LAYER CHARACTERIZATIONFour point probe systemsManual systems

NEED MORE INFORMATION ?
4 point probe stand

S3024 point probe stand

The configuration is composed of a stand holding the probe head with a quick Z lever and a chuck for wafer of 4" or 6", the sample positioning is manual as well as the contact of the tips by a rotating lever.

Applications:

- Si, Ge, SiGe, SiC, GaAs, InGaAs, InP, GaN, ZnO, TCO
- Oxide deposit
-Sensors, MEMS
- Conductive polymer
- Batteries
- Electrodes
- Photovoltaic
- Ceramic & Glass
- Optoelectronic component
- Nanomaterials

Specifications:

• A micro-switch insures that the current will be injected only after contact of the 4-point probe head
• The  measurement itself is provided from an external sourcemeter and voltmeter typically Keithley family, which can be supplied if requested
• The system can be upgraded to include the measurement and display onto a PC
• Perfect tool for for laboratories, universities, research centers... in the material characterization.
4 point probe stand large area

S3034 point probe stand large area

The configuration is composed of a stand holding the probe head with a quick Z lever and a chuck for wafer of 8" or 12", the sample positioning is manual as well as the contact of the tips by a rotating lever.

Applications:

- Si, Ge, SiGe, SiC, GaAs, InGaAs, InP, GaN, ZnO, TCO
- Oxide deposit
-Sensors, MEMS
- Conductive polymer
- Batteries
- Electrodes
- Photovoltaic
- Ceramic & Glass
- Optoelectronic component
- Nanomaterials

Specifications:

• A micro-switch insures that the current will be injected only after contact of the 4-point probe head
• The  measurement itself is provided from an external sourcemeter and voltmeter typically Keithley family, which can be supplied if requested
• The system can be upgraded to include the measurement and display onto a PC
• Perfect tool for for laboratories, universities, research centers... in the material characterization.
4 point probe manual measurement package medium resistivity range

MW-Pack4PP-M4 point probe manual measurement package medium resistivity range

Manual sheet resistivity measurement systems for laboratories, for research and small productions. The stand includes several features enabling it to measure resistivity and surface resistance using 4 precise points. It is possible to characterize materials manufactured by semiconductor doping, metal or glass deposition, rubber materials, etc.

A manual lever makes it possible to make a movement in Z of contact and non-contact with a repeatability of the order of a micron. In addition, an adjustment wheel located on the top of the device makes it possible to fine-tune the movement in Z with precision.
The sample to be tested is mounted on a mobile support which allows it to be easily placed under the measuring head between each measurement point.
In addition, the equipment has several chuck sizes ranging from 4" to 12".

Applications:

- Si, Ge, SiGe, SiC, GaAs, InGaAs, InP, GaN, ZnO, TCO
- Oxide deposit
-Sensors, MEMS
- Conductive polymer
- Batteries
- Electrodes
- Photovoltaic
- Ceramic & Glass
- Optoelectronic component
- Nanomaterials

Specifications:

• I/V measurement, sheet resistance, resistivity or thickness
• Cartography
• A micro-switch ensures the injection of current from the moment all the tips are in contact.
• The measurement is performed by an external Keithley 2450 device.
• Software for data processing
• Creation of an I/V curve
• Bipolar measurement
• Data export in Txt, Excel, CSV format...

The measurement system uses software for measurement and display of results that allows data export for later data processing. It is possible to map the sample according to the resistivities or thicknesses measured.
The user entered the size and shape of the sample, the exclusion edge and the number of points to be tested. A graphic image of the target measurement points is displayed. At the end of the test of all the points, we find the average of the measured values, the standard deviation as well as the maximum and minimum measurement.

4 point probe manual measurement package high resisitivy range

MW-Pack4PP-H4 point probe manual measurement package high resisitivy range

Manual sheet resistivity measurement systems for laboratories, for research and small productions. The stand includes several features enabling it to measure resistivity and surface resistance using 4 precise points. It is possible to characterize materials manufactured by semiconductor doping, metal or glass deposition, rubber materials, etc.

