LAYER CHARACTERIZATIONFour point probe systemsManual systems

QUADPRO2M Manual 4 point probe measurement under temperature

Part Number

QUADPRO2M

Designation

Manual 4 point probe measurement under temperature

APPLICATIONS

Manual 1 Point or few Points

Description

4-point manual in-line temperature measurement system on samples ranging from 10mm to 300mm in diameter.. Capable of measuring surface resistance ranges from 10μΩ/sq to 10GΩ/sq. Several versions possibles to optimize measurement accuracy according to the ranges measured.

Equipment feature:

• V/I measurement, sheet resistance, resistivity or thickness
• Mean, Standard Deviation, Minimum, Maximum and 3Sigma reports for the dataset
• Temperature Coefficient of Resistance (TCR) measurements
• Automated 2D mapping, 3D mapping and cross-section
• Ultra high precision and repeatability
• Comparative mapping

The TCR option

The Resistance Temperature Coefficient option integrates sample temperature control as well as automated injected current control and resistance calculations. Integrated with a thermal chuck system, the test automatically sweeps temperatures over a wide range without moving the test tips.
Measurements are taken at each target temperature and the results are plotted on a graph. The TCR is expressed in parts per million (PPM). Users define the temperature range, steps, and delay for each test point before taking a measurement. A variety of thermal chucks are available to set the range and resolution from room temperature to 300°C, with 1° resolution.
Data can be printed or exported to a spreadsheet for further analysis.

DOCUMENTS

Quadpro2M brochure (pdf)

Technical Specifications

Wafer size

Up to 300 "

Sheet resistance range

10 µohm/sq to 10Gohm/sq

Movement

Manual

X/Y drive system

Linear pinion

Head connection

Sub-D9

Stand connection

4 banana jack

Software

Measurement management, calculation, analysis, mapping, temperature control

License

Multi-users

Associated products

SP44 point probe head

4-point head for ambient temperature, usable on equipment of the Pack4PP, Quadpro series and or for separate use. The standard head is designed in delrin with 4 independent tips in tungsten or osmium. A bayonet and two screws make it easy to attach the tip to our 4-prong stand for precise and repeatable measurements.

Specifications:

• Material of the tips defined according to application & type of layer
• Choice of parameters: Tip spacing (pitch), tip fineness, tip pressure
• Terminations: Flying leads, banana plugs, BNC, triaxial cables, 9-pin connector...

S3024 point probe stand

The configuration is composed of a stand holding the probe head with a quick Z lever and a chuck for wafer of 4" or 6", the sample positioning is manual as well as the contact of the tips by a rotating lever.

Applications:

- Si, Ge, SiGe, SiC, GaAs, InGaAs, InP, GaN, ZnO, TCO
- Oxide deposit
-Sensors, MEMS
- Conductive polymer
- Batteries
- Electrodes
- Photovoltaic
- Ceramic & Glass
- Optoelectronic component
- Nanomaterials

Specifications:

• A micro-switch insures that the current will be injected only after contact of the 4-point probe head
• The measurement itself is provided from an external sourcemeter and voltmeter typically Keithley family, which can be supplied if requested
• The system can be upgraded to include the measurement and display onto a PC
• Perfect tool for for laboratories, universities, research centers... in the material characterization.

HT4High temperature 4 point probe head

4-point head for high temperature and high resistivity, usable on equipment of the Pack4PP, Quadpro series and or for separate use. The standard head is designed in macor with 4 independent tips in tungsten or osmium. A bayonet and two screws make it easy to attach the tip to our 4-prong stand for precise and repeatable measurements.

Specifications:

• Material of the tips defined according to the type of layer to be measured
• Choice of parameters: Tip spacing (pitch), tip fineness, tip pressure
• Terminations: Flying leads, Banana jacks, Triax...