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Low-Leakage-Current Testing

The Low-Leakage Test requests a specific environment in order to minimize the current leakages and obtain reliable results. The environment will add to the probe station itsefl the following :
• Triax chuck and probe tips
• Dark box
• Specific connecting with low leakage cables...
Under these conditions it will be possible to measure your devices at very low currents (few fA) and possibly in temperature
CM210-310
High accuracy manual probe station
High accuracy manual probe station
The Checkmate series represents the most accomplished probing stations, available for wafer up to 12".

- Upgradability from one version to another
- Manual or Semi-automatic version
- Test on Probecards available
- Optional thermal charactherization (-60°C to +300°C)
- High voltage (HV) and low current (fA) measurements possible
- Allows up to 8 DC micropositioners or probe card


MOST POPULAR REFERENCES

CM210 : Version 200 mm
CM310 : Version 300 mm
WL210E
8'' High accuracy manual probe station with local enclosure
8'' High accuracy manual probe station with local enclosure
This probe station is derivated of the Checkmate series. It includes an additional local chamber that allow temperature measurement (hot/cold) or very low current application

- fA measurements (low leakage)
- Light-tight environnement
- Electrical shielding
- Configuration : 4 HF port or 8 DC/Kelvin port or HF/DC combination
- 300mm version available
- Compatible with high performances ERS chuck (patented air cooling system, temperature from -60°C to +300°C)
CM250-350
Semi-automatic probe station
Semi-automatic probe station
Semi-automatic probe stations for full wafer electrical characterization up to 12'' (300 mm).

- Software : mapping, auto-alignment, pattern recognition, autofocus...
- Probecard application available
- Temperature characterization up to +600°C
- High voltage (HV - 10kV) and low leakage (fA) measurements
- Tool developed for design validation (R&D) and yield monitoring (production)
- Configuration : up 10 ports DC/Kelvin
- Compatible with high performances ERS chuck (patented air cooling system, temperature from -60°C to +300°C)


MOST POPULAR REFERENCES

CM250 : Version 200 mm
CM350 : Version 300 mm
PSM1000
The High Power Microscope
The High Power Microscope
High power microscope for fine inspection and high magnifications.
The PSM1000 is useful for precision contact on very small surfaces.


- It can be used as a stand alone or mounted onto Analytical probe station
- A range of accessories is available including a variety of objectives (polarizer, analyzer...)
- The trinocular head accepts a choice of digital cameras
- Spectroscopic applications available
SMZ168
Stereozoom microscope
Stereozoom microscope
Stereozoom microscope with trinocular head for probe tip placement.

- High working distance (WD = 113 mm)
- C-mount for digital camera
- Several objectives and eyepieces for wide range of magnification
S725S-x
Micropositioner S725 serie with spring head
Micropositioner S725 serie with spring head
This micropositioner will allow landing on pads or lines down to 20µm.

- Spring head (for fragile surface or temperature), allows limiting the pressure of needles on the pads
S725P-x
Micropositioner S725 serie with pivot head
Micropositioner S725 serie with pivot head
This economic micropositioner will allow landing on pads or lines down to 20 µm.

- Pivot head (quick Z down before fine adjust, ideal for probe station)
S725HT-x
Micropositioner S725 high temperature
Micropositioner S725 high temperature
This economic micropositioner will allow probe tips to land on pads or lines down to 20 µm.

- Special model for temperature probe test measurement
SP150-xx
Ultra-stable submicronic micropositioner SP150
Ultra-stable submicronic micropositioner SP150
High-precision ultra-stable micropositioner with inline controls knobs, the SP150 will allow easy landing on pads as well as internal lines with a submicron accuracy.

- The down Z movement of the tip is totally vertical
- The knobs with micrometric graduations (100TPI) allow an optimal density on the platen.
- Standard head (down movement by the Z fine knob) or Pivot head for a quicker Z positioning
- The SP150 today represents the state-of-the-art in term of accuracy of positioning
UxTB
Coaxial Probe holder with teflon isolation
Coaxial Probe holder with teflon isolation
Specifically designed for low noise measurements, the coaxial probe holder allows probing at low leakage
UxGB
Coaxial Probe holder with ceramic isolation
Coaxial Probe holder with ceramic isolation
Specifically designed for low noise measurements, the coaxial probe holder allows probing at low leakage.
UxCB
Coaxial Probe holder with delrin isolation
Coaxial Probe holder with delrin isolation
Specifically designed for low noise measurements, the coaxial probe holder allows probing at low leakage.
TRX
Triax probe holder
Triax probe holder
Very low-Noise probe holder (= ~ ± 2 fA) when used with the triaxial chuck and in a electrically shielded environment.

