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HF & Microwave Probing

Microworld presents a range of product for Microwave components Probing and Testing. The range includes Probe stations, RF Probe tips and various accessories.
• The Probe stations are designed to accept all type of wafer/substrate and are evolutive. They include one or two CAL substrate holder.
• Test frequencies >500Ghz
• Probe tips specific for RF testing are coplanar type or waveguide
• Optional "Wedge Cards" allow mixing various needles RF, DC for an easier set-up
WL1160-x
Manual RF probe station
Manual RF probe station
Economical while professional prober for RF and Microwave probing applications, available for single die, partial or full wafer up to 8".

- DC to 110 GHz measurement
- Stable platen and specific anti-resonant chuck construction
- Individual chuck for RF probes with independant rotation
- Quick lift platen and fine Z adjustment
- Allows binocular or trinocular microscope (Tilt-back clearing option)
- Accept up to 4 RF micropositioners and 4 DC micropositioners simultaneously
CM170-WL170
High stability manual probe station
High stability manual probe station
From two model combination, the CM170/WL170 probe stations allows stability and accuraccy for moderate price.

- Large platen for frequency extender head use
- Multiple applications (optical, probecards, HF...)


MOST POPULAR REFERENCES

CM170 : DC to 100 MHz measurements
WL170 : DC to 110 GHz measurements
WL170-THz : mmW up to 1.1 THz (special raised chuck)
WL210-310
High accuracy HF manual probe station
High accuracy HF manual probe station
The WaveLink series represents the most accomplished HF probing stations, available for wafer up to 12".

- No resonnance up to 500 Ghz
- Upgradability from one version to another
- Manual or Semi-automatic version
- Optional thermal charactherization (-60°C to +300°C)
- Allows up to 4 RF micropositioners and 4 DC micropositioners simultaneously


MOST POPULAR REFERENCES

WL210 : Version 200 mm
WL310 : Version 300 mm
WL210E
8'' High accuracy manual probe station with local enclosure
8'' High accuracy manual probe station with local enclosure
This probe station is derivated of the Checkmate series. It includes an additional local chamber that allow temperature measurement (hot/cold) or very low current application

- fA measurements (low leakage)
- Light-tight environnement
- Electrical shielding
- Configuration : 4 HF port or 8 DC/Kelvin port or HF/DC combination
- 300mm version available
- Compatible with high performances ERS chuck (patented air cooling system, temperature from -60°C to +300°C)
WL250-350
HF semi-automatic probe station
HF semi-automatic probe station
Semi-automatic probing stations for full wafer HF electrical characterization.

- Software : mapping, auto-alignment, pattern recognition, autofocus...
- Probecard application available
- Thermal characterization from -60°C to +300°C
- HF measurements up to 110 GHz
- Tool developed for design validation (R&D) and yield monitoring (production)
- Configuration : up 4 ports HF (N, S, E, W) and 4 DC
- Optional local enclosure for EMI shielding and light-tight


MOST POPULAR REFERENCES

WL250 : 200 mm version
WL350 : 300 mm version
WL250-LE : 200 mm with local enclosure
WL350-LE : 300 mm with local enclosure
PSM1000
The High Power Microscope
The High Power Microscope
High power microscope for fine inspection and high magnifications.
The PSM1000 is useful for precision contact on very small surfaces.


- It can be used as a stand alone or mounted onto Analytical probe station
- A range of accessories is available including a variety of objectives (polarizer, analyzer...)
- The trinocular head accepts a choice of digital cameras
- Spectroscopic applications available
SMZ168
Stereozoom microscope
Stereozoom microscope
Stereozoom microscope with trinocular head for probe tip placement.

- High working distance (WD = 113 mm)
- C-mount for digital camera
- Several objectives and eyepieces for wide range of magnification
TAB-XX
Active antivibration table
Active antivibration table
The table allows pneumatic filtering of vibrations, the 4 dampers efficiently filter the mechanical noise from the ground or neighbourhood for an ultra fine probe analysis, inspection or assembly.

- Platens available in several dimensions upon size and weight of the equipment
- Individually adjustable air pressure sensors at each corner
MW-Faraday
Faraday box
Faraday box
For High Frequencies Microwave application, Faraday baox is used to isolate probing system or other system from electrical noise.

- Feedthrough specific connectors
- Size and detail upon request
- Specific frequency filtering

MW-SCA50
Coaxial HF-Low-current probe
Coaxial HF-Low-current probe
The coaxial Probe is designed for low-level signal probing (lower than 10fA@200°C)

• The probe's single unit design is especially desirable for the best possible electrical characteristics
• The Coaxial Probe is also offered with optional Ground Plane, Kelvin and resistor series /parallel configurations
• The Probes are constructed of microwave-quality components with a 50 Ohm semi-rigid cable shield being achieved through the utilization a Teflon dielectric
• The probe contact protrudes from the shielding by .150" (3mm) to maintain low-level signal noise to the probe
• Tips available (replaceable) from 0.5µm to 20 µm
• The connector is a standard SSMC
MWRF-ECP18
RF probe 18 GHz
RF probe 18 GHz
Serie of probes for RF Microwave application up to 18GHz, GSG, GS, SG

