LAYER CHARACTERIZATIONFour point probe systemsSemi-automatic systems

280I 8" semi-automatic 4 point probe measurement system

Part Number

280I

Designation

8" semi-automatic 4 point probe measurement system

APPLICATIONS

Automatic with Mapping

Description

Semi-automatic 4-point in-line measurement systems on samples ranging from 10mm to 200mm in diameter. Thanks to their motorized chucks, the 280I can map up to 6000 measurement points on surface resistance ranges from 1 mohm/sq to 8E5 Ohm/sq.

Specification:

• Extended range down to 8E11 Ohm/sq.
• Different versions adapted to the different resistance ranges tested
• Several types of mapping: 1pts, 5pts, 9pts, diagonal, Cartesian, custom etc..
• Powerful calculation algorithm
• Edge effect compensation, geometric factor
• SEC II Communication

Application:

- Si, Ge, SiGe, SiC, GaAs, InGaAs, InP, GaN, ZnO, TCOs
- Optoelectronic component
- Nanomaterials
- Sensors, MEMS
- Conductive polymer
- Oxide deposit
- Ceramic & Glass
- Batteries
- Electrodes
- Photovoltaic

DOCUMENTS

280i brochure (pdf)

Technical Specifications

Wafer size

50, 75, 100, 125, 150 and 200 "

Sheet resistance range

1 mΩ/sq à 800KΩ/sq (or 8E11Ω/sq)

Sample holding

Vacuum

Movement

Semi-automatic (Y, Z and Theta)

Compatibility

CP4 probe head

SMU

Internal

Measurement repeatability

< 0.2 %

Measurement accuracy

< 0.1 %

Software

Yes (Windows)

License

Multi-users

Industrial mode

Yes

Recipes

Creation, edition and launching

Quick measurements

1, 5, 9 sites, 5, 6, 9, 10, 13 sites ASTM/SEMI X-Patterns or custom

Cartesian maps

Up to 5 000

Polar maps

9, 25, 45, 49, 65, 81, 121, 169, 225, 289, 361, 441, 529, 625

Parameters calculation

Res (Ω.cm), R (Ω/sq), V/I, T (cm), T(A)

Mapping

2D, 3D and table

Data export

Excel, CSV and ASCII (SECS II optional)

Computer

Included (Windows11)

Communication

RS232

Vacuum pump

Not included

Vacuum

25 in Hg - 1/4" OD

Electrical requirements

230VAC - 50Hz - Mono - 1A

Associated products

CWCalibration wafer

Wafer to calibrate 4 point probe system

Specifications:

• Silicium wafer
• 4" (100 mm)

CP4Cylindrical 4 point probe head

4-point head for measuring resistivity, resistance, surface resistance or thickness. For use on 280 series equipment or separately, standard tip spacing is 1mm. The pressure is adjustable directly on the head.

Specifications:

• Adjustable pressure on the probe head
• Tip radius of different sizes adapted to most electronics layers
• Termination by 9-pins connector for direct plug in
• Application at ambient temperature only