H150      4" manual probe station

H150 : 4
H150 : 4
H150 : 4
H150 : 4
H150 : 4
H150 : 4
H150 : 4
H150 : 4

Part Number



4" manual probe station


Easy use probe station for wafers up to 100 mm.

- XY chuck movement
- Quick platen lift
- Up to 6 micropositioners or a probecard
- Fixed microscope holder


Technical Specifications

Sample holding

Vacuum ring, zone selection

Stage Drive


Chuck travel X-Y

100 mm

Chuck material


Chuck stage Z travel


Chuck planarity adjustment



< 10 µm

Theta range

360 Degree

Rotation lock


Contact/no contact platen lever

Repetability +/- 1 µm

Platen material

Steel for vacuum or magnetic micropositioner

XY scope stage travel


Associated products

Micropositioner S725 with pivot head

S725PMicropositioner S725 with pivot head

This economic micropositioner will allow landing on pads or lines down to 20 µm.
Pivot head (quick Z down before fine adjust, ideal for probe station).
Tungsten probe tip

PTG20Tungsten probe tip

General purpose probe tip sharpened at one extremity, the body material (tungsten) is strong enough to be bent into a variety of shapes.

- The standard application is probing on pads and/or internal lines
- Material tungsten, length 38 mm, tip radius from 0.5µm to 100µm
- Nickel-plated option is available for body only (easy soldering), please add the suffix ''N'' to the P/N
Standard Probe holder with spring lock

UPStandard Probe holder with spring lock

This probe holder allows to mount a probe tip with an angle of 45°.

It is useful for standard IV measurements.
The tip holding is done by spring for a quick and safe assembly.
Micropositioner S725 with spring head

S725SMicropositioner S725 with spring head

This micropositioner will allow landing on pads or lines down to 20µm.
Spring head (for fragile surface or temperature), allows limiting the pressure of needles on the pads.
Stereozoom microscope

SMZ171Stereozoom microscope

Stereozoom microscope with middle magnification for probe tip placement.

- High working distance (WD = 110mm)
- C-mount for digital camera (trinocular version)
- Several objectives and eyepieces for wide range of magnification
- LED or optical fiber illumination available
For technical and commercial information, quote, ordering or request of visit by our representative. +33 (0)476 561 617

5 rue de la Verrerie

38120 Le Fontanil-Cornillon

Grenoble / France

Fax : +33(0) 476 757 484

RCS Grenoble B 381 001 171 - APE 4652Z

TVA FR 48 381 001 171