Manual C-V measurement system by mercury contact

CV92MManual C-V measurement system by mercury contact

The manual model CV92M, is a manual station allowing the characterization of semiconductor layer by mercury contact. The sample is positioned on a chuck above a probe containing the drop of mercury. When the user activates the push button, the probe approaches the sample and a tiny drop of mercury is released to ensure electrical contact. The movements of the chuck are motorized and a control panel allows its position to be read in real time. The probe and the chuck connected in BNC, allow communication with an external source-measurement device (which can be supplied). CV92M is perfectly suited for users looking to make mercury contact measurements in a low cost, safe and easy to use way.

Measurable areas:

- Pure Silicon - Silicon carbide (SiC)
- SOI - Low and high K film
- Very thin oxide layer - Carbon fiber
- USJ layer
- Up to 300mm in diameter

Specifications:

• Measurable capacitance: 0 to 20nF
• Current measurement range: 50fA to 1mA
• Sample size: from 10x10mm to 300x300mm
• Minimum contact area: 2E-5 cm2
• Ultra repeatable
• Different type of measurement (1pt, Radius, Line)

Application :

- Checking the integrity of thin oxides
- Doping density profiling
- Resistivity measurements of semi-insulating materials and carbon fiber
- Pseudo MOST characterization of SOI structures
- Measurement on films with high and low K (USJ layer)
- Studies of ferroelectric samples
- Characterization of new materials such as silicon carbide (SiC)
Semi-automatic mercury C-V system

CVmap3093Semi-automatic mercury C-V system

Semi-automatic CVmap systems can perform C(V) and I(V) plots at various frequencies (up to 10MHz) for wide current ranges, at customizable sites. These systems allow the ultra-repeatable measurement of different physical parameters of many types of samples such as SOI, SiC, low and high K films, extremely thin or thick oxides, doped semiconductors, USJ (carrier density) layers, carbon films.
The software part allows the configuration of several types of measurement and the display of the results in a simple and fast way. We therefore have access to the thicknesses of the insulating film, the dielectric constants, the leakage currents, the low dose ion implant densities, the epitaxial doping densities but also the integrity parameters of the oxides such as their Qbd, TDDB, defect density, breakdown voltage and the distribution of the interface traps.
Through connections to an external probe station, a wafer with patterns of Si, Al or another metal grid can also be tested and mapped all in a completely safe manner.

Specifications:


• Measurable capacitance: 0 to 20nF
• Current measurement range: 50fA to 1mA
• Sample size: from 10x10mm to 300x300mm
• Minimum contact area: 2E-5 cm2

Application :

- Checking the integrity of thin oxides
- Doping density profiling
- Resistivity measurements of semi-insulating materials and carbon fiber
- Pseudo MOST characterization of SOI structures
- Measurement on films with high and low K (USJ layer)
- Studies of ferroelectric samples
- Characterization of new materials such as silicon carbide (SiC)
ABOUT : Mercury contact probing
The Mercury contact is particularly adapted to CV or IV measurements of very fragile layers not standing the needles pressure, or sheet resistivity of USJ (Ultra-Shallow-Junction) layers on highly doped substrates.
The mercury dot allows a metal soft contact contrary to the classical 4 point probe by needles
• Non destructive probing & No pressure probing
• Highly repeatable contact area, very safe design principle
• Refreshed mercury before each contact insures clean contact and Clean andsafe Mercury handling
• For wafers up to 12" (300mm)
• The CVMap serie systems allow measuring & Charactérizing & monitoring a number of parameters on semiconductors materials including process and furnaces (contamination) monitoring.
For technical and commercial information, quote, ordering or request of visit by our representative. +33 (0)476 561 617

5 rue de la Verrerie

38120 Le Fontanil-Cornillon

Grenoble / France

Fax : +33(0) 476 757 484

RCS Grenoble B 381 001 171 - APE 4652Z

TVA FR 48 381 001 171