LAYER CHARACTERIZATIONFour point probe systems

S3024 point probe stand

The configuration is composed of a stand holding the probe head with a quick Z lever and a chuck for wafer of 4" or 6", the sample positioning is manual as well as the contact of the tips by a rotating lever.

Applications:

- Si, Ge, SiGe, SiC, GaAs, InGaAs, InP, GaN, ZnO, TCO
- Oxide deposit
-Sensors, MEMS
- Conductive polymer
- Batteries
- Electrodes
- Photovoltaic
- Ceramic & Glass
- Optoelectronic component
- Nanomaterials

Specifications:

• A micro-switch insures that the current will be injected only after contact of the 4-point probe head
• The measurement itself is provided from an external sourcemeter and voltmeter typically Keithley family, which can be supplied if requested
• The system can be upgraded to include the measurement and display onto a PC
• Perfect tool for for laboratories, universities, research centers... in the material characterization.

S3034 point probe stand large area

The configuration is composed of a stand holding the probe head with a quick Z lever and a chuck for wafer of 8" or 12", the sample positioning is manual as well as the contact of the tips by a rotating lever.

Applications:

- Si, Ge, SiGe, SiC, GaAs, InGaAs, InP, GaN, ZnO, TCO
- Oxide deposit
-Sensors, MEMS
- Conductive polymer
- Batteries
- Electrodes
- Photovoltaic
- Ceramic & Glass
- Optoelectronic component
- Nanomaterials

Specifications:

• A micro-switch insures that the current will be injected only after contact of the 4-point probe head
• The measurement itself is provided from an external sourcemeter and voltmeter typically Keithley family, which can be supplied if requested
• The system can be upgraded to include the measurement and display onto a PC
• Perfect tool for for laboratories, universities, research centers... in the material characterization.

MW-Pack4PP-M4 point probe manual measurement package medium resistivity range

Manual sheet resistivity measurement systems for laboratories, for research and small productions. The stand includes several features enabling it to measure resistivity and surface resistance using 4 precise points. It is possible to characterize materials manufactured by semiconductor doping, metal or glass deposition, rubber materials, etc.

A manual lever makes it possible to make a movement in Z of contact and non-contact with a repeatability of the order of a micron. In addition, an adjustment wheel located on the top of the device makes it possible to fine-tune the movement in Z with precision.
The sample to be tested is mounted on a mobile support which allows it to be easily placed under the measuring head between each measurement point.
In addition, the equipment has several chuck sizes ranging from 4" to 12".

Applications:

- Si, Ge, SiGe, SiC, GaAs, InGaAs, InP, GaN, ZnO, TCO
- Oxide deposit
-Sensors, MEMS
- Conductive polymer
- Batteries
- Electrodes
- Photovoltaic
- Ceramic & Glass
- Optoelectronic component
- Nanomaterials

Specifications:

• I/V measurement, sheet resistance, resistivity or thickness
• Cartography
• A micro-switch ensures the injection of current from the moment all the tips are in contact.
• The measurement is performed by an external Keithley 2450 device.
• Software for data processing
• Creation of an I/V curve
• Bipolar measurement
• Data export in Txt, Excel, CSV format...

The measurement system uses software for measurement and display of results that allows data export for later data processing. It is possible to map the sample according to the resistivities or thicknesses measured.
The user entered the size and shape of the sample, the exclusion edge and the number of points to be tested. A graphic image of the target measurement points is displayed. At the end of the test of all the points, we find the average of the measured values, the standard deviation as well as the maximum and minimum measurement.

MW-Pack4PP-H4 point probe manual measurement package high resisitivy range

Manual sheet resistivity measurement systems for laboratories, for research and small productions. The stand includes several features enabling it to measure resistivity and surface resistance using 4 precise points. It is possible to characterize materials manufactured by semiconductor doping, metal or glass deposition, rubber materials, etc.

A manual lever makes it possible to make a movement in Z of contact and non-contact with a repeatability of the order of a micron. In addition, an adjustment wheel located on the top of the device makes it possible to fine-tune the movement in Z with precision.
The sample to be tested is mounted on a mobile support which allows it to be easily placed under the measuring head between each measurement point.
In addition, the equipment has several chuck sizes ranging from 4" to 12".

Applications:

- Si, Ge, SiGe, SiC, GaAs, InGaAs, InP, GaN, ZnO, TCO
- Oxide deposit
-Sensors, MEMS
- Conductive polymer
- Batteries
- Electrodes
- Photovoltaic
- Ceramic & Glass
- Optoelectronic component
- Nanomaterials

Specifications:

• I/V measurement, sheet resistance, resistivity or thickness
• Software for data processing
• Creation of an I/V curve
• Bipolar measurement
• Data export in Txt, Excel, CSV format...
• A micro-switch ensures the injection of current from the moment all the tips are in contact.
• The measurement is performed by an external Keithley 2635B device.

