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Four Point Probe systems

EQUIPMENT FOR THIN LAYER CHARACTERIZATION - Four Point Probe systems

Set of equipment's for measuring the sheet resistivity of thin layers in ohm/square or ohm.cm, manual or automatic positioning, mapping
• Manual basic models, or more with control and mesurement software, portable systems
• Semi-automatic range for wafers up to 300 mm with mapping
• Choice of Four Point Probe heads
• Temperature option
S302-x
4 point probe stand
4 point probe stand
The base configuration is composed of a stand holding the probe head with a quick Z lever and a chuck for wafer of 4, 6 or 8 inches,he sample positioning is manual as well as the contact of the tips by a rotating lever.

• A micro-switch insures that the current will be injected only after contact of the 4-point probe head
• The  measurement itself is provided from an external sourcemeter and voltmeter typically Keithley family, which can be suppliedl if requested
• The system can be upgraded to include the measurement and display onto a PC, see Pro4
• Perfect tool for for laboratories, universities, research centers... in the material characterization.

Pack 4PP
4 point probe manual-evolutive measurement system_DUPLICATE
4 point probe manual-evolutive measurement system_DUPLICATE
Manual sheet resistivity measurement systems for laboratory, for research and small productions. The stand includes several features to ensure accurate resistivity measurements. A manual lever makes is used to make the Z movement to be in contact with the sample, with a repeatability of the order of one micron. In addition, a control wheel located on the right side allows to precisely refine the Z movement. The sample is mounted on a movable support, which makes it possible to be places under the four point probe head easilily between each measuring point.


• A micro-switch insures that the current will be injected only after contact of the 4 needles
• The measurement itself is provided from an external sourcemeter and voltmeter typically Keithley family (supplied upon version)
• The system is modular including the measurement and display onto a PC


Th softare mananges the tests, displays results and allows printouts or export of the data. The user inputs the size and shape of the sample, edge exclusion and number of points to be tested. The user may also define pass/fail criteria and which parameter (Sheet Resistance, Resistivity, or V/I) to display. A graphic picture of the target probe points is displayed. Prompts tell user to move to the next position. Upon completion of testing all points, the average, standard deviation, minimum and maximum are prominetly displayed. Upon completion, a summary report may be printed showing the data and pass/fail status.

280I
Semi-automatic 4 point probe measurement system
Semi-automatic 4 point probe measurement system
Measurement range 1 mohm to 8E11 ohm/square, manual (1pt, 5pts) or semi-automatic with analysis and mapping up to 6000 points upon model.

• Standard measurements range, optional extended range, data storage and retrieval, powerfull search functions in the dataresults base
• Mapping patterns polar or cartesian up to 650 points, diameter scan, custom patterns, wafer edge correction
• Automatic detection of current range and P/N
• This serie of sheet resistivity measurement systems will fullfill all needs in term on electrical sheet resistivity qualification, either in R&D and manual mode or in a production mode


QUADPRO
Semi-automatic 4 point probe measurement system
Semi-automatic 4 point probe measurement system
This system is derivated from the PRO4 system into a semi-automatic version (or manual) and an extended resisitvity range, low and high Res (up to 10G ohm/sq).

• A thermal controller and a software allow the TCR coefficient gestion
• Suited for laboratory research on semiconductor materials


SRS3
Calibration wafer
Calibration wafer
This NIST wafer is used to calibrate 4PP systems

• NIST certification during 1 year
This serie of instruments will seduce the characterization labs, they are either totally manual with a four-point-probe head holder and a free-wires output toward the measuring instrument, or more complete including the control software and optionally the intrumentation
• Three configurations to respond to all budgets and automation needs
• Adaptable for wafers up to 200 mm
• Temperature option for specific materials
S302-x
4 point probe stand
4 point probe stand
The base configuration is composed of a stand holding the probe head with a quick Z lever and a chuck for wafer of 4, 6 or 8 inches,he sample positioning is manual as well as the contact of the tips by a rotating lever.

