PROBE TESTINGTest accessories

MW-DBCustomized dark box

For probing systems that do not have local chamber option, Microworld manufactures Dark Boxes designed to completely enclose a micro probe station or other system.

- Electrical and light isolation
- User safety for high voltage applications
- Feed-thru connectors adapted to the instrumentation to be connected
- Goose-neck for cable access
- Customizable design dimensions

MOTICAM1080XDigital camera

This camera is very helpfull for direct vision to put probes easily.

- Compatible with our trinoculars microscopes
- C mount
- Multi-outputs for direct vision on monitor (HDMI) and USB

MOTICAM1080NDigital camera

This camera is very helpfull for direct vision to put probes easily.

- Compatible with our trinoculars microscopes
- C mount
- Multi-outputs for direct vision on monitor (HDMI) and USB

MOTICAM4000High definition digital camera

High-definition digital camera for inspecting and assisting with the placement of tips on wafers.

This camera uses a C-mount to be mounted on most microscopes on the market.
Its high definition gives it the possibility of placing the tips on very small pads.
It has several outputs to allow a wide variety of uses (HDMI 4K, USB...).
An SD card can be connected to take quick pictures.

MOTICAMS12Digital Camera

Camera adaptable on all trinocular microscopes, useful for probe tips placing.

- Capture and measurement software supplied
- High resolution camera

HPCHUCKHigh power chuck

The high power chuck has been designed for use when probing at high voltage or high current.

- 150, 200 or 300 mm size available
- For very high voltage measurement (10KV)

TRXCHUCKTriaxial chuck

The triaxial chuck will allow ultra-low current measurement down to fA when used with specific micropositioners with trixial arm and hermetic box for light and shield isolation.

- It is composed of 3 parts of which the middle part can be polarized,
- A high-temperature version is also available when associated with a hot or tri-temp chuck
- Available for wafers up to 300 mm (12")
- The triaxial chuck typically replaces the standard chuck onto a manual or semi-automatic prober to perform low level current measurement.

CM-BMCBoard mount chuck

This PCB board holder permit to fix electronic board already mounted with components on a probe station.

ProbeSenseTemperature measurement sensor

ProbeSense™ is a patent-pending device for temperature calibration between -65°C to 300°C.

Temperature has always been an important parameter when testing sensor devices, but now the trend is moving from simple, functional tests to calibration at certain temperatures. To meet the requirements of devices like temperature, gas, humidity and pressure sensors, ERS has developed a unique solution that enables highly accurate temperature measurements over the whole chuck.

The device is called ProbeSense™: a unique temperature calibration tool, that consists of only one sensor. It is mounted in the probe card position of the prober and connected to a calibration instrument, where accuracy below 30mK can be reached. A fully automated calibration process is also possible with an integration of the ProbeSense™ in a software.

ProbeSense™ comes delivered in a robust, custom-made suitcase and contains the following components:

• ProbeSense™ with a calibrated sensor down to 10mK
• Adapter plate(s) for your prober of choice
• Temperature measurement device + cable
• Spare battery for the measurement device
• USB stick with ProbeSense™ software

S1080Thermal chuck controller

The trip-temp chuck and controller (ambient-hot-cold) ranges from -60°C to +300°C and allows a complete temperature characterization of devices, whether they are partial wafers or full wafers up to 12".

- The temperature parameters setting is by touch screen panel or remote control
- The transition time from hot to cold or reverse is one of the fastest on the market
- It is possible to program a ramp while heating up

ERS-AC3Thermal chuck

For 50 years ERS has been developing thermal chucks compatible with all probetest stations.

They have the following properties :
- High temperature: 300° C
- Low temperature: Patented airflow technology allows cooling down to -65° C
- Chuck TRIAX for low current measurement (FemtoAmp)
- Chuck High Voltage
- Non magnetic chuck

PACEMeasurement and control software

PACE is a software that provide solution to combine measurement tools, automatic characterisation sequences, import and export datas.

PACE is composed of 3 windows :
- Measurement window : configuration and control of measurement tools
- Measurement sequence window : configuration and control of the sequence execution
- Mapping window : mapping configuration and control of the probe station (for semi-auto probe station)

Interface can be customised to match customer needs :
- MEMS test on PCB holder
- Import of GDS file for wafer mapping
- Control of vector network analyser (Rohde & Schwarz), SMU (Keithley, Keysight...)

S750Joystick micropositioner

This low cost micropositioner was developped for hybrids probing or general probing on 500 µm and larger pads.

- The joystick positioner S750 will accept standard probe holders model Ux.
- A large scan area is coupled with the adjustable Z movement.
- The base is magnetic and the overall dimensions particularly low.
- The spring probe clamp is isolated from the rest of the body while maintaining electrical conductance through a wire termination.
- A model S750-1 with joystick extension is available for more precision of positioning.

S725SMicropositioner S725 with spring head

This micropositioner will allow landing on pads or lines down to 20µm.
Spring head (for fragile surface or temperature), allows limiting the pressure of needles on the pads.

S725PMicropositioner S725 with pivot head

This economic micropositioner will allow landing on pads or lines down to 20 µm.
Pivot head (quick Z down before fine adjust, ideal for probe station).

S725HTMicropositioner S725 for high temperature

This economic micropositioner will allow probe tips to land on pads or lines down to 20 µm.
Special model for temperature probe test measurement, up to 600°C.

S926SPrecision micropositioner S926 with spring head

This precision micropositioner allows placing probe tips on pads or lines within accuracy of the micrometer.
The spring head is perfect for temperature applications or fragile layers.

