PROBE TESTINGProbe stations

H1504" manual probe station

Easy use probe station for wafers up to 100 mm.

- XY chuck movement
- Quick platen lift
- Up to 6 micropositioners or a probecard
- Fixed microscope holder

S1160B-8N8" manual analytical probe station

Probe station under tips for precision analyses, such as IV, CV, on chips alone, on wafers, on components, etc. Modular, the S1160 can accommodate several options and accessories for a multitude of applications (temperature, low current measurements, etc.).

- Rapid elevation of the plate by manual arm (contact / non-contact)
- Accepts binocular and trinocular microscopes
- Wafers up to 8'' (200mm wafers)
- Angular adjustment of the Wafer
- Accommodates up to 8 DC micropositioners or a pin board
- Massive chassis for better stability

COMMON REFERENCES:

S1160A-8N: Optical bridge movement for turret microscope
S1160B-8N: Movement of the optical bridge for trinocular stereozoom microscope
S1160C-8N: Fixed optical bridge for trinocular stereozoom microscope

WL1160B-8N8" RF manual analytical probe station

Economical while professional prober for RF and Microwave probing applications, available for single die, partial or full wafer up to 8".

- DC to 110 GHz measurement
- Stable platen and specific anti-resonant chuck construction
- Individual chuck for RF probes with independant rotation
- Quick lift platen and fine Z adjustment
- Allows binocular or trinocular microscope (Tilt-back clearing option)
- Accept up to 4 RF micropositioners and 4 DC micropositioners simultaneously

MOST POPULAR REFERENCES

WL1160A : Moving of optical bridge for turret microscope
WL1160B : Moving of optical bridge for trinocular stereozoom microscope
WL1160C : Fixed optical bridge for trinocular stereozoom microscope

CM170High stability manual probe station

From two model combination, the CM170 probe stations allows stability and accuraccy for moderate price.

- Large platen for frequency extender head use
- Multiple applications (optical, probecards, HF...)

MOST POPULAR REFERENCES

CM170 : DC to 100 MHz measurements
WL170 : DC to 110 GHz measurements
WL170-THz : mmW up to 1.1 THz (special raised chuck)

WL170-THzHigh stability Millimetric manual probe station

Station specially designed for ultra high frequency applications, with the use of millimetric heads (extenders).
This system allows you to mount a micropositioner with a large plate that can support extenders from the main manufacturers (R&S, VDI, etc.).

- Up to 1.1 THz
- Raised chuck
- Rotation lock
- Long working distance microscope

CM2108" high accuracy manual probe station

The Checkmate series represents the most accomplished probing stations, available for wafer up to 12".

- Upgradability from one version to another
- Manual or Semi-automatic version
- Test on Probecards available
- Optional thermal charactherization (-60°C to 300°C)
- High voltage (HV) and low current (fA) measurements possible
- Allows up to 8 DC micropositioners or probe card

MOST POPULAR REFERENCES

CM210 : Version 200 mm
CM310 : Version 300 mm

WL2108" high accuracy RF manual probe station

The WaveLink series represents the most accomplished HF probing stations, available for wafer up to 12".

- No resonnance up to 500 Ghz
- Upgradability from one version to another
- Manual or Semi-automatic version
- Optional thermal charactherization (-60°C to 300°C)
- Allows up to 4 RF micropositioners and 4 DC micropositioners simultaneously

MOST POPULAR REFERENCES

WL210 : Version 200 mm
WL310 : Version 300 mm

WL210LE8" high accuracy RF manual probe station with local enclosure

This probe station is derivated of the Checkmate series. It includes an additional local chamber that allow temperature measurement (hot/cold) or very low current application

- fA measurements (low leakage)
- Light-tight environnement
- Electrical shielding
- Configuration : 4 HF port or 8 DC/Kelvin port or HF/DC combination
- 300mm version available
- Compatible with high performances ERS chuck (patented air cooling system, temperature from -60°C to 300°C)

FixtureBoxDark box for high power application

Compact fixture box solution for High-voltage (HV) and High-current (HC) measurements

- Up to 10kV
- Keithley and Keysight compatibility
- Safety interlock

D3Dark box with platen

This small probe station has been designed for high themperature application, it includes a chuck (ambient or hot chuck) and a circular platen that allow several magnetic micropositioner.

