for temperature probe test measurement, up to 600°C.
S926S
Precision micropositioner S926 with spring head
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Precision micropositioner S926 with spring head
This precision micropositioner allows placing probe tips on pads or lines within accuracy of the micrometer.
The spring head is perfect for temperature applications or fragile layers.
S926P
Precision micropositioner S926 with pivot head
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Precision micropositioner S926 with pivot head
This precision positioner allows placing probe tip on pads or lines within accuracy of the micrometer.
The pivot head is perfect for a quick positioning in Z and fine adjust.
SP100
High precision micropositioner SP100
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High precision micropositioner SP100
High-precision micropositioner with inline controls knobs, the SP100 will allow easy landing on pads as well as internal lines within micron accuracy.

- The down Z movement of the tip is totally vertical.
- The knobs with micrometric graduations (100TPI) allow an optimal density on the platen.
- Pivot head (Quick down Z for pre-positioning then fine movement) or Standard head with Z knob.
SP150
Ultra-stable submicronic micropositioner SP150
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Ultra-stable submicronic micropositioner SP150
High-precision ultra-stable micropositioner with inline controls knobs, the SP150 will allow easy landing on pads as well as internal lines with a submicron accuracy.

- The down Z movement of the tip is totally vertical.
- The knobs with micrometric graduations (100TPI) allow an optimal density on the platen.
- Standard head (down movement by the Z fine knob) or Pivot head for a quicker Z positioning.
- The SP150 today represents the state-of-the-art in term of accuracy of positioning.
UxTB
Coaxial Probe holder with teflon isolation
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Coaxial Probe holder with teflon isolation
This probe holder allows to mount a probe tip with an angle of 45°.

It is useful for low noise IV measurements with it teflon insulation.
UxGB
Coaxial Probe holder with ceramic isolation
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Coaxial Probe holder with ceramic isolation
This probe holder allows to mount a probe tip with an angle of 45°.

It is useful for low noise IV measurements with it insulation and for high temperature, up to 600°C.
TRX
Triax probe holder
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Triax probe holder
Very low-noise probe holder (± 2 fA when used with a triaxial chuck and in an electrically shielded environment).

Can be mount onto S725P, S926P, SP100P, SP150P micropositioners.
MW-DB
Customized dark box
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Customized dark box
For probing systems that do not have local chamber option, Microworld manufactures Dark Boxes designed to completely enclose a micro probe station or other system.

- Electrical and light isolation
- Feed-thru connectors adapted to the instrumentation to be connected
- Goose-neck for cable access
- Customizable design dimensions.

TRXCHUCK
Triaxial chuck
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Triaxial chuck
The triaxial chuck will allow ultra-low current measurement down to fA when used with specific micropositioners with trixial arm and hermetic box for light and shield isolation.

- It is composed of 3 parts of which the middle part can be polarized,
- A high-temperature version is also available when associated with a hot or tri-temp chuck
- Available for wafers up to 300 mm (12")
- The triaxial chuck typically replaces the standard chuck onto a manual or semi-automatic prober to perform low level current measurement.

MW-SCA50
Coaxial HF-Low-current probe
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Coaxial HF-Low-current probe
The coaxial Probe is designed for low-level signal probing (lower than 10fA@150°C)

- The probe's single unit design is especially desirable for the best possible electrical characteristics
- The Coaxial Probe is also offered with optional Ground Plane, Kelvin and resistor series /parallel configurations
- The Probes are constructed of microwave-quality components with a 50 Ohm semi-rigid cable shield being achieved through the utilisation a Teflon dielectric
- The probe contact protrudes from the shielding by .150" (3 mm) to maintain low-level signal noise to the probe
- Tips available (replaceable) from 0.5 µm to 20 µm
- The connector is a standard SSMC
MW-SCA250
Coaxial Kelvin probe
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Coaxial Kelvin probe
The Kelvin Coaxial Probes are designed for low-level signal probing. The single unit design is especially desirable for the best possible electrical characteristics and improbes tip control over conventional dual tips design

- The Probes are constructed of microwave-quality components
- The 50 ohm semi-rigid cable consists of 8 mil tungsten wire forming the inner conductor and probe point, with isolation from the gold plated copper shield being achieved through the utilisation a Teflon dielectric
- The probe contact protrudes from the shielding by .150" (3 mm) to maintain low-level signal noise to the probe tips available from 0.5 µm to 12.5 µm
- Standard SSMC connector, series / parallel resistor configurations available in option
For technical and commercial information, quote, ordering or request of visit by our representative. +33 (0)476 561 617
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