• These probes are available in different pitch from 100µm to 2500µm, per 25µm step
• Various mounting styles for positionners
• Non Magnetic option, please ask us
MWRF-ECP40
RF probe 40 GHz
RF probe 40 GHz
Serie of probes for RF Microwave application up to 40GHz, GSG, GS, SG or "dual" configurations (dual = 2 probes on 1 positionner)

• These probes are available in different pitch from 100µm to 2500µm
• Various mounting styles for positionners
• Non Magnetic option, please ask us
MWRF-40A
RF probe 40 GHz
RF probe 40 GHz
Serie of probes for RF Microwave applications up to 40GHz, GSG, GS, SG or "dual" configurations (dual = 2 probes on 1 positionner)

• These probes are available in different pitch from 25µm to 2540µm
• Various mounting styles for positionners
• Female K connector 2,9mm
• Available in BeCu, Nickel or Tungsten
• Non Magnetic option
• High temperature and high current / high voltage versions, please ask us
MWRF-50A
RF probe 50 GHz
RF probe 50 GHz
Serie of probes for RF Microwave applications up to 50GHz, GSG, GS, SG or "dual" configurations (dual = 2 probes on 1 positionner)

• These probes are available in different pitches from 25µm to 1250µm
• Various mounting styles for positionners
• Female connector 2,4mm
• Available in BeCu or Tungsten
• Non Magnetic option
• High temperature and High Power options, please ask us
MWRF-67A
RF probe 67 GHz
RF probe 67 GHz
Serie of probes for RF Microwave applications up to 67GHz, GSG, GS, SG or "dual" configurations (dual = 2 probes on 1 positionner)

• These probes are available in different pitches from 25µm to 1250µm
• Various mounting styles for positionners
• Female V connector 1,85mm
• Available in BeCu or Tungsten
• Non Magnetic option
• High temperature and High Power options, please ask us
MWRF-90(BT)
High performance RF probe from 60 to 90GHz
High performance RF probe from 60 to 90GHz
Serie of high performance probes for Microwave applications from 60 to 90 GHz, GSG, GS or SG configurations

• These probes are available in different pitch from 50µm to 450µm
• We recommend smaller pitches with a G,S,G footprint for best performance
• Low loss and low dispersion characteristics, reliable low resistance contact
• WR-12 waveguide (longer waveguide available), Bias T option available, 56-94 GHz option available
• Available in BeCu
MWRF-110H
RF probe 110 GHz
RF probe 110 GHz
Serie of probes for RF Microwave applications up to 110GHz, GSG, GS, SG or "dual" configurations (dual = 2 probes on 1 positionner)

• These probes are available in different pitch from 25µm to 1250µm
• Various mounting styles for positionners
• Female connector 1mm
• Available in BeCu or Tungsten
• Non magnetic option
MWRF-120(BT)
High performance RF probe from 75 to 120GHz
High performance RF probe from 75 to 120GHz
Serie of high performance probes for Microwave applications from 75 to 110 GHz, GSG, GS or SG configurations

• These probes are available in different pitch from 50µm to 450µm
• We recommend smaller pitches with a G,S,G footprint for best performance
• Low loss and low dispersion characteristics, reliable low resistance contact
• WR-10 waveguide (longer waveguide available), Bias T option available
• Available in BeCu
MWRF-170(BT)
High performance RF probe from 110 to 170GHz
High performance RF probe from 110 to 170GHz
Serie of high performance probes for Microwave application from 110 to 170GHz, GSG, GS, SG or "dual" configuration

• These probes are available in different pitch from 50µm to 450µm
• We recommend smaller pitches with a GSG footprint for best performance
• Low loss and low dispersion characteristics, reliable low resistance contact
• WR-6 waveguide, Bias T option available
• Available in BeCu, Nickel or Tungsten
MWRF-325(BT)
High performance RF probe from 220 to 325GHz
High performance RF probe from 220 to 325GHz
Serie of high performance probes for Microwave application from 220 to 325GHz, GSG, GS or SG configuration

• These probes are available in different pitch from 25µm to 90µm
• We recommend a GSG footprint for best performance
• Low loss and low dispersion characteristics, reliable low resistance contact
• WR-3 waveguide, Bias T option available
• Available in BeCu
MCW
Multicontact wedge
Multicontact wedge
Multi-contact wedge card built as per user's specsheet

• Possible mix DC and RF probes, up to 9 RF probes per side
• Different wiring configuration and connectors available, by-pass capacitors available in 3 different locations
• Low-cost customized product
• Mount on a RF positioner
MW-CS
Calibration substrate for RF probes
Calibration substrate for RF probes
Accurate, easy-to-use calibration substrates, calibration coefficients, to correct the measurement system (network analyzer + cabling + probe) whenever it produces a reading different than the standard.
For technical and commercial information, quote, ordering or request of visit by our representative. +33 (0)476 561 617

5 rue de la Verrerie

38120 Le Fontanil-Cornillon

Grenoble / France

Fax : +33(0) 476 757 484

RCS Grenoble B 381 001 171 - APE 4652Z

TVA FR 48 381 001 171