LAYER CHARACTERIZATIONFour point probe systemsSemi-automatic systems

333A12" semi-automatic 4 point probe measurement system

Semi-automatic 4-point in-line measurement systems on samples ranging from 10mm to 200mm in diameter. Thanks to their motorized chucks, the 333A can map up to 6000 measurement points on surface resistance ranges from 1 mohm/sq to 8E11 Ohm/sq.

Specification:

• Different versions adapted to the different resistance ranges tested
• Several types of mapping: 1pts, 5pts, 9pts, diagonal, Cartesian, custom etc..
• Powerful calculation algorithm
• Edge effect compensation, geometric factor
• SECS II Communication
• Possible version in Full-Automatic with loading of wafers via cassette and pre-alignment

Application:

- Si, Ge, SiGe, SiC, GaAs, InGaAs, InP, GaN, ZnO, TCOs
- Optoelectronic component
- Nanomaterials
- Sensors, MEMS
- Conductive polymer
- Oxide deposit
- Ceramic & Glass
- Batteries
- Electrodes
- Photovoltaic

280I8" semi-automatic 4 point probe measurement system

Semi-automatic 4-point in-line measurement systems on samples ranging from 10mm to 200mm in diameter. Thanks to their motorized chucks, the 280I can map up to 6000 measurement points on surface resistance ranges from 1 mohm/sq to 8E5 Ohm/sq.

Specification:

• Extended range down to 8E11 Ohm/sq.
• Different versions adapted to the different resistance ranges tested
• Several types of mapping: 1pts, 5pts, 9pts, diagonal, Cartesian, custom etc..
• Powerful calculation algorithm
• Edge effect compensation, geometric factor
• SEC II Communication

Application:

- Si, Ge, SiGe, SiC, GaAs, InGaAs, InP, GaN, ZnO, TCOs
- Optoelectronic component
- Nanomaterials
- Sensors, MEMS
- Conductive polymer
- Oxide deposit
- Ceramic & Glass
- Batteries
- Electrodes
- Photovoltaic

QUADPRO2ASemi-automatic 4 point probe measurement under temperature

Semi-automatic 4-point in-line temperature measurement system on samples ranging from 10mm to 300mm in diameter.. Capable of measuring surface resistance ranges from 10μΩ/sq to 10GΩ/sq. Several versions possibles to optimize measurement accuracy according to the ranges measured.

Equipment feature:

• V/I measurement, sheet resistance, resistivity or thickness
• Mean, Standard Deviation, Minimum, Maximum and 3Sigma reports for the dataset
• Temperature Coefficient of Resistance (TCR) measurements
• Automated 2D mapping, 3D mapping and cross-section
• Ultra high precision and repeatability
• Comparative mapping

The TCR option

The Resistance Temperature Coefficient option integrates sample temperature control as well as automated injected current control and resistance calculations. Integrated with a thermal chuck system, the test automatically sweeps temperatures over a wide range without moving the test tips.
Measurements are taken at each target temperature and the results are plotted on a graph. The TCR is expressed in parts per million (PPM). Users define the temperature range, steps, and delay for each test point before taking a measurement. A variety of thermal chucks are available to set the range and resolution from room temperature to 300°C, with 1° resolution.
Data can be printed or exported to a spreadsheet for further analysis.

ABOUT OUR Semi-automatic systems

Thanks to their motorized supports, the semi-automatic systems are perfectly suited to measure the full surface of samples of variable size. The loading is done manually then all the measurement and analysis parameters are configured using integrated software. The mapping is then carried out automatically and the results displayed in the form of a spreadsheet or 2D/3D cartography, thus facilitating the interpretation of the results. Temperature measurement possible up to 300°C with the Quadpro2A

Equipments:

• 280SI: Sample up to 200mm - Sheet resistance range: 1 mΩ/sq to 8E5 Ω/sq
• 280DI: Sample up to 200mm - Sheet resistance range: 1 mΩ/sq to 8E11 Ω/sq
• 333A: Sample up to 300mm - Sheet resistance range: 1 mΩ/sq to 8E11 Ω/sq
• Quadpro2A: Sample up to 300mm - Sheet resistance range: 10 μΩ/sq to 10 GΩ/sq (Up to 300°C°

Specifications:

• Up to 6,000 measurement points per sample
• 2D/3D maps, diagonal measurements, 1 point, 9 points etc..
• Different sample size/geometry compatible
• Automatic calculation of the optimal current range (auto-range)
• Repeatability tests, determination of layer doping type
• Corrector algorithm (edge exclusion, geometric corrector)
• Different user levels with secure access (by password)
• Data export under CSV, Excel, SEC II etc..

Sheet resistance range: 10 μohm/sq to 8E11 ohm/sq