S926PPrecision micropositioner S926 with pivot head

This precision positioner allows placing probe tip on pads or lines within accuracy of the micrometer.
The pivot head is perfect for a quick positioning in Z and fine adjust.

SP100High precision micropositioner SP100

High-precision micropositioner with inline controls knobs, the SP100 will allow easy landing on pads as well as internal lines within micron accuracy.

- The down Z movement of the tip is totally vertical.
- The knobs with micrometric graduations (100TPI) allow an optimal density on the platen.
- Pivot head (Quick down Z for pre-positioning then fine movement) or Standard head with Z knob.

SP150Ultra-stable submicronic micropositioner SP150

High-precision ultra-stable micropositioner with inline controls knobs, the SP150 will allow easy landing on pads as well as internal lines with a submicron accuracy.

- The down Z movement of the tip is totally vertical.
- The knobs with micrometric graduations (100TPI) allow an optimal density on the platen.
- Standard head (down movement by the Z fine knob) or Pivot head for a quicker Z positioning.
- The SP150 today represents the state-of-the-art in term of accuracy of positioning.

SLAP90-ERF micropositioner for extender

This micropositioner, which is specific to ultra-high frequency RF measurements with a milimetric head, accommodates frequency multipliers.

- East, West configuration
- Screwed base for a better stability
- Angular adjustment to ensure the contact of milimetric heads (GS, GSG configurations)
- Compatible with differents frequency extender models (Rohde & Schwarz, Keysight, VDI ...)

SM40RF & Microwave micropositioner

The SM40 micropositioner is specifically designed for RF probing, it has one inch translation capabilities in all axes and a cross-roller bearings to prevent accidentally moving the tip if bumped.

- Accepts all types of coplanar RF probes.
- Perfectly stable with screw-lock fixation on the platen (optional magnetic base).
- An integral co-planarity adjustment provides for adjusting multicontact planarities (GS, GSG, GSGSG configurations).
- It is available with various head configurations allowing the microwave head to be introduced from the front, rear.

SM90RF & Microwave micropositioner

The SM90 micropositioner is specifically designed for RF probing, it has one inch translation capabilities in all axes and a cross-roller bearings to prevent accidentally moving the tip if bumped.

- Accepts all types of coplanar RF probes.
- Perfectly stable with screw-lock fixation on the platen (optional magnetic base).
- An integral co-planarity adjustment provides for adjusting multicontact planarities (GS, GSG, GSGSG configurations).
- It is available with various head configurations allowing the microwave head to be introduced from the front, rear.

PSM1000Turret microscope

Turret microscope for fine inspection and high magnifications.
The PSM1000 is useful for precision contact on very small surfaces.

- It can be used as a stand alone or mounted onto analytical probe station
- A range of accessories is available including a variety of objectives (NIR, NUV, polarizer, analyzer...)
- The trinocular head accepts a choice of digital cameras
- Spectroscopic applications available

AZOOMµSingle-objective microscope

This microscope allows the same magnification than a multi-objectives turret miscoscope in a smaller footprint.
Its trinocular head allows the use of digital camera and/or a laser.

- The illumination is made by LED
- C-mount for camera
- High working distance (WD)

MS12ZMono zoom microscope

This microscope is composed by a single objective and an internal zoom.
It allows a wide range of magnification without turret disadvantage for probing application.

- Light and compact
- Large working distance WD (ideal for high frequencies measurements applications)
- C-mount for camera
- High brightness (LED optical fiber)

SMZ171Stereozoom microscope

Stereozoom microscope with middle magnification for probe tip placement.

- High working distance (WD = 110mm)
- C-mount for digital camera (trinocular version)
- Several objectives and eyepieces for wide range of magnification
- LED or optical fiber illumination available

HVPHigh voltage probe holder

This probe holder series allow high voltage measurements, up to 20KV.

Tip holding by spindle or by screw.
Useful for IV measurements on HV transistors and HV diodes.

USStandard Probe holder with screw lock

This probe holder allows to mount a probe tip with an angle of 45°.

It is useful for standard IV measurements.
The tip holding is done by screw for very small footprint.

UPStandard Probe holder with spring lock

This probe holder allows to mount a probe tip with an angle of 45°.

It is useful for standard IV measurements.
The tip holding is done by spring for a quick and safe assembly.

UxTBCoaxial Probe holder with teflon isolation

This probe holder allows to mount a probe tip with an angle of 45°.

It is useful for low noise IV measurements with it teflon insulation.

UxGBCoaxial Probe holder with ceramic isolation

This probe holder allows to mount a probe tip with an angle of 45°.

It is useful for low noise IV measurements with it insulation and for high temperature, up to 600°C.

TRXTriax probe holder

Very low-noise probe holder (± 2 fA when used with a triaxial chuck and in an electrically shielded environment).

Can be mount onto S725P, S926P, SP100P, SP150P micropositioners.

TA-VIS-7575Active antivibration table

The table allows pneumatic filtering of vibrations, the 4 dampers efficiently filter the mechanical noise from the ground or neighbourhood for an ultra fine probe analysis, inspection or assembly.

- Platens available in several dimensions upon size and weight of the equipment
- Individually adjustable air pressure sensors at each corner

TA-VIS-9090Active antivibration table

TA-VIS-7590Active antivibration table

ABOUT OUR Test accessories

Microworld offers you a complete range of accessories and sub-assemblies supplied with the probe station, integrated and put into operation during installation.
They can also be retrofitted in most cases.