CWCalibration wafer
Specifications:
• Silicium wafer
• 4" (100 mm)
Part Number
280I
Designation
8" semi-automatic 4 point probe measurement system
APPLICATIONS
Semi-automatic 4-point in-line measurement systems on samples ranging from 10mm to 200mm in diameter. Thanks to their motorized chucks, the 280I can map up to 6000 measurement points on surface resistance ranges from 1 mohm/sq to 8E5 Ohm/sq.
Specification:
• Extended range down to 8E11 Ohm/sq.
• Different versions adapted to the different resistance ranges tested
• Several types of mapping: 1pts, 5pts, 9pts, diagonal, Cartesian, custom etc..
• Powerful calculation algorithm
• Edge effect compensation, geometric factor
• SEC II Communication
Application:
- Si, Ge, SiGe, SiC, GaAs, InGaAs, InP, GaN, ZnO, TCOs
- Optoelectronic component
- Nanomaterials
- Sensors, MEMS
- Conductive polymer
- Oxide deposit
- Ceramic & Glass
- Batteries
- Electrodes
- Photovoltaic
MOST POPULAR REFERENCES
Wafer size
50, 75, 100, 125, 150 and 200 "
Sheet resistance range
1 mΩ/sq à 800KΩ/sq (or 8E11Ω/sq)
Sample holding
Vacuum
Movement
Semi-automatic (Y, Z and Theta)
Compatibility
CP4 probe head
SMU
Internal
Measurement repeatability
< 0.2 %
Measurement accuracy
< 0.1 %
Software
Yes (Windows)
License
Multi-users
Industrial mode
Yes
Recipes
Creation, edition and launching
Quick measurements
1, 5, 9 sites, 5, 6, 9, 10, 13 sites ASTM/SEMI X-Patterns or custom
Cartesian maps
Up to 5 000
Polar maps
9, 25, 45, 49, 65, 81, 121, 169, 225, 289, 361, 441, 529, 625
Parameters calculation
Res (Ω.cm), R (Ω/sq), V/I, T (cm), T(A)
Mapping
2D, 3D and table
Data export
Excel, CSV and ASCII (SECS II optional)
Computer
Included (Windows11)
Communication
RS232
Vacuum pump
Not included
Vacuum
25 in Hg - 1/4" OD
Electrical requirements
230VAC - 50Hz - Mono - 1A