A manual lever makes it possible to make a movement in Z of contact and non-contact with a repeatability of the order of a micron. In addition, an adjustment wheel located on the top of the device makes it possible to fine-tune the movement in Z with precision.
The sample to be tested is mounted on a mobile support which allows it to be easily placed under the measuring head between each measurement point.
In addition, the equipment has several chuck sizes ranging from 4" to 12".

Applications:

- Si, Ge, SiGe, SiC, GaAs, InGaAs, InP, GaN, ZnO, TCO
- Oxide deposit
-Sensors, MEMS
- Conductive polymer
- Batteries
- Electrodes
- Photovoltaic
- Ceramic & Glass
- Optoelectronic component
- Nanomaterials

Specifications:

• I/V measurement, sheet resistance, resistivity or thickness
• Software for data processing
• Creation of an I/V curve
• Bipolar measurement
• Data export in Txt, Excel, CSV format...
• A micro-switch ensures the injection of current from the moment all the tips are in contact.
• The measurement is performed by an external Keithley 2635B device.


The measurement system uses software for measurement and display of results that allows data export for later data processing. It is possible to map the sample according to the resistivities or thicknesses measured.
The user entered the size and shape of the sample, the exclusion edge and the number of points to be tested. A graphic image of the target measurement points is displayed. At the end of the test of all the points, we find the average of the measured values, the standard deviation as well as the maximum and minimum measurement.
Manual 4 point probe measurement under temperature

QUADPRO2MManual 4 point probe measurement under temperature

4-point manual in-line temperature measurement system on samples ranging from 10mm to 300mm in diameter.. Capable of measuring surface resistance ranges from 10μΩ/sq to 10GΩ/sq. Several versions possibles to optimize measurement accuracy according to the ranges measured.

Equipment feature:

• V/I measurement, sheet resistance, resistivity or thickness
• Mean, Standard Deviation, Minimum, Maximum and 3Sigma reports for the dataset
• Temperature Coefficient of Resistance (TCR) measurements
• Automated 2D mapping, 3D mapping and cross-section
• Ultra high precision and repeatability
• Comparative mapping

The TCR option

The Resistance Temperature Coefficient option integrates sample temperature control as well as automated injected current control and resistance calculations. Integrated with a thermal chuck system, the test automatically sweeps temperatures over a wide range without moving the test tips.
Measurements are taken at each target temperature and the results are plotted on a graph. The TCR is expressed in parts per million (PPM). Users define the temperature range, steps, and delay for each test point before taking a measurement. A variety of thermal chucks are available to set the range and resolution from room temperature to 300°C, with 1° resolution.
Data can be printed or exported to a spreadsheet for further analysis.
ABOUT OUR Manual systems
We use the 4-line method which allows us to measure the Resistance, the resistivity, the sheet resistance or the thickness of your sample. This series of compact devices is suitable for characterization, university or R&D laboratories. We offer either a mechanical stand with its 4-point head allowing contact with the sample or a fully integrated solution including the stand, its measuring head, instrumentation as well as control and analysis software.

Equipment:

• MW-Pack4PP-M: Sample up to 300mm - Sheet resistance range: 10µΩ/sq to 100MΩ/sq
• MW-Pack4PP-H: Sample up to 300mm - Sheet resistance range: 1mΩ/sq to 300MΩ/sq
• S302: Sample up to 150mm - Measurement stand alone
• S303: Sample up to 300mm - Measurement stand alone
• Quadpro2M : Sample up to 200mm - Sheet resistance range: 10µOhm/sq to 10GOhm/sq - TCR option

Specifications:

• Adaptable for wafers up to 300mm
• Temperature option for measuring several materials
• Auto-range function: automatic calculation of the optimal current range
• DC or pulsed measurement
• Data export in CSV, Excel, Txt...
• Data processing software (I(V) curve, mapping, binning etc...)
• Several configurations to suit all applications
• Compatible with Keithley devices (2450, 2601, 2636...)

Sheet resistance range: 10µOhm/sq to 10GOhm/sq
For technical and commercial information, quote, ordering or request of visit by our representative. +33 (0)476 561 617

5 rue de la Verrerie

38120 Le Fontanil-Cornillon

Grenoble / France

Fax : +33(0) 476 757 484

RCS Grenoble B 381 001 171 - APE 4652Z

TVA FR 48 381 001 171