PROBE TESTINGProbe stationsManual probe stations

H1504" manual probe station

Easy use probe station for wafers up to 100 mm.

- XY chuck movement
- Quick platen lift
- Up to 6 micropositioners or a probecard
- Fixed microscope holder

S1160B-8N8" manual analytical probe station

Probe station under tips for precision analyses, such as IV, CV, on chips alone, on wafers, on components, etc. Modular, the S1160 can accommodate several options and accessories for a multitude of applications (temperature, low current measurements, etc.).

- Rapid elevation of the plate by manual arm (contact / non-contact)
- Accepts binocular and trinocular microscopes
- Wafers up to 8'' (200mm wafers)
- Angular adjustment of the Wafer
- Accommodates up to 8 DC micropositioners or a pin board
- Massive chassis for better stability

COMMON REFERENCES:

S1160A-8N: Optical bridge movement for turret microscope
S1160B-8N: Movement of the optical bridge for trinocular stereozoom microscope
S1160C-8N: Fixed optical bridge for trinocular stereozoom microscope

WL1160B-8N8" RF manual analytical probe station

Economical while professional prober for RF and Microwave probing applications, available for single die, partial or full wafer up to 8".

- DC to 110 GHz measurement
- Stable platen and specific anti-resonant chuck construction
- Individual chuck for RF probes with independant rotation
- Quick lift platen and fine Z adjustment
- Allows binocular or trinocular microscope (Tilt-back clearing option)
- Accept up to 4 RF micropositioners and 4 DC micropositioners simultaneously

MOST POPULAR REFERENCES

WL1160A : Moving of optical bridge for turret microscope
WL1160B : Moving of optical bridge for trinocular stereozoom microscope
WL1160C : Fixed optical bridge for trinocular stereozoom microscope

CM170High stability manual probe station

From two model combination, the CM170 probe stations allows stability and accuraccy for moderate price.

- Large platen for frequency extender head use
- Multiple applications (optical, probecards, HF...)

MOST POPULAR REFERENCES

CM170 : DC to 100 MHz measurements
WL170 : DC to 110 GHz measurements
WL170-THz : mmW up to 1.1 THz (special raised chuck)

WL170-THzHigh stability Millimetric manual probe station

Station specially designed for ultra high frequency applications, with the use of millimetric heads (extenders).
This system allows you to mount a micropositioner with a large plate that can support extenders from the main manufacturers (R&S, VDI, etc.).

- Up to 1.1 THz
- Raised chuck
- Rotation lock
- Long working distance microscope

CM2108" high accuracy manual probe station

The Checkmate series represents the most accomplished probing stations, available for wafer up to 12".

- Upgradability from one version to another
- Manual or Semi-automatic version
- Test on Probecards available
- Optional thermal charactherization (-60°C to +300°C)
- High voltage (HV) and low current (fA) measurements possible
- Allows up to 8 DC micropositioners or probe card

MOST POPULAR REFERENCES

CM210 : Version 200 mm
CM310 : Version 300 mm

WL2108" high accuracy RF manual probe station

The WaveLink series represents the most accomplished HF probing stations, available for wafer up to 12".

- No resonnance up to 500 Ghz
- Upgradability from one version to another
- Manual or Semi-automatic version
- Optional thermal charactherization (-60°C to +300°C)
- Allows up to 4 RF micropositioners and 4 DC micropositioners simultaneously

MOST POPULAR REFERENCES

WL210 : Version 200 mm
WL310 : Version 300 mm

WL210LE8" high accuracy RF manual probe station with local enclosure

This probe station is derivated of the Checkmate series. It includes an additional local chamber that allow temperature measurement (hot/cold) or very low current application

- fA measurements (low leakage)
- Light-tight environnement
- Electrical shielding
- Configuration : 4 HF port or 8 DC/Kelvin port or HF/DC combination
- 300mm version available
- Compatible with high performances ERS chuck (patented air cooling system, temperature from -60°C to +300°C)

FixtureBoxDark box for high power application

Compact fixture box solution for High-voltage (HV) and High-current (HC) measurements

- Up to 10kV
- Keithley and Keysight compatibility
- Safety interlock

D3Dark box with chuck

This small probe station has been designed for high themperature application, it includes a chuck (ambient or hot chuck) and a circular platen that allow several magnetic micropositioner.

- A microscope can be used to contact small pads
- An economical solution for a variety of probing applications

ABOUT OUR Manual probe stations

The manual probers can test all types of single die or several dies on an entire or partial wafer up to 300 mm
• Manual motion of the vacuum chuck and of the microscope
• Basic low-cost model, or economical multi-applications or submicronic high precision
• Specific configurations for demanding tests : low current, high power...
• Configurable and upgradable with choice of options : Thermal chuck, triaxial connections, isolating box (dark box)...
• Standard frequency DC or high frequency (RF)

Economical probe stations for single chip or wafer up to 200 mm, for geometry of pads or lines of few microns
• Standard manual DC versions or high frequency microwave model
• The microscope post accepts bino type (basic) or high power type (turret multi-objectives on SS160 only)
• Up to 10 positioners (upon model) with magnetic or vacuum base
• Optional thermal chuck for temperature applications
• Range of accessories and options

A range of submicronic probe stations of high precision and accuracy for tests on small pads or very small internal nodes. Accepts from individual die to partial wafer or entire wafer up to 12"
• Solid base providing a low level of noise once seated on a vibration table
• Several configurations of chuck, standard, triax, thermally controlled...
• Can accept high-end positioners for an optimum accuracy
• Custom configurations upon specsheet