• A micro-switch insures that the current will be injected only after contact of the 4-point probe head
• The  measurement itself is provided from an external sourcemeter and voltmeter typically Keithley family, which can be suppliedl if requested
• The system can be upgraded to include the measurement and display onto a PC, see Pro4
• Perfect tool for for laboratories, universities, research centers... in the material characterization.

Pack 4PP
4 point probe manual-evolutive measurement system_DUPLICATE
4 point probe manual-evolutive measurement system_DUPLICATE
Manual sheet resistivity measurement systems for laboratory, for research and small productions. The stand includes several features to ensure accurate resistivity measurements. A manual lever makes is used to make the Z movement to be in contact with the sample, with a repeatability of the order of one micron. In addition, a control wheel located on the right side allows to precisely refine the Z movement. The sample is mounted on a movable support, which makes it possible to be places under the four point probe head easilily between each measuring point.


• A micro-switch insures that the current will be injected only after contact of the 4 needles
• The measurement itself is provided from an external sourcemeter and voltmeter typically Keithley family (supplied upon version)
• The system is modular including the measurement and display onto a PC


Th softare mananges the tests, displays results and allows printouts or export of the data. The user inputs the size and shape of the sample, edge exclusion and number of points to be tested. The user may also define pass/fail criteria and which parameter (Sheet Resistance, Resistivity, or V/I) to display. A graphic picture of the target probe points is displayed. Prompts tell user to move to the next position. Upon completion of testing all points, the average, standard deviation, minimum and maximum are prominetly displayed. Upon completion, a summary report may be printed showing the data and pass/fail status.

The semi-automatic models will allow testing a complete wafer up to 300 mm with a choice of mapping patterns and calculate the mean and standard deviation of the measured values of resistivity. The loading/unloading is manual, the X-Y-Z travels and measurements control are automatic.
• Several mapping paterns are available, rectangular, polar...
• User's mode allows measuring on selected points
• Automatic range of current
• Powerfull software of control and measurements with management of the stored values...
• SPC, 3D graphs...
280I
Semi-automatic 4 point probe measurement system
Semi-automatic 4 point probe measurement system
Measurement range 1 mohm to 8E11 ohm/square, manual (1pt, 5pts) or semi-automatic with analysis and mapping up to 6000 points upon model.

• Standard measurements range, optional extended range, data storage and retrieval, powerfull search functions in the dataresults base
• Mapping patterns polar or cartesian up to 650 points, diameter scan, custom patterns, wafer edge correction
• Automatic detection of current range and P/N
• This serie of sheet resistivity measurement systems will fullfill all needs in term on electrical sheet resistivity qualification, either in R&D and manual mode or in a production mode


QUADPRO
Semi-automatic 4 point probe measurement system
Semi-automatic 4 point probe measurement system
This system is derivated from the PRO4 system into a semi-automatic version (or manual) and an extended resisitvity range, low and high Res (up to 10G ohm/sq).

• A thermal controller and a software allow the TCR coefficient gestion
• Suited for laboratory research on semiconductor materials


Measure the sheet resistivity by 4-Point-Probe method on large surface thanks to a mobile probe head
• Plusieurs gammes de résistivité selon couches à mesurer
• Different ranges of resistivity according to layers
• Calibrators subtrates available
• Probe tips are seated on spring for a measurement by pressure
Calibration substrates used for verification and fine adjustment of four-point-probe systems, available in wafer of different resistivity values

SRS3
Calibration wafer
Calibration wafer
This NIST wafer is used to calibrate 4PP systems

• NIST certification during 1 year
For technical and commercial information, quote, ordering or request of visit by our representative. +33 (0)476 561 617

5 rue de la Verrerie

38120 Le Fontanil-Cornillon

Grenoble / France

Fax : +33(0) 476 757 484

RCS Grenoble B 381 001 171 - APE 4652Z

TVA FR 48 381 001 171