EQUIPMENT FOR THIN LAYER CHARACTERIZATIONFour Point Probe systems

EQUIPMENT FOR THIN LAYER CHARACTERIZATION - Four Point Probe systems

General use
Semi-automatic
Calibration standard

Set of equipment's for measuring the sheet resistivity of thin layers in ohm/square or ohm.cm, manual or automatic positioning, mapping
• Manual basic models, or more with control and mesurement software, portable systems
• Semi-automatic range for wafers up to 300 mm with mapping
• Choice of Four Point Probe heads
• Temperature option

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General use

This serie of instruments will seduce the characterization labs, they are either totally manual with a four-point-probe head holder and a free-wires output toward the measuring instrument, or more complete including the control software and optionally the intrumentation
• Three configurations to respond to all budgets and automation needs
• Adaptable for wafers up to 200 mm
• Temperature option for specific materials

S302

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4 point probe stand

The configuration is composed of a stand holding the probe head with a quick Z lever and a chuck for wafer of 4, 6, 8 or 12 inches, the sample positioning is manual as well as the contact of the tips by a rotating lever.

- A micro-switch insures that the current will be injected only after contact of the 4-point probe head
- The measurement itself is provided from an external sourcemeter and voltmeter typically Keithley family, which can be supplied if requested
- The system can be upgraded to include the measurement and display onto a PC
- Perfect tool for for laboratories, universities, research centers... in the material characterization.

MW-Pack4PP-M

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4 point probe manual measurement package medium resistivity range

Manual sheet resistivity measurement systems for laboratory, for research and small productions. The stand includes several features to ensure accurate resistivity measurements. The system is used to characterize materials made by semiconductor doping, metal deposition, resistive paste printing, glass coating...

A manual lever makes is used to make the Z movement to be in contact with the sample, with a repeatability of the order of one micron. In addition, a control wheel located on the right side allows to precisely refine the Z movement. The sample is mounted on a movable support, which makes it possible to be places under the four point probe head easily between each measuring point.

- A micro-switch insures that the current will be injected only after contact of the 4 needles
- The measurement itself is provided from an external sourcemeter and voltmeter typically Keithley family (supplied upon version)
- The system is modular including the measurement and display onto a PC

Th software manages the tests, displays results and allows printouts or export of the data. The user inputs the size and shape of the sample, edge exclusion and number of points to be tested. The user may also define pass/fail criteria and which parameter (Sheet Resistance, Resistivity, or V/I) to display. A graphic picture of the target probe points is displayed. Prompts tell user to move to the next position. Upon completion of testing all points, the average, standard deviation, minimum and maximum are prominently displayed. Upon completion, a summary report may be printed showing the data and pass/fail status.

Semi-automatic

The semi-automatic models will allow testing a complete wafer up to 300 mm with a choice of mapping patterns and calculate the mean and standard deviation of the measured values of resistivity. The loading/unloading is manual, the X-Y-Z travels and measurements control are automatic.
• Several mapping paterns are available, rectangular, polar...
• User's mode allows measuring on selected points
• Automatic range of current
• Powerfull software of control and measurements with management of the stored values...
• SPC, 3D graphs...

333A