Temperature measurement sensor

ProbeSenseTemperature measurement sensor

ProbeSense™ is a patent-pending device for temperature calibration between -65°C to 300°C.

Temperature has always been an important parameter when testing sensor devices, but now the trend is moving from simple, functional tests to calibration at certain temperatures. To meet the requirements of devices like temperature, gas, humidity and pressure sensors, ERS has developed a unique solution that enables highly accurate temperature measurements over the whole chuck.

The device is called ProbeSense™: a unique temperature calibration tool, that consists of only one sensor. It is mounted in the probe card position of the prober and connected to a calibration instrument, where accuracy below 30mK can be reached. A fully automated calibration process is also possible with an integration of the ProbeSense™ in a software.

ProbeSense™ comes delivered in a robust, custom-made suitcase and contains the following components:

• ProbeSense™ with a calibrated sensor down to 10mK
• Adapter plate(s) for your prober of choice
• Temperature measurement device + cable
• Spare battery for the measurement device
• USB stick with ProbeSense™ software
Thermal chuck controller

S1080Thermal chuck controller

The trip-temp chuck and controller (ambient-hot-cold) ranges from -60°C to +300°C and allows a complete temperature characterization of devices, whether they are partial wafers or full wafers up to 12".

- The temperature parameters setting is by touch screen panel or remote control
- The transition time from hot to cold or reverse is one of the fastest on the market
- It is possible to program a ramp while heating up
Thermal chuck

ERS-AC3Thermal chuck

For 50 years ERS has been developing thermal chucks compatible with all probetest stations.

They have the following properties :
- High temperature: 300° C
- Low temperature: Patented airflow technology allows cooling down to -65° C
- Chuck TRIAX for low current measurement (FemtoAmp)
- Chuck High Voltage
- Non magnetic chuck
ABOUT OUR Thermal chucks
Our range of temperature controllers associated with a specific chuck will allow you to measure under needes all your devices according to your test requirements at high temperatures
• Models heating up only, ambient to 300°C and more
• Tri-temp versions for hot/cold testing
• Ramp option allows varying the temperature for a set of measurements
• External GPIB control, triax low current option..
For technical and commercial information, quote, ordering or request of visit by our representative. +33 (0)476 561 617

5 rue de la Verrerie

38120 Le Fontanil-Cornillon

Grenoble / France

Fax : +33(0) 476 757 484

RCS Grenoble B 381 001 171 - APE 4652Z

TVA FR 48 381 001 171