The measurement system uses software for measurement and display of results that allows data export for later data processing. It is possible to map the sample according to the resistivities or thicknesses measured.
The user entered the size and shape of the sample, the exclusion edge and the number of points to be tested. A graphic image of the target measurement points is displayed. At the end of the test of all the points, we find the average of the measured values, the standard deviation as well as the maximum and minimum measurement.

QUADPRO2MManual 4 point probe measurement system

4-point manual in-line temperature measurement system on samples ranging from 10mm to 300mm in diameter.. Capable of measuring surface resistance ranges from 10μΩ/sq to 10GΩ/sq. Several versions possibles to optimize measurement accuracy according to the ranges measured.

Equipment feature:

• V/I measurement, sheet resistance, resistivity or thickness
• Mean, Standard Deviation, Minimum, Maximum and 3Sigma reports for the dataset
• Temperature Coefficient of Resistance (TCR) measurements
• Automated 2D mapping, 3D mapping and cross-section
• Ultra high precision and repeatability
• Comparative mapping

The TCR option

The Resistance Temperature Coefficient option integrates sample temperature control as well as automated injected current control and resistance calculations. Integrated with a thermal chuck system, the test automatically sweeps temperatures over a wide range without moving the test tips.
Measurements are taken at each target temperature and the results are plotted on a graph. The TCR is expressed in parts per million (PPM). Users define the temperature range, steps, and delay for each test point before taking a measurement. A variety of thermal chucks are available to set the range and resolution from room temperature to 300°C, with 1° resolution.
Data can be printed or exported to a spreadsheet for further analysis.

333A12" semi-automatic 4 point probe measurement system

Semi-automatic 4-point in-line measurement systems on samples ranging from 10mm to 200mm in diameter. Thanks to their motorized chucks, the 333A can map up to 6000 measurement points on surface resistance ranges from 1 mohm/sq to 8E11 Ohm/sq.

Specification:

• Different versions adapted to the different resistance ranges tested
• Several types of mapping: 1pts, 5pts, 9pts, diagonal, Cartesian, custom etc..
• Powerful calculation algorithm
• Edge effect compensation, geometric factor
• SECS II Communication
• Possible version in Full-Automatic with loading of wafers via cassette and pre-alignment

Application:

- Si, Ge, SiGe, SiC, GaAs, InGaAs, InP, GaN, ZnO, TCOs
- Optoelectronic component
- Nanomaterials
- Sensors, MEMS
- Conductive polymer
- Oxide deposit
- Ceramic & Glass
- Batteries
- Electrodes
- Photovoltaic

280I8" semi-automatic 4 point probe measurement system

Semi-automatic 4-point in-line measurement systems on samples ranging from 10mm to 200mm in diameter. Thanks to their motorized chucks, the 280I can map up to 6000 measurement points on surface resistance ranges from 1 mohm/sq to 8E5 Ohm/sq.

Specification:

• Extended range down to 8E11 Ohm/sq.
• Different versions adapted to the different resistance ranges tested
• Several types of mapping: 1pts, 5pts, 9pts, diagonal, Cartesian, custom etc..
• Powerful calculation algorithm
• Edge effect compensation, geometric factor
• SEC II Communication

Application:

- Si, Ge, SiGe, SiC, GaAs, InGaAs, InP, GaN, ZnO, TCOs
- Optoelectronic component
- Nanomaterials
- Sensors, MEMS
- Conductive polymer
- Oxide deposit
- Ceramic & Glass
- Batteries
- Electrodes
- Photovoltaic

QUADPRO2ASemi-automatic 4 point probe measurement under temperature

Semi-automatic 4-point in-line temperature measurement system on samples ranging from 10mm to 300mm in diameter.. Capable of measuring surface resistance ranges from 10μΩ/sq to 10GΩ/sq. Several versions possibles to optimize measurement accuracy according to the ranges measured.

Equipment feature:

• V/I measurement, sheet resistance, resistivity or thickness
• Mean, Standard Deviation, Minimum, Maximum and 3Sigma reports for the dataset
• Temperature Coefficient of Resistance (TCR) measurements
• Automated 2D mapping, 3D mapping and cross-section
• Ultra high precision and repeatability
• Comparative mapping

The TCR option

The Resistance Temperature Coefficient option integrates sample temperature control as well as automated injected current control and resistance calculations. Integrated with a thermal chuck system, the test automatically sweeps temperatures over a wide range without moving the test tips.
Measurements are taken at each target temperature and the results are plotted on a graph. The TCR is expressed in parts per million (PPM). Users define the temperature range, steps, and delay for each test point before taking a measurement. A variety of thermal chucks are available to set the range and resolution from room temperature to 300°C, with 1° resolution.
Data can be printed or exported to a spreadsheet for further analysis.

