PROBE TESTINGTest accessoriesThermal chucks

ERS-AC3 Thermal chuck

Part Number

ERS-AC3

Designation

Thermal chuck

APPLICATIONS

IV / CV Measurements & Failure analysis

Description

For 50 years ERS has been developing thermal chucks compatible with all probetest stations.

They have the following properties :
- High temperature: 300° C
- Low temperature: Patented airflow technology allows cooling down to -65° C
- Chuck TRIAX for low current measurement (FemtoAmp)
- Chuck High Voltage
- Non magnetic chuck

Technical Specifications

Wafer size

200 or 300 mm

Temperature range

-65°C to +300°C

Accuracy

+/+ 0.05 °C

Accuracy

+/- 0.03 °C

Option

High voltage, triax

Associated products

CM2508" semi-automatic probe station

Semi-automatic probe stations for full wafer electrical characterization up to 8" (200 mm).

- Software : mapping, auto-alignment, pattern recognition, autofocus...
- Probecard application available
- Temperature characterization up to +600°C
- High voltage (HV - 10kV) and low leakage (fA) measurements
- Tool developed for design validation (R&D) and yield monitoring (production)
- Configuration : up 10 ports DC/Kelvin
- Compatible with high performances ERS chuck (patented air cooling system, temperature from -60°C to +300°C)

MOST POPULAR REFERENCES

CM250 : Version 200 mm
CM350 : Version 300 mm

WL250-LE8" HF semi-automatic probe station with local enclosure

Semi-automatic probing stations for full wafer HF electrical characterization.

- Software : mapping, auto-alignment, pattern recognition, autofocus...
- Probecard application available
- Thermal characterization from -60°C to +300°C
- HF measurements up to 110 GHz
- Tool developed for design validation (R&D) and yield monitoring (production)
- Configuration : up 4 ports HF (N, S, E, W) and 4 DC
- Optional local enclosure for EMI shielding and light-tight

MOST POPULAR REFERENCES

WL250 : 200 mm version
WL350 : 300 mm version
WL250-LE : 200 mm with local enclosure
WL350-LE : 300 mm with local enclosure