TRX      Triax probe holder

TRX : Triax probe holder
TRX : Triax probe holder
TRX : Triax probe holder
TRX : Triax probe holder

Part Number



Triax probe holder


Very low-noise probe holder (± 2 fA when used with a triaxial chuck and in an electrically shielded environment).

Can be mount onto S725P, S926P, SP100P, SP150P micropositioners.


Technical Specifications

Leakage current

+/- 2 fA


63 or 101 mm

Tip holding

Screw lock

Cable length

0.60 or 1.5 m



Associated products

Triaxial chuck

TRXCHUCKTriaxial chuck

The triaxial chuck will allow ultra-low current measurement down to fA when used with specific micropositioners with trixial arm and hermetic box for light and shield isolation.

- It is composed of 3 parts of which the middle part can be polarized,
- A high-temperature version is also available when associated with a hot or tri-temp chuck
- Available for wafers up to 300 mm (12")
- The triaxial chuck typically replaces the standard chuck onto a manual or semi-automatic prober to perform low level current measurement.

Micropositioner S725 with pivot head

S725PMicropositioner S725 with pivot head

This economic micropositioner will allow landing on pads or lines down to 20 µm.
Pivot head (quick Z down before fine adjust, ideal for probe station).
High precision micropositioner SP100

SP100High precision micropositioner SP100

High-precision micropositioner with inline controls knobs, the SP100 will allow easy landing on pads as well as internal lines within micron accuracy.

- The down Z movement of the tip is totally vertical.
- The knobs with micrometric graduations (100TPI) allow an optimal density on the platen.
- Pivot head (Quick down Z for pre-positioning then fine movement) or Standard head with Z knob.
Precision micropositioner S926 with pivot head

S926PPrecision micropositioner S926 with pivot head

This precision positioner allows placing probe tip on pads or lines within accuracy of the micrometer.
The pivot head is perfect for a quick positioning in Z and fine adjust.
For technical and commercial information, quote, ordering or request of visit by our representative. +33 (0)476 561 617

5 rue de la Verrerie

38120 Le Fontanil-Cornillon

Grenoble / France

Fax : +33(0) 476 757 484

RCS Grenoble B 381 001 171 - APE 4652Z

TVA FR 48 381 001 171