ABOUT OUR Four point probe systems
Range of equipments for measuring the sheet resistance of thin films using the 4-point-probe method in-line (to be distinguished from the Van Der Pauw method). Using a measuring probe head with 4 metal tips distributed in a rectilinear and equidistant manner, a current is injected at the two outer contacts and a voltage is measured at the two inner tips. By Ohm's law, the sheet resistance of the measured thin layer is thus determined. These systems exist in portable, manual or automatic versions. The software makes it possible to control the source measurement device (Keithley or Keysight type), to make plots or maps and to export the data for further analysis. Some versions are also available for temperature measurement.
Applications:
- Si, Ge, SiGe, SiC, GaAs, InGaAs, InP, GaN, ZnO, TCOs, ITOs
- Optoelectronics components
- Nanomaterials
- Sensors, MEMS
- Conductives polymers
- Oxide deposits
- Ceramics & Glass
- Batteries
- Electrodes
- Photovoltaic
Specifications:
• Sheet resistance range: 10 µΩ/sq to 8E11 Ω/sq
• Sample size: from chip to 12" (300mm) wafer
• Number of measurement points: up to 6,000 points
