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You have the right to access, modify, amend and delete information about yourself (art. 34 of the "Freedom and Information" act). In order to exercise this right you can contact: Microworld – 5 Rue de la Verrerie, 38120 Fontanil-Cornillon - Tel: 04 76 56 16 17

Temperature measurement sensor

ProbeSense™ is a patent-pending device for temperature calibration between -65°C to 300°C.

Temperature has always been an important parameter when testing sensor devices, but now the trend is moving from simple, functional tests to calibration at certain temperatures. To meet the requirements of devices like temperature, gas, humidity and pressure sensors, ERS has developed a unique solution that enables highly accurate temperature measurements over the whole chuck.

The device is called ProbeSense™: a unique temperature calibration tool, that consists of only one sensor. It is mounted in the probe card position of the prober and connected to a calibration instrument, where accuracy below 30mK can be reached. A fully automated calibration process is also possible with an integration of the ProbeSense™ in a software.

ProbeSense™ comes delivered in a robust, custom-made suitcase and contains the following components:

• ProbeSense™ with a calibrated sensor down to 10mK
• Adapter plate(s) for your prober of choice
• Temperature measurement device + cable
• Spare battery for the measurement device
• USB stick with ProbeSense™ software

For technical and commercial information, quote, ordering or request of visit by our representative. +33 (0)476 561 617

5 rue de la Verrerie

38120 Le Fontanil-Cornillon

Grenoble / France

Fax : +33(0) 476 757 484

RCS Grenoble B 381 001 171 - APE 4652Z

TVA FR 48 381 001 171