Measuring the sheet resistivity of a semiconductive layer using manual mode (positioning / Test Sequence) or automatic
• A range of equipment from basic to automated with mapping softwares
• Variety of Four-Point-Probe heads suiting all materials
• Temperature measurements available
Manual 1 Point or few Points
The four-point-probe sheet resistivity measurement can be made on one point somewhere on the substrate or up to 5 points by manual moving. The equipment needed is quite simple consist of a probe stand holding the substrate and the probehead.
S302
4 point probe stand
4 point probe stand
The configuration is composed of a stand holding the probe head with a quick Z lever and a chuck for wafer of 4, 6, 8 or 12 inches, the sample positioning is manual as well as the contact of the tips by a rotating lever.

- A micro-switch insures that the current will be injected only after contact of the 4-point probe head
- The  measurement itself is provided from an external sourcemeter and voltmeter typically Keithley family, which can be supplied if requested
- The system can be upgraded to include the measurement and display onto a PC
- Perfect tool for for laboratories, universities, research centers... in the material characterization.
SRS3
Calibration wafer
Calibration wafer
This NIST wafer is used to calibrate 4PP systems

- 3'' wafer
- NIST certification during 1 year
SP4
4 point probe head
4 point probe head
Ambient 4-point probe head for ambient temperature, useable on Pack4PP and Quadpro series equipment or for separate uses. The standard head is molded in delrin with tungsten tips. A bayonet and two screws alllow the head to be fixed to our 4 points probe stand easily for precise and repeatable measurements.

- Tips material is function of the electronic layer under measure
- Variety of spacing, tip materials and radius, needle pressure
- Termination with flying wires or Banana jacks or BNC or triax cables or 9-Pins connector...
CP4
Cylindrical 4 point probe head
Cylindrical 4 point probe head
4 point probe head for sheet resistivity measurements, usable on 280 serie and others or on in-house mounting assembly.

- Adjustable pressure on the probe head
- Tip radius of different sizes adapted to most electronics layers
- Termination by 9-pins connector for direct plug in
- Application at ambient temperature only
HT4
High temperature 4 point probe head
High temperature 4 point probe head
High-Temperature 4-point probe head, useable on Pro4 series and in-house stand.

- Tips material upon type of electronic layer under measure
- Variety of spacing, tip materials and radius, needle pressure
- Connections : Flying wires, Banana Jacks, Triax, 9-Pins connector...
- Optional High-Resistivity shielding
Automatic with Mapping
Mesurer la résistivité de surface sur une plaquette entière ou partielle, tirer une cartographie (mapping) et des paramètres moyenne écart-type...avec des graphes 3D.
Permet de connaitre l'homogénéité de résultats ou la dispersion sur une surface semi-conductrice_UK
280I
Semi-automatic 4 point probe measurement system
Semi-automatic 4 point probe measurement system
Measurement range 1 mohm/sq to 8E11 ohm/sq, manual (1pt, 5pts) or semi-automatic with analysis and mapping up to 6000 points upon model.

- Standard measurements range, optional extended range, data storage and retrieval, powerfull search functions in the data results base
- Mapping patterns polar or cartesian up to 650 points, diameter scan, custom patterns, wafer edge correction
- Automatic detection of current range and P/N
- This series of sheet resistivity measurement systems will fullfill all needs in term on electrical sheet resistivity qualification, either in R&D and manual mode or in a production mode


QUADPRO
Semi-automatic 4 point probe measurement system
Semi-automatic 4 point probe measurement system
This system is derivated from the PRO4 system into a semi-automatic version (or manual) and an extended resisitvity range, low and high Res (up to 10G ohm/sq).

• A thermal controller and a software allow the TCR coefficient gestion
• Suited for laboratory research on semiconductor materials


SRS3
Calibration wafer
Calibration wafer
This NIST wafer is used to calibrate 4PP systems

- 3'' wafer
- NIST certification during 1 year
SP4
4 point probe head
4 point probe head
Ambient 4-point probe head for ambient temperature, useable on Pack4PP and Quadpro series equipment or for separate uses. The standard head is molded in delrin with tungsten tips. A bayonet and two screws alllow the head to be fixed to our 4 points probe stand easily for precise and repeatable measurements.

- Tips material is function of the electronic layer under measure
- Variety of spacing, tip materials and radius, needle pressure
- Termination with flying wires or Banana jacks or BNC or triax cables or 9-Pins connector...
CP4
Cylindrical 4 point probe head
Cylindrical 4 point probe head
4 point probe head for sheet resistivity measurements, usable on 280 serie and others or on in-house mounting assembly.

- Adjustable pressure on the probe head
- Tip radius of different sizes adapted to most electronics layers
- Termination by 9-pins connector for direct plug in
- Application at ambient temperature only
HT4
High temperature 4 point probe head
High temperature 4 point probe head
High-Temperature 4-point probe head, useable on Pro4 series and in-house stand.

- Tips material upon type of electronic layer under measure
- Variety of spacing, tip materials and radius, needle pressure
- Connections : Flying wires, Banana Jacks, Triax, 9-Pins connector...
- Optional High-Resistivity shielding
For technical and commercial information, quote, ordering or request of visit by our representative. +33 (0)476 561 617

5 rue de la Verrerie

38120 Le Fontanil-Cornillon

Grenoble / France

Fax : +33(0) 476 757 484

RCS Grenoble B 381 001 171 - APE 4652Z

TVA FR 48 381 001 171