LAYER CHARACTERIZATIONMaterial analysis systemsEllipsometer

Model2010-MPrism coupler

The Metricon Model 2010/M Prism Coupler utilizes advanced optical waveguiding techniques to rapidly and accurately measure both the thickness and the refractive index/birefringence of dielectric and polymer films as well as refractive index of bulk materials. The 2010/M offers unique advantages over conventional refractometers and instruments based on ellipsometry or spectrophotometry:

• Completely General – no advanced knowledge of optical properties of film/substrate required
• Routine index resolution of ±.0005 (accuracy of up to ±.0001 available for many applications)
• Routine index resolution of ±.0003 (resolution of up to ±.00005 available for many applications)
• High accuracy index measurement of bulk, substrate, or liquid materials including birefringence/anisotropy
• Rapid (20-second) characterization of thin film or diffused optical waveguides or SPR sensor structures
• Simple measurement of index vs wavelength
• Options to measure index vs temperature (dn/dT), and waveguide loss
• Wide index measurement range (1.0-3.35)
 The Model 2010/M represents a significant improvement over its predecessor, the Model 2010, offering compatibility with Windows XP/Vista/Seven, a greatly improved and user-friendly Windows based control program, and new measurement features such as the ability to make accurate thickness and index measurements of very thick films as well as an option to measure index vs. temperature (dn/dT). It also eliminates the need for the now–obsolete ISA interface card required by the 2010.

ABOUT OUR Ellipsometer

Ellipsometers is used to measure the index of bulk materials and to simultaneously measure film thickness and refractive index, there are major differences in the underlying measurement techniques and in the accuracy and the application range of the two instruments. As a result, ellipsometry and prism coupling can be viewed as complementary techniques, with the strengths of one supplementing the weaknesses of the other, and vice versa.

In ellipsometers, the intensity and polarization state of monochromatic light reflected from the film or bulk sample yields the measured parameters. Prism coupling measurements are based on techniques developed in the field of integrated optics, treating the thin film to be measured as an optical waveguide. The prism coupling technique works by measuring the angles at which the thin film waveguide will propagate light, and then calculating film thickness and refractive index from the observed mode angles.

For any given application, the film thickness range to be measured is the single most important factor determining whether ellipsometry or prism coupling is the preferred technique. In general, ellipsometry is the clear choice for measuring films whose thickness is thinner than 300-400 nm or for measuring film structures with three or more layers. For measuring bulk materials and single or dual layers of moderate-to-thick films with thickness ranging from a few hundred nm to tens or hundreds of microns, prism coupler measurements are typically more accurate and straightforward.