PROBE TESTINGProbe stationsManual probe stations

WL210LE 8" high accuracy RF manual probe station with local enclosure

Part Number

WL210LE

Designation

8" high accuracy RF manual probe station with local enclosure

APPLICATIONS

IV / CV Measurements & Failure analysis

HF & Microwave Probing

Low-Leakage-Current Testing

High Power Probing

Description

This probe station is derivated of the Checkmate series. It includes an additional local chamber that allow temperature measurement (hot/cold) or very low current application

- fA measurements (low leakage)
- Light-tight environnement
- Electrical shielding
- Configuration : 4 HF port or 8 DC/Kelvin port or HF/DC combination
- 300mm version available
- Compatible with high performances ERS chuck (patented air cooling system, temperature from -60°C to 300°C)

DOCUMENTS

WL210LE brochure (pdf)

Technical Specifications

Sample size

200 mm

Sample holding

Vacuum hole, zone selection

Stage Drive

Motorized

Chuck travel X-Y

200 mm

Chuck material

Nickel

Resolution

Coarse 5 TPI - Fine 55 TPI

Accuracy

1 µm

Chuck stage Z travel

250µm - Pneumatic

Chuck planarity adjustment

Yes

Planarity

< 10 µm

Theta range

/- 6 °

Theta resolution

1.5 x 10⁻5 gradient

Rotation lock

Yes

Z range platen

38mm with lock

Contact/no contact platen lever

4 mm with /- 1 µm repeatability

Platen material

Steel for vacuum or magnetic micropositioner

XY scope stage travel

X-Y 50x50mm - Resolution 2µm

Microscope lift

100mm (4 in) vertical Pneumatic

Calibration Chuck

Calibration chuck with independant angular setup

Local enclosure

Yes

Light isolation

Yes

EMI shielding

> 30 dB @ 1kHz to 1MHz

Roll Out Stage for easy wafer loading

Yes

Option

Upgradable with, Hot/Cold chuck (-60°C to 400°C), High Power chuck, Local enclosure (Dark box and F

Associated products

SM40RF & Microwave micropositioner

The SM40 micropositioner is specifically designed for RF probing, it has one inch translation capabilities in all axes and a cross-roller bearings to prevent accidentally moving the tip if bumped.

- Accepts all types of coplanar RF probes.
- Perfectly stable with screw-lock fixation on the platen (optional magnetic base).
- An integral co-planarity adjustment provides for adjusting multicontact planarities (GS, GSG, GSGSG configurations).
- It is available with various head configurations allowing the microwave head to be introduced from the front, rear.

AZOOMµSingle-objective microscope

This microscope allows the same magnification than a multi-objectives turret miscoscope in a smaller footprint.
Its trinocular head allows the use of digital camera and/or a laser.

- The illumination is made by LED
- C-mount for camera
- High working distance (WD)

SP100High precision micropositioner SP100

High-precision micropositioner with inline controls knobs, the SP100 will allow easy landing on pads as well as internal lines within micron accuracy.

- The down Z movement of the tip is totally vertical.
- The knobs with micrometric graduations (100TPI) allow an optimal density on the platen.
- Pivot head (Quick down Z for pre-positioning then fine movement) or Standard head with Z knob.

ERS-AC3Thermal chuck

For 50 years ERS has been developing thermal chucks compatible with all probetest stations.

They have the following properties :
- High temperature: 300° C
- Low temperature: Patented airflow technology allows cooling down to -65° C
- Chuck TRIAX for low current measurement (FemtoAmp)
- Chuck High Voltage
- Non magnetic chuck

HVPHigh voltage probe holder

This probe holder series allow high voltage measurements, up to 20KV.

Tip holding by spindle or by screw.
Useful for IV measurements on HV transistors and HV diodes.