Contact us


PRODUCT : TRXCHUCK - Triaxial chuck

* Mandatory fields

You have the right to access, modify, amend and delete information about yourself (art. 34 of the "Freedom and Information" act). In order to exercise this right you can contact: Microworld – 5 Rue de la Verrerie, 38120 Fontanil-Cornillon - Tel: 04 76 56 16 17


Triaxial chuck

The triaxial chuck will allow ultra-low current measurement down to fA when used with specific micropositioners with trixial arm and hermetic box for light and shield isolation.

- It is composed of 3 parts of which the middle part can be polarized,
- A high-temperature version is also available when associated with a hot or tri-temp chuck
- Available for wafers up to 300 mm (12")
- The triaxial chuck typically replaces the standard chuck onto a manual or semi-automatic prober to perform low level current measurement.

For technical and commercial information, quote, ordering or request of visit by our representative.
+33 (0)476 561 617

5 rue de la Verrerie

38120 Le Fontanil-Cornillon

Grenoble / France

Fax : +33(0) 476 757 484

RCS Grenoble B 381 001 171 - APE 4652Z

TVA FR 48 381 001 171