ELECTRICAL TESTS UNDER NEEDLESHigh Power Probing

MOTICAM1080XDigital camera

This camera is very helpfull for direct vision to put probes easily.

- Compatible with our trinoculars microscopes
- C mount
- Multi-outputs for direct vision on monitor (HDMI) and USB

MOTICAM4000High definition digital camera

High-definition digital camera for inspecting and assisting with the placement of tips on wafers.

This camera uses a C-mount to be mounted on most microscopes on the market.
Its high definition gives it the possibility of placing the tips on very small pads.
It has several outputs to allow a wide variety of uses (HDMI 4K, USB...).
An SD card can be connected to take quick pictures.

MOTICAM1080NDigital camera

This camera is very helpfull for direct vision to put probes easily.

- Compatible with our trinoculars microscopes
- C mount
- Multi-outputs for direct vision on monitor (HDMI) and USB

S1160B-8N8" manual analytical probe station

Probe station under tips for precision analyses, such as IV, CV, on chips alone, on wafers, on components, etc. Modular, the S1160 can accommodate several options and accessories for a multitude of applications (temperature, low current measurements, etc.).

- Rapid elevation of the plate by manual arm (contact / non-contact)
- Accepts binocular and trinocular microscopes
- Wafers up to 8'' (200mm wafers)
- Angular adjustment of the Wafer
- Accommodates up to 8 DC micropositioners or a pin board
- Massive chassis for better stability

COMMON REFERENCES:

S1160A-8N: Optical bridge movement for turret microscope
S1160B-8N: Movement of the optical bridge for trinocular stereozoom microscope
S1160C-8N: Fixed optical bridge for trinocular stereozoom microscope

CM170High stability manual probe station

From two model combination, the CM170 probe stations allows stability and accuraccy for moderate price.

- Large platen for frequency extender head use
- Multiple applications (optical, probecards, HF...)

MOST POPULAR REFERENCES

CM170 : DC to 100 MHz measurements
WL170 : DC to 110 GHz measurements
WL170-THz : mmW up to 1.1 THz (special raised chuck)

CM2108" high accuracy manual probe station

The Checkmate series represents the most accomplished probing stations, available for wafer up to 12".

- Upgradability from one version to another
- Manual or Semi-automatic version
- Test on Probecards available
- Optional thermal charactherization (-60°C to +300°C)
- High voltage (HV) and low current (fA) measurements possible
- Allows up to 8 DC micropositioners or probe card

MOST POPULAR REFERENCES

CM210 : Version 200 mm
CM310 : Version 300 mm

WL210LE8" high accuracy RF manual probe station with local enclosure

This probe station is derivated of the Checkmate series. It includes an additional local chamber that allow temperature measurement (hot/cold) or very low current application

- fA measurements (low leakage)
- Light-tight environnement
- Electrical shielding
- Configuration : 4 HF port or 8 DC/Kelvin port or HF/DC combination
- 300mm version available
- Compatible with high performances ERS chuck (patented air cooling system, temperature from -60°C to +300°C)

CM4656" semi-automatic probe station

Semi-automatic probing stations for full wafer electrical characterization.

- Software : mapping, auto-alignment, pattern recognition, autofocus...
- X-Y stage drives by induction motor for high speed and accuracy
- Probecard application available
- High voltage (HV -10kV) and low leakage (fA) measurements
- Tool developed for design validation (R&D) and yield monitoring (production)

CM2508" semi-automatic probe station

Semi-automatic probe stations for full wafer electrical characterization up to 8" (200 mm).

- Software : mapping, auto-alignment, pattern recognition, autofocus...
- Probecard application available
- Temperature characterization up to +600°C
- High voltage (HV - 10kV) and low leakage (fA) measurements
- Tool developed for design validation (R&D) and yield monitoring (production)
- Configuration : up 10 ports DC/Kelvin
- Compatible with high performances ERS chuck (patented air cooling system, temperature from -60°C to +300°C)

MOST POPULAR REFERENCES

CM250 : Version 200 mm
CM350 : Version 300 mm

WL350-LE12" HF semi-automatic probe station with local enclosure

Semi-automatic probing stations for full wafer HF electrical characterization.

- Software : mapping, auto-alignment, pattern recognition, autofocus...
- Probecard application available
- Thermal characterization from -60°C to +300°C
- HF measurements up to 110 GHz
- Tool developed for design validation (R&D) and yield monitoring (production)
- Configuration : up 4 ports HF (N, S, E, W) and 4 DC
- Optional local enclosure for EMI shielding and light-tight

MOST POPULAR REFERENCES

WL250 : 200 mm version
WL350 : 300 mm version
WL250-LE : 200 mm with local enclosure
WL350-LE : 300 mm with local enclosure

WL250-LE8" HF semi-automatic probe station with local enclosure

CM35012" semi-automatic probe station

Semi-automatic probe stations for full wafer electrical characterization up to 12" (300 mm).

- Software : mapping, auto-alignment, pattern recognition, autofocus...
- Probecard application available
- Temperature characterization up to +600°C
- High voltage (HV - 10kV) and low leakage (fA) measurements
- Tool developed for design validation (R&D) and yield monitoring (production)
- Configuration : up 10 ports DC/Kelvin
- Compatible with high performances ERS chuck (patented air cooling system, temperature from -60°C to +300°C)

MOST POPULAR REFERENCES

CM250 : Version 200 mm
CM350 : Version 300 mm

FixtureBoxDark box for high power application

Compact fixture box solution for High-voltage (HV) and High-current (HC) measurements

- Up to 10kV
- Keithley and Keysight compatibility
- Safety interlock

HVPHigh voltage probe holder

This probe holder series allow high voltage measurements, up to 20KV.

