PROBE TESTINGProbe stations

H150Manual probe station

Easy use probe station for wafers up to 100 mm.

- XY chuck movement
- Quick platen lift
- Up to 6 micropositioners or a probecard
- Fixed microscope holder

S1160General purpose probe station

The S1160 will support a broad range of precision probing applications including IV, CV, dies, wafers...
Modular, it can accept many options and accessories for multi-purpose (temperature, low current...) applications

- Quick platen lift allows contact / no contact
- Accept microscope (bino / trino)
- Accept wafers up to 8'' (wafers 200mm)
- Angular wafer setup
- Allows up to 8 DC micropositioner or probe card
- Heavy body for better stability

MOST POPULAR REFERENCES

S1160A-8N : Moving of optical bridge for turret microscope
S1160B-8N : Moving of optical bridge for trinocular stereozoom microscope
S1160C-8N : Fixed optical bridge for trinocular stereozoom microscope

WL1160Manual RF probe station

Economical while professional prober for RF and Microwave probing applications, available for single die, partial or full wafer up to 8".

- DC to 110 GHz measurement
- Stable platen and specific anti-resonant chuck construction
- Individual chuck for RF probes with independant rotation
- Quick lift platen and fine Z adjustment
- Allows binocular or trinocular microscope (Tilt-back clearing option)
- Accept up to 4 RF micropositioners and 4 DC micropositioners simultaneously

MOST POPULAR REFERENCES

WL1160A : Moving of optical bridge for turret microscope
WL1160B : Moving of optical bridge for trinocular stereozoom microscope
WL1160C : Fixed optical bridge for trinocular stereozoom microscope

CM170-WL170High stability manual probe station

From two model combination, the CM170/WL170 probe stations allows stability and accuraccy for moderate price.

- Large platen for frequency extender head use
- Multiple applications (optical, probecards, HF...)

MOST POPULAR REFERENCES

CM170 : DC to 100 MHz measurements
WL170 : DC to 110 GHz measurements
WL170-THz : mmW up to 1.1 THz (special raised chuck)

CM210-310High accuracy manual probe station

The Checkmate series represents the most accomplished probing stations, available for wafer up to 12".

- Upgradability from one version to another
- Manual or Semi-automatic version
- Test on Probecards available
- Optional thermal charactherization (-60°C to +300°C)
- High voltage (HV) and low current (fA) measurements possible
- Allows up to 8 DC micropositioners or probe card

MOST POPULAR REFERENCES

CM210 : Version 200 mm
CM310 : Version 300 mm

WL210-310High accuracy HF manual probe station

The WaveLink series represents the most accomplished HF probing stations, available for wafer up to 12".

- No resonnance up to 500 Ghz
- Upgradability from one version to another
- Manual or Semi-automatic version
- Optional thermal charactherization (-60°C to +300°C)
- Allows up to 4 RF micropositioners and 4 DC micropositioners simultaneously

MOST POPULAR REFERENCES

WL210 : Version 200 mm
WL310 : Version 300 mm

WL210E8'' High accuracy manual probe station with local enclosure

This probe station is derivated of the Checkmate series. It includes an additional local chamber that allow temperature measurement (hot/cold) or very low current application

- fA measurements (low leakage)
- Light-tight environnement
- Electrical shielding
- Configuration : 4 HF port or 8 DC/Kelvin port or HF/DC combination
- 300mm version available
- Compatible with high performances ERS chuck (patented air cooling system, temperature from -60°C to +300°C)

PowerPackDark box for high power application

Compact solution for High-voltage (HV) and High-current (HC) measurements

- Up to 10kV
- Keithley and Keysight compatibility
- Safety interlock

D3Dark box with chuck

This small probe station has been designed for high themperature application, it includes a chuck (ambient or hot chuck) and a circular platen that allow several magnetic micropositioner.

- A microscope can be used to contact small pads
- An economical solution for a variety of probing applications

CM4656'' semi-automatic probe station

Semi-automatic probing stations for full wafer electrical characterization.

- Software : mapping, auto-alignment, pattern recognition, autofocus...
- X-Y stage drives by induction motor for high speed and accuracy
- Probecard application available
- High voltage (HV -10kV) and low leakage (fA) measurements
- Tool developed for design validation (R&D) and yield monitoring (production)

CM250-350Semi-automatic probe station

Semi-automatic probe stations for full wafer electrical characterization up to 12'' (300 mm).

- Software : mapping, auto-alignment, pattern recognition, autofocus...
- Probecard application available
- Temperature characterization up to +600°C
- High voltage (HV - 10kV) and low leakage (fA) measurements
- Tool developed for design validation (R&D) and yield monitoring (production)
- Configuration : up 10 ports DC/Kelvin
- Compatible with high performances ERS chuck (patented air cooling system, temperature from -60°C to +300°C)

MOST POPULAR REFERENCES

CM250 : Version 200 mm
CM350 : Version 300 mm

WL250-350HF semi-automatic probe station

Semi-automatic probing stations for full wafer HF electrical characterization.

- Software : mapping, auto-alignment, pattern recognition, autofocus...
- Probecard application available
- Thermal characterization from -60°C to +300°C
- HF measurements up to 110 GHz
- Tool developed for design validation (R&D) and yield monitoring (production)
- Configuration : up 4 ports HF (N, S, E, W) and 4 DC
- Optional local enclosure for EMI shielding and light-tight

MOST POPULAR REFERENCES

WL250 : 200 mm version
WL350 : 300 mm version
WL250-LE : 200 mm with local enclosure
WL350-LE : 300 mm with local enclosure

HCP-600-G-PM-28Mini probe stage with gas flow

Station for temperature measurement under controlled atmosphere

- Measurements on unit samples, size 28 x 28 mm
- Manual positioning 4 mobile spring-mounted tips
- Temperature range: -190°C to 600°C
- Injection of neutral gas (Argon, Nitrogen)

HCP-600-G-PM-38Mini probe stage with gas flow

Station for temperature measurement under controlled atmosphere

- Measurements on unit samples, size 38 x 38 mm
- Manual positioning 4 mobile spring-mounted tips
- Temperature range: -190°C to 600°C
- Injection of neutral gas (Argon, Nitrogen)

HP-1000-V-PS-50Probe stage under vacuum

Station for temperature measurement under vacuum

- Individual sample measurement
- Manual positionning
- Temperature range : -190°C to 600°C

HCP-400-V-PM-28Mini probe stage under vacuum

Station for vacuum temperature measurements.

- Measurements on unit samples
- Manual positioning 4 mobile spring-mounted tips.
- Temperature range: -196°C to 400°C

ABOUT OUR Probe stations

Our test equipment will allow you to meet all standard and technical specifications. Whether the application, device characterization, de-bug, failure analysis or industrial process development and R&D. Manual and semi-automatic probe stations are both versatile and precise to meet the requirements of microelectronics.