ABOUT OUR Semi-automatic systems
Thanks to their motorized supports, the semi-automatic systems are perfectly suited to measure the full surface of samples of variable size. The loading is done manually then all the measurement and analysis parameters are configured using integrated software. The mapping is then carried out automatically and the results displayed in the form of a spreadsheet or 2D/3D cartography, thus facilitating the interpretation of the results. Temperature measurement possible up to 300°C with the Quadpro2A
Equipments:
• 280SI: Sample up to 200mm - Sheet resistance range: 1 mΩ/sq to 8E5 Ω/sq
• 280DI: Sample up to 200mm - Sheet resistance range: 1 mΩ/sq to 8E11 Ω/sq
• 333A: Sample up to 300mm - Sheet resistance range: 1 mΩ/sq to 8E11 Ω/sq
• Quadpro2A: Sample up to 300mm - Sheet resistance range: 10 μΩ/sq to 10 GΩ/sq (Up to 300°C°
Specifications:
• Up to 6,000 measurement points per sample
• 2D/3D maps, diagonal measurements, 1 point, 9 points etc..
• Different sample size/geometry compatible
• Automatic calculation of the optimal current range (auto-range)
• Repeatability tests, determination of layer doping type
• Corrector algorithm (edge exclusion, geometric corrector)
• Different user levels with secure access (by password)
• Data export under CSV, Excel, SEC II etc..
Sheet resistance range: 10 μohm/sq to 8E11 ohm/sq
