PROBE TESTINGProbe stationsSemi-automatic probe stations

WL250      8" HF semi-automatic probe station

WL250 : 8
WL250 : 8

Part Number

WL250

Designation

8" HF semi-automatic probe station

APPLICATIONS

HF & Microwave Probing
Probing with a probecard & Mapping
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Description

Semi-automatic probing stations for full wafer HF electrical characterization.

- Software : mapping, auto-alignment, pattern recognition, autofocus...
- Probecard application available
- Thermal characterization from -60°C to +300°C
- HF measurements up to 110 GHz
- Tool developed for design validation (R&D) and yield monitoring (production)
- Configuration : up 4 ports HF (N, S, E, W) and 4 DC
- Optional local enclosure for EMI shielding and light-tight

MOST POPULAR REFERENCES

WL250 : 200 mm version
WL350 : 300 mm version
WL250-LE : 200 mm with local enclosure
WL350-LE : 300 mm with local enclosure

DOCUMENTS

mwdoc_titre  WL250 brochure (pdf)

Technical Specifications

Sample size

200 mm

Sample holding

Vacuum hole, zone selection

Stage Drive

Semi-automatic

Chuck travel X-Y

200 mm

Chuck material

Nickel

Resolution

0.5 µm

Accuracy

5 µm

Chuck stage Z travel

12.5 mm

Z chuck repeatability

1 µm

Chuck planarity adjustment

Yes

Planarity

< 10 µm

Theta range

+/- 7.5 °

Theta resolution

0.000035 °

Theta repeatability

< 1.5 µm

Z range platen

38mm with lock

Contact/no contact platen lever

4 mm with +/- 1 µm repeatability

Platen material

Steel for vacuum or magnetic micropositioner

Scope stage drive type

Motorized

XY scope stage travel

X-Y 50x50mm - Résolution 0.02µm

Calibration Chuck

Calibration chuck with independant angular setup

Roll Out Stage for easy wafer loading

Yes

Associated products

RF & Microwave micropositioner

SM40RF & Microwave micropositioner

The SM40 micropositioner is specifically designed for RF probing, it has one inch translation capabilities in all axes and a cross-roller bearings to prevent accidentally moving the tip if bumped.

- Accepts all types of coplanar RF probes.
- Perfectly stable with screw-lock fixation on the platen (optional magnetic base).
- An integral co-planarity adjustment provides for adjusting multicontact planarities (GS, GSG, GSGSG configurations).
- It is available with various head configurations allowing the microwave head to be introduced from the front, rear.

RF probe 40 GHz

MWRF-40ARF probe 40 GHz

Serie of probes for RF Microwave applications up to 40GHz, GSG, GS, SG or "dual" configurations (dual = 2 probes on 1 positionner)

- These probes are available in different pitch from 25µm to 2540µm
- Various mounting styles for micropositioners
- Female K connector 2.9mm
- Available in BeCu, Nickel or Tungsten
- Non Magnetic option
- High temperature and high current / high voltage versions, please ask us
Calibration substrate for RF probe

MW-CSCalibration substrate for RF probe

Calibration substrate series for RF probes, that allow high accuracy measurements.

- GSG, GS, SG or dual (GSSG, GSGSG...) configurations
- Through, short, load (50ohms)...
- Gold plated pads
- Calibration kit for analyzer (R&S, HP...)
RF & Microwave micropositioner

SM90RF & Microwave micropositioner

The SM90 micropositioner is specifically designed for RF probing, it has one inch translation capabilities in all axes and a cross-roller bearings to prevent accidentally moving the tip if bumped.

- Accepts all types of coplanar RF probes.
- Perfectly stable with screw-lock fixation on the platen (optional magnetic base).
- An integral co-planarity adjustment provides for adjusting multicontact planarities (GS, GSG, GSGSG configurations).
- It is available with various head configurations allowing the microwave head to be introduced from the front, rear.
RF probe 110 GHz

MWRF-110HRF probe 110 GHz

Serie of probes for RF Microwave applications up to 110GHz, GSG, GS, SG or "dual" configurations (dual = 2 probes on 1 positionner)

- These probes are available in different pitch from 25µm to 1250µm
- Various mounting styles for positionners
- Female connector 1mm
- Available in BeCu, Tungsten or Nickel
- Non magnetic option
RF probe 67 GHz

MWRF-67ARF probe 67 GHz

Serie of probes for RF Microwave applications up to 67GHz, GSG, GS, SG or "dual" configurations (dual = 2 probes on 1 micropositionner)

- These probes are available in different pitches from 25µm to 1250µm
- Various mounting styles for micropositionners
- Female V connector 1.85mm
- Available in BeCu or Tungsten
- Non Magnetic option
- High temperature and High Power options, please ask us
Mono zoom microscope

MS12ZMono zoom microscope

This microscope is composed by a single objective and an internal zoom.
It allows a wide range of magnification without turret disadvantage for probing application.

- Light and compact
- Large working distance WD (ideal for high frequencies measurements applications)
- C-mount for camera
- High brightness (LED optical fiber)
For technical and commercial information, quote, ordering or request of visit by our representative. +33 (0)476 561 617

5 rue de la Verrerie

38120 Le Fontanil-Cornillon

Grenoble / France

Fax : +33(0) 476 757 484

RCS Grenoble B 381 001 171 - APE 4652Z

TVA FR 48 381 001 171