PROBE TESTINGProbe stationsSemi-automatic probe stations

WL250-LE      8" HF semi-automatic probe station with local enclosure

WL250-LE : 8
WL250-LE : 8
WL250-LE : 8
WL250-LE : 8
WL250-LE : 8
WL250-LE : 8
WL250-LE : 8
WL250-LE : 8
WL250-LE : 8
WL250-LE : 8

Part Number

WL250-LE

Designation

8" HF semi-automatic probe station with local enclosure

APPLICATIONS

HF & Microwave Probing
Low-Leakage-Current Testing
IV / CV Measurements & Failure analysis
Probing with a probecard & Mapping
High Power Probing
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Description

Semi-automatic probing stations for full wafer HF electrical characterization.

- Software : mapping, auto-alignment, pattern recognition, autofocus...
- Probecard application available
- Thermal characterization from -60°C to +300°C
- HF measurements up to 110 GHz
- Tool developed for design validation (R&D) and yield monitoring (production)
- Configuration : up 4 ports HF (N, S, E, W) and 4 DC
- Optional local enclosure for EMI shielding and light-tight

MOST POPULAR REFERENCES

WL250 : 200 mm version
WL350 : 300 mm version
WL250-LE : 200 mm with local enclosure
WL350-LE : 300 mm with local enclosure

DOCUMENTS

mwdoc_titre  WL250-LE brochure (pdf)

Technical Specifications

Sample size

200 mm

Sample holding

Vacuum hole, zone selection

Stage Drive

Semi-automatic

Chuck travel X-Y

200 mm

Chuck material

Nickel

Resolution

0.5 µm

Accuracy

5 µm

Chuck stage Z travel

12.5 µm

Z chuck repeatability

1 µm

Chuck planarity adjustment

Yes

Planarity

< 10 µm

Theta range

+/- 7.5 °

Theta resolution

0.000035 °

Theta repeatability

< 1.5 µm

Z range platen

38mm with lock

Contact/no contact platen lever

4 mm with +/- 1 µm repeatability

Platen material

Steel for vacuum or magnetic micropositioner

Scope stage drive type

Motorized

XY scope stage travel

X-Y 50x50mm - Résolution 0.02µm

Calibration Chuck

Calibration chuck with independant angular setup

Roll Out Stage for easy wafer loading

Yes

Local enclosure

Yes

Option

Probe card, dark box, themral chuck, triax chuck...

Associated products

RF & Microwave micropositioner

SM40RF & Microwave micropositioner

The SM40 micropositioner is specifically designed for RF probing, it has one inch translation capabilities in all axes and a cross-roller bearings to prevent accidentally moving the tip if bumped.

- Accepts all types of coplanar RF probes.
- Perfectly stable with screw-lock fixation on the platen (optional magnetic base).
- An integral co-planarity adjustment provides for adjusting multicontact planarities (GS, GSG, GSGSG configurations).
- It is available with various head configurations allowing the microwave head to be introduced from the front, rear.

Single-objective microscope

AZOOMµSingle-objective microscope

This microscope allows the same magnification than a multi-objectives turret miscoscope in a smaller footprint.
Its trinocular head allows the use of digital camera and/or a laser.

- The illumination is made by LED
- C-mount for camera
- High working distance (WD)
RF probe 50 GHz

MWRF-50ARF probe 50 GHz

Serie of probes for RF Microwave applications up to 50GHz, GSG, GS, SG or "dual" configurations (dual = 2 probes on 1 micropositioner)

- These probes are available in different pitches from 25µm to 1250µm
- Various mounting styles for micropositioners
- Female connector 2.4mm
- Available in BeCu, Tungsten or Nickel
- Non Magnetic option
- High temperature and High Power options, please ask us
RF & Microwave micropositioner

SM90RF & Microwave micropositioner

The SM90 micropositioner is specifically designed for RF probing, it has one inch translation capabilities in all axes and a cross-roller bearings to prevent accidentally moving the tip if bumped.

- Accepts all types of coplanar RF probes.
- Perfectly stable with screw-lock fixation on the platen (optional magnetic base).
- An integral co-planarity adjustment provides for adjusting multicontact planarities (GS, GSG, GSGSG configurations).
- It is available with various head configurations allowing the microwave head to be introduced from the front, rear.
RF probe 67 GHz

MWRF-67ARF probe 67 GHz

Serie of probes for RF Microwave applications up to 67GHz, GSG, GS, SG or "dual" configurations (dual = 2 probes on 1 micropositionner)

- These probes are available in different pitches from 25µm to 1250µm
- Various mounting styles for micropositionners
- Female V connector 1.85mm
- Available in BeCu or Tungsten
- Non Magnetic option
- High temperature and High Power options, please ask us
Active antivibration table

TA-VIS-9090Active antivibration table

The table allows pneumatic filtering of vibrations, the 4 dampers efficiently filter the mechanical noise from the ground or neighbourhood for an ultra fine probe analysis, inspection or assembly.

- Platens available in several dimensions upon size and weight of the equipment
- Individually adjustable air pressure sensors at each corner
Thermal chuck

ERS-AC3Thermal chuck

For 50 years ERS has been developing thermal chucks compatible with all probetest stations.

They have the following properties :
- High temperature: 300° C
- Low temperature: Patented airflow technology allows cooling down to -65° C
- Chuck TRIAX for low current measurement (FemtoAmp)
- Chuck High Voltage
- Non magnetic chuck
For technical and commercial information, quote, ordering or request of visit by our representative. +33 (0)476 561 617

5 rue de la Verrerie

38120 Le Fontanil-Cornillon

Grenoble / France

Fax : +33(0) 476 757 484

RCS Grenoble B 381 001 171 - APE 4652Z

TVA FR 48 381 001 171