LAYER CHARACTERIZATIONFour point probe systemsFour point probe heads

SP4 4 point probe head

Part Number

SP4

Designation

4 point probe head

APPLICATIONS

Automatic with Mapping

Description

4-point head for ambient temperature, usable on equipment of the Pack4PP, Quadpro series and or for separate use. The standard head is designed in delrin with 4 independent tips in tungsten or osmium. A bayonet and two screws make it easy to attach the tip to our 4-prong stand for precise and repeatable measurements.

Specifications:

• Material of the tips defined according to application & type of layer
• Choice of parameters: Tip spacing (pitch), tip fineness, tip pressure
• Terminations: Flying leads, banana plugs, BNC, triaxial cables, 9-pin connector...

DOCUMENTS

SP4-HT4 brochure (pdf)

Technical Specifications

Material

Delrin

Tip radius

40, 125, 254 µm

Spacing

1, 1.27, 1.6 mm

Pressure

45, 85, 180 g

Material

Tungsten or Osmium

Connections

Upon reference

Maximum current

1 A

Maximum voltage

20 V

Maximum temperature

50 °C

Associated products

MW-Pack4PP-M4 point probe manual measurement package medium resistivity range

Manual sheet resistivity measurement systems for laboratories, for research and small productions. The stand includes several features enabling it to measure resistivity and surface resistance using 4 precise points. It is possible to characterize materials manufactured by semiconductor doping, metal or glass deposition, rubber materials, etc.

A manual lever makes it possible to make a movement in Z of contact and non-contact with a repeatability of the order of a micron. In addition, an adjustment wheel located on the top of the device makes it possible to fine-tune the movement in Z with precision.
The sample to be tested is mounted on a mobile support which allows it to be easily placed under the measuring head between each measurement point.
In addition, the equipment has several chuck sizes ranging from 4" to 12".

Applications:

- Si, Ge, SiGe, SiC, GaAs, InGaAs, InP, GaN, ZnO, TCO
- Oxide deposit
-Sensors, MEMS
- Conductive polymer
- Batteries
- Electrodes
- Photovoltaic
- Ceramic & Glass
- Optoelectronic component
- Nanomaterials

Specifications:

• I/V measurement, sheet resistance, resistivity or thickness
• Cartography
• A micro-switch ensures the injection of current from the moment all the tips are in contact.
• The measurement is performed by an external Keithley 2450 device.
• Software for data processing
• Creation of an I/V curve
• Bipolar measurement
• Data export in Txt, Excel, CSV format...

The measurement system uses software for measurement and display of results that allows data export for later data processing. It is possible to map the sample according to the resistivities or thicknesses measured.
The user entered the size and shape of the sample, the exclusion edge and the number of points to be tested. A graphic image of the target measurement points is displayed. At the end of the test of all the points, we find the average of the measured values, the standard deviation as well as the maximum and minimum measurement.

S3024 point probe stand

The configuration is composed of a stand holding the probe head with a quick Z lever and a chuck for wafer of 4" or 6", the sample positioning is manual as well as the contact of the tips by a rotating lever.

Applications:

- Si, Ge, SiGe, SiC, GaAs, InGaAs, InP, GaN, ZnO, TCO
- Oxide deposit
-Sensors, MEMS
- Conductive polymer
- Batteries
- Electrodes
- Photovoltaic
- Ceramic & Glass
- Optoelectronic component
- Nanomaterials

Specifications:

• A micro-switch insures that the current will be injected only after contact of the 4-point probe head
• The measurement itself is provided from an external sourcemeter and voltmeter typically Keithley family, which can be supplied if requested
• The system can be upgraded to include the measurement and display onto a PC
• Perfect tool for for laboratories, universities, research centers... in the material characterization.

QUADPRO2ASemi-automatic 4 point probe measurement under temperature

Semi-automatic 4-point in-line temperature measurement system on samples ranging from 10mm to 300mm in diameter.. Capable of measuring surface resistance ranges from 10μΩ/sq to 10GΩ/sq. Several versions possibles to optimize measurement accuracy according to the ranges measured.

Equipment feature:

• V/I measurement, sheet resistance, resistivity or thickness
• Mean, Standard Deviation, Minimum, Maximum and 3Sigma reports for the dataset
• Temperature Coefficient of Resistance (TCR) measurements
• Automated 2D mapping, 3D mapping and cross-section
• Ultra high precision and repeatability
• Comparative mapping

The TCR option

The Resistance Temperature Coefficient option integrates sample temperature control as well as automated injected current control and resistance calculations. Integrated with a thermal chuck system, the test automatically sweeps temperatures over a wide range without moving the test tips.
Measurements are taken at each target temperature and the results are plotted on a graph. The TCR is expressed in parts per million (PPM). Users define the temperature range, steps, and delay for each test point before taking a measurement. A variety of thermal chucks are available to set the range and resolution from room temperature to 300°C, with 1° resolution.
Data can be printed or exported to a spreadsheet for further analysis.

MW-Pack4PP-H4 point probe manual measurement package high resisitivy range

Manual sheet resistivity measurement systems for laboratories, for research and small productions. The stand includes several features enabling it to measure resistivity and surface resistance using 4 precise points. It is possible to characterize materials manufactured by semiconductor doping, metal or glass deposition, rubber materials, etc.

A manual lever makes it possible to make a movement in Z of contact and non-contact with a repeatability of the order of a micron. In addition, an adjustment wheel located on the top of the device makes it possible to fine-tune the movement in Z with precision.
The sample to be tested is mounted on a mobile support which allows it to be easily placed under the measuring head between each measurement point.
In addition, the equipment has several chuck sizes ranging from 4" to 12".

Applications:

- Si, Ge, SiGe, SiC, GaAs, InGaAs, InP, GaN, ZnO, TCO
- Oxide deposit
-Sensors, MEMS
- Conductive polymer
- Batteries
- Electrodes
- Photovoltaic
- Ceramic & Glass
- Optoelectronic component
- Nanomaterials

Specifications:

• I/V measurement, sheet resistance, resistivity or thickness
• Software for data processing
• Creation of an I/V curve
• Bipolar measurement
• Data export in Txt, Excel, CSV format...
• A micro-switch ensures the injection of current from the moment all the tips are in contact.
• The measurement is performed by an external Keithley 2635B device.

The measurement system uses software for measurement and display of results that allows data export for later data processing. It is possible to map the sample according to the resistivities or thicknesses measured.
The user entered the size and shape of the sample, the exclusion edge and the number of points to be tested. A graphic image of the target measurement points is displayed. At the end of the test of all the points, we find the average of the measured values, the standard deviation as well as the maximum and minimum measurement.