LAYER CHARACTERIZATIONFour point probe systems

LAYER CHARACTERIZATION - Four point probe systems

Manual systems
Semi-automatic systems
Four point probe heads
Calibration wafers

Set of equipment for measuring the surface resistivity of thin films using the 4-point probe in-line method.

- Portable, manual and semi-automatic systems
- Single die to 300mm (12") wafer
- Temperature up to 600°C
- Mapping, measurement and analysis software
- 4 point probe heads with choice of pitch, radius and pressure

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Manual systems

This serie of instruments will seduce the characterization labs, they are either totally manual with a four-point-probe head holder and a free-wires output toward the measuring instrument, or more complete including the control software and optionally the intrumentation
• Three configurations to respond to all budgets and automation needs
• Adaptable for wafers up to 200 mm
• Temperature option for specific materials

S302

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4 point probe stand

The configuration is composed of a stand holding the probe head with a quick Z lever and a chuck for wafer of 4 or 6'', the sample positioning is manual as well as the contact of the tips by a rotating lever.

- A micro-switch insures that the current will be injected only after contact of the 4-point probe head
- The measurement itself is provided from an external sourcemeter and voltmeter typically Keithley family, which can be supplied if requested
- The system can be upgraded to include the measurement and display onto a PC
- Perfect tool for for laboratories, universities, research centers... in the material characterization.

MW-Pack4PP-M

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4 point probe manual measurement package medium resistivity range

Manual sheet resistivity measurement systems for laboratory, for research and small productions. The stand includes several features to ensure accurate resistivity measurements. The system is used to characterize materials made by semiconductor doping, metal deposition, resistive paste printing, glass coating...

A manual lever makes is used to make the Z movement to be in contact with the sample, with a repeatability of the order of one micron. In addition, a control wheel located on the right side allows to precisely refine the Z movement. The sample is mounted on a movable support, which makes it possible to be places under the four point probe head easily between each measuring point.

- A micro-switch insures that the current will be injected only after contact of the 4 needles
- The measurement itself is provided from an external sourcemeter and voltmeter typically Keithley family (supplied upon version)
- The system is modular including the measurement and display onto a PC

Th software manages the tests, displays results and allows printouts or export of the data. The user inputs the size and shape of the sample, edge exclusion and number of points to be tested. The user may also define pass/fail criteria and which parameter (Sheet Resistance, Resistivity, or V/I) to display. A graphic picture of the target probe points is displayed. Prompts tell user to move to the next position. Upon completion of testing all points, the average, standard deviation, minimum and maximum are prominently displayed. Upon completion, a summary report may be printed showing the data and pass/fail status.

Semi-automatic systems

The semi-automatic models will allow testing a complete wafer up to 300 mm with a choice of mapping patterns and calculate the mean and standard deviation of the measured values of resistivity. The loading/unloading is manual, the X-Y-Z travels and measurements control are automatic.
• Several mapping paterns are available, rectangular, polar...
• User's mode allows measuring on selected points
• Automatic range of current
• Powerfull software of control and measurements with management of the stored values...
• SPC, 3D graphs...

333A

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Semi-automatic 4 point probe measurement system

Measurement range 1 mohm/sq to 8E5 ohm/sq, manual (1pt, 5pts) or semi-automatic with analysis and mapping up to 6000 points upon model up to 12'' wafer.

- Standard measurements range, optional extended range, data storage and retrieval, powerfull search functions in the data results base
- Mapping patterns polar or cartesian up to 650 points, diameter scan, custom patterns, wafer edge correction
- Automatic detection of current range and P/N
- This series of sheet resistivity measurement systems will fullfill all needs in term on electrical sheet resistivity qualification, either in R&D and manual mode or in a production mode

280I

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Semi-automatic 4 point probe measurement system

Measurement range 1 mohm/sq to 8E11 ohm/sq, manual (1pt, 5pts) or semi-automatic with analysis and mapping up to 6000 points upon model.

- Standard measurements range, optional extended range, data storage and retrieval, powerfull search functions in the data results base
- Mapping patterns polar or cartesian up to 650 points, diameter scan, custom patterns, wafer edge correction
- Automatic detection of current range and P/N
- This series of sheet resistivity measurement systems will fullfill all needs in term on electrical sheet resistivity qualification, either in R&D and manual mode or in a production mode
- Resistivity range extension possible until 8E11 ohm/sq

QUADPRO

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Semi-automatic 4 point probe measurement system

This system is derivated from the PRO4 system into a semi-automatic version (or manual) and an extended resisitvity range, low and high Res (up to 10G ohm/sq).

• A thermal controller and a software allow the TCR coefficient gestion
• Suited for laboratory research on semiconductor materials

Four point probe heads

The measurement heads consist of 4 independent tips seated on spring. Various models are available depending on the type of layer and the electrical characterisitics
• Serie for ambient use useable on our range of equipment's or separately
• High temperature models
• Standard output wiring or coaxial
• Specific high resistivity wiring

SP4