SRM232Hand-held 4 point probe system

The portable resistivity system is a device that offers the possibility of measuring resistivity, resistance, surface resistance or thickness on a wide variety of materials of varying sizes. Thanks to its battery operation, this system has versatile applications that can be used in various fields.

Applications:

- Si, Ge, SiGe, SiC, GaAs, InGaAs, InP, GaN, ZnO, TCO
- Oxide deposit
- Photovoltaic
- Ceramic & Glass
- Optoelectronic component
- Nanomaterials
-Sensors, MEMS
- Conductive polymer
- Batteries
- Electrodes

Specifications:

• 4 models/measurement ranges available with suitable calibrator
• Interchangeable 4-point head
• Applications: Conductivity/resistivity of layers on large panels, fuselages, bodywork... or in totally mobile measurement on an external site.

SP44 point probe head

4-point head for ambient temperature, usable on equipment of the Pack4PP, Quadpro series and or for separate use. The standard head is designed in delrin with 4 independent tips in tungsten or osmium. A bayonet and two screws make it easy to attach the tip to our 4-prong stand for precise and repeatable measurements.

Specifications:

• Material of the tips defined according to application & type of layer
• Choice of parameters: Tip spacing (pitch), tip fineness, tip pressure
• Terminations: Flying leads, banana plugs, BNC, triaxial cables, 9-pin connector...

CP4Cylindrical 4 point probe head

4-point head for measuring resistivity, resistance, surface resistance or thickness. For use on 280 series equipment or separately, standard tip spacing is 1mm. The pressure is adjustable directly on the head.

Specifications:

• Adjustable pressure on the probe head
• Tip radius of different sizes adapted to most electronics layers
• Termination by 9-pins connector for direct plug in
• Application at ambient temperature only

HT4High temperature 4 point probe head

4-point head for high temperature and high resistivity, usable on equipment of the Pack4PP, Quadpro series and or for separate use. The standard head is designed in macor with 4 independent tips in tungsten or osmium. A bayonet and two screws make it easy to attach the tip to our 4-prong stand for precise and repeatable measurements.

Specifications:

• Material of the tips defined according to the type of layer to be measured
• Choice of parameters: Tip spacing (pitch), tip fineness, tip pressure
• Terminations: Flying leads, Banana jacks, Triax...

SRS3Calibration wafer NIST certified

This wafer is used to calibrate 4-point resistivity measurement systems. It has NIST certification.

Specifications:

• 3" (75mm) wafer
• NIST certification during 1 year

SRS8Calibration wafer

This wafer is used to calibrate 4-point resistivity measurement systems. It has NIST certification.

Specifications:

• 8" (200mm) wafer
• NIST certification during 1 year

SRS12Calibration wafer

This wafer is used to calibrate 4-point resistivity measurement systems. It has NIST certification.

Specifications:

• 12" (300mm) wafer
• NIST certification during 1 year

ABOUT OUR Four point probe systems

Range of equipments for measuring the sheet resistance of thin films using the 4-point-probe method in-line (to be distinguished from the Van Der Pauw method). Using a measuring probe head with 4 metal tips distributed in a rectilinear and equidistant manner, a current is injected at the two outer contacts and a voltage is measured at the two inner tips. By Ohm's law, the sheet resistance of the measured thin layer is thus determined. These systems exist in portable, manual or automatic versions. The software makes it possible to control the source measurement device (Keithley or Keysight type), to make plots or maps and to export the data for further analysis. Some versions are also available for temperature measurement.

Applications:

- Si, Ge, SiGe, SiC, GaAs, InGaAs, InP, GaN, ZnO, TCOs, ITOs
- Optoelectronics components
- Nanomaterials
- Sensors, MEMS
- Conductives polymers
- Oxide deposits
- Ceramics & Glass
- Batteries
- Electrodes
- Photovoltaic

Specifications:

• Sheet resistance range: 10 µΩ/sq to 8E11 Ω/sq
• Sample size: from chip to 12" (300mm) wafer
• Number of measurement points: up to 6,000 points

For technical and commercial information, quote, ordering or request of visit by our representative.
+33 (0)476 561 617

5 rue de la Verrerie

38120 Le Fontanil-Cornillon

Grenoble / France

Fax : +33(0) 476 757 484

RCS Grenoble B 381 001 171 - APE 4652Z

TVA FR 48 381 001 171