- A microscope can be used to contact small pads
- An economical solution for a variety of probing applications

CM4656" semi-automatic probe station

Semi-automatic probing stations for full wafer electrical characterization.

- Software : mapping, auto-alignment, pattern recognition, autofocus...
- X-Y stage drives by induction motor for high speed and accuracy
- Probecard application available
- High voltage (HV -10kV) and low leakage (fA) measurements
- Tool developed for design validation (R&D) and yield monitoring (production)

CM2508" semi-automatic probe station

Semi-automatic probe stations for full wafer electrical characterization up to 8" (200 mm).

- Software : mapping, auto-alignment, pattern recognition, autofocus...
- Probecard application available
- Temperature characterization up to 600°C
- High voltage (HV - 10kV) and low leakage (fA) measurements
- Tool developed for design validation (R&D) and yield monitoring (production)
- Configuration : up 10 ports DC/Kelvin
- Compatible with high performances ERS chuck (patented air cooling system, temperature from -60°C to 300°C)

MOST POPULAR REFERENCES

CM250 : Version 200 mm
CM350 : Version 300 mm

WL250-LE8" HF semi-automatic probe station with local enclosure

Semi-automatic probing stations for full wafer HF electrical characterization.

- Software : mapping, auto-alignment, pattern recognition, autofocus...
- Probecard application available
- Thermal characterization from -60°C to 300°C
- HF measurements up to 110 GHz
- Tool developed for design validation (R&D) and yield monitoring (production)
- Configuration : up 4 ports HF (N, S, E, W) and 4 DC
- Optional local enclosure for EMI shielding and light-tight

MOST POPULAR REFERENCES

WL250 : 200 mm version
WL350 : 300 mm version
WL250-LE : 200 mm with local enclosure
WL350-LE : 300 mm with local enclosure

WL350-LE12" HF semi-automatic probe station with local enclosure

WL2508" HF semi-automatic probe station

CM35012" semi-automatic probe station

Semi-automatic probe stations for full wafer electrical characterization up to 12" (300 mm).

- Software : mapping, auto-alignment, pattern recognition, autofocus...
- Probecard application available
- Temperature characterization up to 600°C
- High voltage (HV - 10kV) and low leakage (fA) measurements
- Tool developed for design validation (R&D) and yield monitoring (production)
- Configuration : up 10 ports DC/Kelvin
- Compatible with high performances ERS chuck (patented air cooling system, temperature from -60°C to 300°C)

MOST POPULAR REFERENCES

CM250 : Version 200 mm
CM350 : Version 300 mm

HCP-600-G-PMMini probe stage with gas flow

Mini test station for temperature and controlled atmosphere measurements.
This completely hermetic ultra-compact station offers you a wide range of possibilities. Rhenium tungsten tips manually manipulated and can be placed on studs >= 100µm.

Applications:

- Electrical test: resistor, transistor, capacitor
- Electrodes, diodes
- Photovoltaic
- Nanomaterials
- Sensors, MEMS, OLED, infrared...
- Silicon wafer
- Microchip

Specifications:

• Measurements on unit samples, size 28x30 mm
• Manual positioning 4 mobile spring-mounted prongs.
• Temperature range: -190°C to 600°C
• Injection of neutral gas (Argon, Nitrogen)

HP-1000-V-PS-50Probe station under vacuum

Compact probing station for high temperature measurements under vacuum.
This completely hermetic station allows you to go up to 1000°C while putting your sample under vacuum.
Tungsten Rhenium tips, very resistant to high temperature and reliable. These tips can be manipulated manually thanks to micropositioners, which facilitates their precise placement on pads whose size is greater than or equal to 10 µm.