Tip holding by spindle or by screw.
Useful for IV measurements on HV transistors and HV diodes.

PSM1000Turret microscope

Turret microscope for fine inspection and high magnifications.
The PSM1000 is useful for precision contact on very small surfaces.

- It can be used as a stand alone or mounted onto analytical probe station
- A range of accessories is available including a variety of objectives (NIR, NUV, polarizer, analyzer...)
- The trinocular head accepts a choice of digital cameras
- Spectroscopic applications available

AZOOMµSingle-objective microscope

This microscope allows the same magnification than a multi-objectives turret miscoscope in a smaller footprint.
Its trinocular head allows the use of digital camera and/or a laser.

- The illumination is made by LED
- C-mount for camera
- High working distance (WD)

MS12ZMono zoom microscope

This microscope is composed by a single objective and an internal zoom.
It allows a wide range of magnification without turret disadvantage for probing application.

- Light and compact
- Large working distance WD (ideal for high frequencies measurements applications)
- C-mount for camera
- High brightness (LED optical fiber)

MOTICAMS12Digital Camera

Camera adaptable on all trinocular microscopes, useful for probe tips placing.

- Capture and measurement software supplied
- High resolution camera

SP100High precision micropositioner SP100

High-precision micropositioner with inline controls knobs, the SP100 will allow easy landing on pads as well as internal lines within micron accuracy.

- The down Z movement of the tip is totally vertical.
- The knobs with micrometric graduations (100TPI) allow an optimal density on the platen.
- Pivot head (Quick down Z for pre-positioning then fine movement) or Standard head with Z knob.

SP150Ultra-stable submicronic micropositioner SP150

High-precision ultra-stable micropositioner with inline controls knobs, the SP150 will allow easy landing on pads as well as internal lines with a submicron accuracy.

- The down Z movement of the tip is totally vertical.
- The knobs with micrometric graduations (100TPI) allow an optimal density on the platen.
- Standard head (down movement by the Z fine knob) or Pivot head for a quicker Z positioning.
- The SP150 today represents the state-of-the-art in term of accuracy of positioning.

TA-VIS-7575Active antivibration table

The table allows pneumatic filtering of vibrations, the 4 dampers efficiently filter the mechanical noise from the ground or neighbourhood for an ultra fine probe analysis, inspection or assembly.

- Platens available in several dimensions upon size and weight of the equipment
- Individually adjustable air pressure sensors at each corner

MW-DBCustomized dark box

For probing systems that do not have local chamber option, Microworld manufactures Dark Boxes designed to completely enclose a micro probe station or other system.

- Electrical and light isolation
- User safety for high voltage applications
- Feed-thru connectors adapted to the instrumentation to be connected
- Goose-neck for cable access
- Customizable design dimensions

S1080Thermal chuck controller

The trip-temp chuck and controller (ambient-hot-cold) ranges from -60°C to +300°C and allows a complete temperature characterization of devices, whether they are partial wafers or full wafers up to 12".

- The temperature parameters setting is by touch screen panel or remote control
- The transition time from hot to cold or reverse is one of the fastest on the market
- It is possible to program a ramp while heating up

PACEMeasurement and control software

PACE is a software that provide solution to combine measurement tools, automatic characterisation sequences, import and export datas.

PACE is composed of 3 windows :
- Measurement window : configuration and control of measurement tools
- Measurement sequence window : configuration and control of the sequence execution
- Mapping window : mapping configuration and control of the probe station (for semi-auto probe station)

Interface can be customised to match customer needs :
- MEMS test on PCB holder
- Import of GDS file for wafer mapping
- Control of vector network analyser (Rohde & Schwarz), SMU (Keithley, Keysight...)

ERS-AC3Thermal chuck

For 50 years ERS has been developing thermal chucks compatible with all probetest stations.

They have the following properties :
- High temperature: 300° C
- Low temperature: Patented airflow technology allows cooling down to -65° C
- Chuck TRIAX for low current measurement (FemtoAmp)
- Chuck High Voltage
- Non magnetic chuck

HPCHUCKHigh power chuck

The high power chuck has been designed for use when probing at high voltage or high current.

- 150, 200 or 300 mm size available
- For very high voltage measurement (10KV)

MWPHCHigh Current Probe

The Kelvin-capable HCP high current probe is the only probe design on this type in the industry today. The multi-probe design distributes current among the contact points and heat sink remove heat from probe-pad interface to prevent overheating. The unique design gives the user the ability to have Kelvin access to device at the pad level.

- Specs PowerPro 3kV triax / 10kV coax, 450A pulsed / 10A DC
- Tungsten probes, ceramic body for high temperature use
- Mounting on RF positioner
- Complementary to our PowerPro probe systems

ABOUT : High Power Probing

Specifically needed for certain devices within the automotive applications and others, the High-Power-Probing option is available on our probing stations of the model WL350, WL210e, WL370
The Voltage-Current attainable is : From 3kV triax to 10kV coax, 10A DC to 450A pulsed
• Specific anti-arcing solution
• Special High-Current (Kelvin) and High-Voltage probe tips (Triax or Coax)