- Mounts onto S725, S926, SP100, SP150 micropositioners
TAF-XX
Passive antivibration table
Passive antivibration table
The 4 air pads efficiently filter the mechanical noise from the ground or neighbourhood for an ultra fine probe analysis, inspection or assembly.

- Platen available in several dimensions upon size and weight of the equipment
- Marble thickness is selected in function of the equipment seated on
- Faebi pads with air filling using compressor or bike pump (air line not needed)
- Several options (wheel, LCD stand, keyboard stand, rack, dark boxes capably...)
TAB-XX
Active antivibration table
Active antivibration table
The table allows pneumatic filtering of vibrations, the 4 dampers efficiently filter the mechanical noise from the ground or neighbourhood for an ultra fine probe analysis, inspection or assembly.

- Platens available in several dimensions upon size and weight of the equipment
- Individually adjustable air pressure sensors at each corner
MW-DB
Dark box
Dark box
For probing systems that do not have local chamber option, Microworld manufactures Dark Boxes designed to completely enclose a micro probe station or other system.

- Electrical and light isolation
- Feed-thru connectors adapted to the instrumentation to be connected
- Goose-neck for cable access
- Customizable design etamp; dimensions.

TRXCHUCK
Triaxial chuck
Triaxial chuck
The triaxial chuck will allow ultra-low current measurement down to fA when used with specific micropositioners with trixial arm and hermetic box for light and shield isolation.

- It is composed of 3 parts of which the middle part can be polarized,
- A high-temperature version is also available when associated with a hot or tri-temp chuck
- Available for wafers up to 300 mm (12")
- The triaxial chuck typically replaces the standard chuck onto a manual or semi-automatic prober to perform low level current measurement.

SSMC-BNC-x
Coaxial Patch Cable for SSMC to BNC
Coaxial Patch Cable for SSMC to BNC
SSMC coaxial cable

- Coaxial cable RG174
- SSMC female connector to BNC male connectors
- Standard length 1 m (others available from 30cm to 2m)
MW-SCA50
Coaxial HF-Low-current probe
Coaxial HF-Low-current probe
The coaxial Probe is designed for low-level signal probing (lower than 10fA@200°C)

• The probe's single unit design is especially desirable for the best possible electrical characteristics
• The Coaxial Probe is also offered with optional Ground Plane, Kelvin and resistor series /parallel configurations
• The Probes are constructed of microwave-quality components with a 50 Ohm semi-rigid cable shield being achieved through the utilization a Teflon dielectric
• The probe contact protrudes from the shielding by .150" (3mm) to maintain low-level signal noise to the probe
• Tips available (replaceable) from 0.5µm to 20 µm
• The connector is a standard SSMC
MW-SCA250
Coaxial true-Kelvin low-signal-level probe
Coaxial true-Kelvin low-signal-level probe
The Kelvin Coaxial Probes are designed for low-level signal probing in high-current applications. The single unit design is especially desirable for the best possible electrical characteristics and improbes tip control over conventional dual tips design

• The Probes are constructed of microwave-quality components
• The 50 ohm semi-rigid cable consists of 8 mil tungsten wire forming the inner conductor and probe point, with isolation from the gold plated copper shield being achieved through the utilization a Teflon dielectric
• The probe contact protrudes from the shielding by .150" (3mm) to maintain low-level signal noise to the probTips available (replaceable) from 0.5µm to 12.5µm
• Standard SSMC connector etamp; Series /parallel resistor configurations available in option
For technical and commercial information, quote, ordering or request of visit by our representative. +33 (0)476 561 617

5 rue de la Verrerie

38120 Le Fontanil-Cornillon

Grenoble / France

Fax : +33(0) 476 757 484

RCS Grenoble B 381 001 171 - APE 4652Z

TVA FR 48 381 001 171