4-Point Probing

Manual 1 Point or few Points
Automatic with Mapping

Measuring the sheet resistivity of a semiconductive layer using manual mode (positioning / Test Sequence) or automatic
• A range of equipment from basic to automated with mapping softwares
• Variety of Four-Point-Probe heads suiting all materials
• Temperature measurements available

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Manual 1 Point or few Points

The four-point-probe sheet resistivity measurement can be made on one point somewhere on the substrate or up to 5 points by manual moving. The equipment needed is quite simple consist of a probe stand holding the substrate and the probehead.

S302

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4 point probe stand

The configuration is composed of a stand holding the probe head with a quick Z lever and a chuck for wafer of 4, 6, 8 or 12 inches, the sample positioning is manual as well as the contact of the tips by a rotating lever.

- A micro-switch insures that the current will be injected only after contact of the 4-point probe head
- The measurement itself is provided from an external sourcemeter and voltmeter typically Keithley family, which can be supplied if requested
- The system can be upgraded to include the measurement and display onto a PC
- Perfect tool for for laboratories, universities, research centers... in the material characterization.

SRS3

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Calibration wafer

This NIST wafer is used to calibrate 4PP systems

- 3'' wafer
- NIST certification during 1 year

SP4

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4 point probe head

Ambient 4-point probe head for ambient temperature, useable on Pack4PP and Quadpro series equipment or for separate uses. The standard head is molded in delrin with tungsten tips. A bayonet and two screws alllow the head to be fixed to our 4 points probe stand easily for precise and repeatable measurements.

- Tips material is function of the electronic layer under measure
- Variety of spacing, tip materials and radius, needle pressure
- Termination with flying wires or Banana jacks or BNC or triax cables or 9-Pins connector...

CP4

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Cylindrical 4 point probe head

4 point probe head for sheet resistivity measurements, usable on 280 serie and others or on in-house mounting assembly.

- Adjustable pressure on the probe head
- Tip radius of different sizes adapted to most electronics layers
- Termination by 9-pins connector for direct plug in
- Application at ambient temperature only

HT4

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High temperature 4 point probe head

High-Temperature 4-point probe head, useable on Pro4 series and in-house stand.

- Tips material upon type of electronic layer under measure
- Variety of spacing, tip materials and radius, needle pressure
- Connections : Flying wires, Banana Jacks, Triax, 9-Pins connector...
- Optional High-Resistivity shielding

Automatic with Mapping

Mesurer la résistivité de surface sur une plaquette entière ou partielle, tirer une cartographie (mapping) et des paramètres moyenne écart-type...avec des graphes 3D.
Permet de connaitre l'homogénéité de résultats ou la dispersion sur une surface semi-conductrice_UK

280I