PROBE TESTINGProbe stationsManual probe stations

H150 4" manual probe station

Part Number

H150

Designation

4" manual probe station

APPLICATIONS

IV / CV Measurements & Failure analysis

Description

Easy use probe station for wafers up to 100 mm.

- XY chuck movement
- Quick platen lift
- Up to 6 micropositioners or a probecard
- Fixed microscope holder

DOCUMENTS

H150 brochure (pdf)

Technical Specifications

Sample holding

Vacuum ring, zone selection

Stage Drive

Manual

Chuck travel X-Y

100 mm

Chuck material

Nickel

Chuck stage Z travel

Chuck planarity adjustment

Yes

Planarity

< 10 µm

Theta range

360 Degree

Rotation lock

Contact/no contact platen lever

Repetability +/- 1 µm

Platen material

Steel for vacuum or magnetic micropositioner

XY scope stage travel

Optional

Associated products

S725PMicropositioner S725 with pivot head

This economic micropositioner will allow landing on pads or lines down to 20 µm.
Pivot head (quick Z down before fine adjust, ideal for probe station).

PTG20Tungsten probe tip

General purpose probe tip sharpened at one extremity, the body material (tungsten) is strong enough to be bent into a variety of shapes.

- The standard application is probing on pads and/or internal lines
- Material tungsten, length 38 mm, tip radius from 0.5µm to 100µm
- Nickel-plated option is available for body only (easy soldering), please add the suffix ''N'' to the P/N

UPStandard Probe holder with spring lock

This probe holder allows to mount a probe tip with an angle of 45°.

It is useful for standard IV measurements.
The tip holding is done by spring for a quick and safe assembly.

S725SMicropositioner S725 with spring head

This micropositioner will allow landing on pads or lines down to 20µm.
Spring head (for fragile surface or temperature), allows limiting the pressure of needles on the pads.

SMZ171Stereozoom microscope

Stereozoom microscope with middle magnification for probe tip placement.

- High working distance (WD = 110mm)
- C-mount for digital camera (trinocular version)
- Several objectives and eyepieces for wide range of magnification
- LED or optical fiber illumination available