Applications:

- Electrical test: resistor, transistor, capacitor
- Electrodes, diodes
- Photovoltaic
- Nanomaterials
- Sensors, MEMS, OLED, infrared...
- Silicon wafer
- Microchip

Specifications:

• Measurements on unit samples, 50x 50mm
• Manual positioning with 4 micropositioners (Up to 7 micropositioners)
• Temperature range: Ambient to 1000°C
• Vaccum chamber

HCP-400-V-PMMini probe stage under vacuum

Mini test station for temperature and vacuum measurements.
This completely hermetic ultra-compact station offers you a wide range of possibilities. Rhenium tungsten tips manually manipulated and can be placed on studs >= 100µm.

Applications:

- Electrical test: resistor, transistor, capacitor
- Electrodes, diodes
- Photovoltaic
- Nanomaterials
- Sensors, MEMS, OLED, infrared...
- Silicon wafer
- Microchip

Specifications:

• Measurements on unit samples, size 28x30 mm
• Manual positioning 4 mobile spring-mounted prongs.
• Temperature range: -190°C to 400°C
• Vacuum capability up to 1 mTorr

HCP-400-V-PMHNo-magnetic mini probe stage under vacuum

Mini test station for temperature measurements, under vacuum and non-magnetic.
This completely hermetic ultra-compact station offers you a wide range of possibilities. Rhenium tungsten tips manually manipulated and can be placed on studs >= 100µm. This non-magnetic station will allow you to perform measurements with Helmholtz coils.

Applications:

- Electrical test: resistor, transistor, capacitor
- Electrodes, diodes
- Photovoltaic
- Nanomaterials
- Sensors, MEMS, OLED, infrared...
- Silicon wafer
- Microchip
-Test under magnetic fields

Specifications:

• Station for performing vacuum measurements inside a Helmholtz coil system
• Dimensions of the station 180 mm x 130 mm x 26.5 mm
• Measurements on unit samples, size 38x42 mm
• Manual positioning 4 mobile spring-mounted prongs
• Temperature range: -190°C to 400°C
• Vacuum-tight chamber

HCP-400-V-MPSMini probe stage under vacuum

Mini test station designed specifically to perform temperature and vacuum measurements.
This station is fully sealed, allowing it to provide a controlled and stable measurement environment. Thanks to this station, you benefit from a wide range of possibilities for your experiments.
The tips used in this station are made of tungsten rhenium, which makes them very resistant and reliable. These tips can be manipulated using micropositioners, which facilitates their precise placement on pads whose size is greater than or equal to 10 µm.

Applications:

- Electrical test: resistor, transistor, capacitor
- Electrodes, diodes
- Photovoltaic
- Nanomaterials
- Sensors, MEMS, OLED, infrared...
- Silicon wafer
- Microchip

Specifications:

• Measurements on unit samples, size 28x30 mm
• Manual positioning with 4 micropositioners (Up to 7 micropositioners)
• Temperature range: -190°C to 400°C
• Vacuum capability up to 1 mTorr

ABOUT OUR Probe stations

Our test equipment will allow you to meet all simple and demanding technical specifications. Whatever the application, chip characterization, debugging, failure analysis or industrial process development and R&D. Manual and semi-automatic sub-point stations are both versatile and precise. From standard measurement to microwave or high temperature measurement to meet the requirements of microelectronics.

Applications:

- Electrical test: resistor, transistor, capacitor
- RF test: Antenna, networker ...
- Circuit board (Failure analysis)
- Nanomaterials
- Electrodes, diodes
- Photovoltaic
- Sensors, MEMS, OLED, infrared...
- Silicon wafer

Specifications:

• IV and CV measurements
• HV measurements (10KV)
• Low current measurements fA
• Microwave measurements (1 THz millimetric)
• Thermal chucks (hot/cold: -190°C to 1000°C)
• Microscopy
• Light and vibration isolation
• Test tips and probes
• Dedicated micropositioners for each application

For technical and commercial information, quote, ordering or request of visit by our representative.
+33 (0)476 561 617

5 rue de la Verrerie

38120 Le Fontanil-Cornillon

Grenoble / France

Fax : +33(0) 476 757 484

RCS Grenoble B 381 001 171 - APE 4652Z

TVA FR 48 381 001 171