LAYER CHARACTERIZATIONFour point probe systemsManual systems

S302 4 point probe stand

Part Number

S302

Designation

4 point probe stand

APPLICATIONS

Manual 1 Point or few Points

Description

The configuration is composed of a stand holding the probe head with a quick Z lever and a chuck for wafer of 4" or 6", the sample positioning is manual as well as the contact of the tips by a rotating lever.

Applications:

- Si, Ge, SiGe, SiC, GaAs, InGaAs, InP, GaN, ZnO, TCO
- Oxide deposit
-Sensors, MEMS
- Conductive polymer
- Batteries
- Electrodes
- Photovoltaic
- Ceramic & Glass
- Optoelectronic component
- Nanomaterials

Specifications:

• A micro-switch insures that the current will be injected only after contact of the 4-point probe head
• The measurement itself is provided from an external sourcemeter and voltmeter typically Keithley family, which can be supplied if requested
• The system can be upgraded to include the measurement and display onto a PC
• Perfect tool for for laboratories, universities, research centers... in the material characterization.

Technical Specifications

Wafer size

4, 6 or 8 "

Chuck material

Delrin

Movement

Manual

X/Y drive system

Free

Sample holding

Contact/no-contact

4 mm

Z coarse

40 mm

Compatibility

SP4

Head connection

Sub-D9

Connection

4 banana jack

Software

Optional

SMU

Optional

Dimensions

360 x 200 x 230 mm

Weight

6 Kg

Associated products

SP44 point probe head

4-point head for ambient temperature, usable on equipment of the Pack4PP, Quadpro series and or for separate use. The standard head is designed in delrin with 4 independent tips in tungsten or osmium. A bayonet and two screws make it easy to attach the tip to our 4-prong stand for precise and repeatable measurements.

Specifications:

• Material of the tips defined according to application & type of layer
• Choice of parameters: Tip spacing (pitch), tip fineness, tip pressure
• Terminations: Flying leads, banana plugs, BNC, triaxial cables, 9-pin connector...

MW-Pack4PP-M4 point probe manual measurement package medium resistivity range

Manual sheet resistivity measurement systems for laboratories, for research and small productions. The stand includes several features enabling it to measure resistivity and surface resistance using 4 precise points. It is possible to characterize materials manufactured by semiconductor doping, metal or glass deposition, rubber materials, etc.

A manual lever makes it possible to make a movement in Z of contact and non-contact with a repeatability of the order of a micron. In addition, an adjustment wheel located on the top of the device makes it possible to fine-tune the movement in Z with precision.
The sample to be tested is mounted on a mobile support which allows it to be easily placed under the measuring head between each measurement point.
In addition, the equipment has several chuck sizes ranging from 4" to 12".

Applications:

- Si, Ge, SiGe, SiC, GaAs, InGaAs, InP, GaN, ZnO, TCO
- Oxide deposit
-Sensors, MEMS
- Conductive polymer
- Batteries
- Electrodes
- Photovoltaic
- Ceramic & Glass
- Optoelectronic component
- Nanomaterials

Specifications:

• I/V measurement, sheet resistance, resistivity or thickness
• Cartography
• A micro-switch ensures the injection of current from the moment all the tips are in contact.
• The measurement is performed by an external Keithley 2450 device.
• Software for data processing
• Creation of an I/V curve
• Bipolar measurement
• Data export in Txt, Excel, CSV format...

The measurement system uses software for measurement and display of results that allows data export for later data processing. It is possible to map the sample according to the resistivities or thicknesses measured.
The user entered the size and shape of the sample, the exclusion edge and the number of points to be tested. A graphic image of the target measurement points is displayed. At the end of the test of all the points, we find the average of the measured values, the standard deviation as well as the maximum and minimum measurement.

HT4High temperature 4 point probe head

4-point head for high temperature and high resistivity, usable on equipment of the Pack4PP, Quadpro series and or for separate use. The standard head is designed in macor with 4 independent tips in tungsten or osmium. A bayonet and two screws make it easy to attach the tip to our 4-prong stand for precise and repeatable measurements.

Specifications:

• Material of the tips defined according to the type of layer to be measured
• Choice of parameters: Tip spacing (pitch), tip fineness, tip pressure
• Terminations: Flying leads, Banana jacks, Triax...

MW-Pack4PP-H4 point probe manual measurement package high resisitivy range

Manual sheet resistivity measurement systems for laboratories, for research and small productions. The stand includes several features enabling it to measure resistivity and surface resistance using 4 precise points. It is possible to characterize materials manufactured by semiconductor doping, metal or glass deposition, rubber materials, etc.

A manual lever makes it possible to make a movement in Z of contact and non-contact with a repeatability of the order of a micron. In addition, an adjustment wheel located on the top of the device makes it possible to fine-tune the movement in Z with precision.
The sample to be tested is mounted on a mobile support which allows it to be easily placed under the measuring head between each measurement point.
In addition, the equipment has several chuck sizes ranging from 4" to 12".

Applications:

- Si, Ge, SiGe, SiC, GaAs, InGaAs, InP, GaN, ZnO, TCO
- Oxide deposit
-Sensors, MEMS
- Conductive polymer
- Batteries
- Electrodes
- Photovoltaic
- Ceramic & Glass
- Optoelectronic component
- Nanomaterials

Specifications:

• I/V measurement, sheet resistance, resistivity or thickness
• Software for data processing
• Creation of an I/V curve
• Bipolar measurement
• Data export in Txt, Excel, CSV format...
• A micro-switch ensures the injection of current from the moment all the tips are in contact.
• The measurement is performed by an external Keithley 2635B device.

The measurement system uses software for measurement and display of results that allows data export for later data processing. It is possible to map the sample according to the resistivities or thicknesses measured.
The user entered the size and shape of the sample, the exclusion edge and the number of points to be tested. A graphic image of the target measurement points is displayed. At the end of the test of all the points, we find the average of the measured values, the standard deviation as well as the maximum and minimum measurement.