PROBE TESTINGTest accessoriesMicropositioners

SP150 Ultra-stable submicronic micropositioner SP150

Part Number

SP150

Designation

Ultra-stable submicronic micropositioner SP150

APPLICATIONS

IV / CV Measurements & Failure analysis

Low-Leakage-Current Testing

Description

High-precision ultra-stable micropositioner with inline controls knobs, the SP150 will allow easy landing on pads as well as internal lines with a submicron accuracy.

- The down Z movement of the tip is totally vertical.
- The knobs with micrometric graduations (100TPI) allow an optimal density on the platen.
- Standard head (down movement by the Z fine knob) or Pivot head for a quicker Z positioning.
- The SP150 today represents the state-of-the-art in term of accuracy of positioning.

DOCUMENTS

SP150 brochure (pdf)

Technical Specifications

Accuracy

0.5 µm

X-Axis Clearance

12.5 mm

Y-Axis Clearance

12.5 mm

Z-Axis Clearance

12.5 mm

Resolution

100 TPI

Knob

Inline

Basis style

Magnetic or vacuum

Head style

Pivot, Vertical or Articulated head

Associated products

TRXTriax probe holder

Very low-noise probe holder (± 2 fA when used with a triaxial chuck and in an electrically shielded environment).

Can be mount onto S725P, S926P, SP100P, SP150P micropositioners.

MW-SCA50Coaxial HF-Low-current probe

The coaxial Probe is designed for low-level signal probing (lower than 10fA@150°C)

- The probe's single unit design is especially desirable for the best possible electrical characteristics
- The Coaxial Probe is also offered with optional Ground Plane, Kelvin and resistor series /parallel configurations
- The Probes are constructed of microwave-quality components with a 50 Ohm semi-rigid cable shield being achieved through the utilisation a Teflon dielectric
- The probe contact protrudes from the shielding by .150" (3 mm) to maintain low-level signal noise to the probe
- Tips available (replaceable) from 0.5 µm to 20 µm
- The connector is a standard SSMC

UxTBCoaxial Probe holder with teflon isolation

This probe holder allows to mount a probe tip with an angle of 45°.

It is useful for low noise IV measurements with it teflon insulation.

PTG20Tungsten probe tip

General purpose probe tip sharpened at one extremity, the body material (tungsten) is strong enough to be bent into a variety of shapes.

- The standard application is probing on pads and/or internal lines
- Material tungsten, length 38 mm, tip radius from 0.5µm to 100µm
- Nickel-plated option is available for body only (easy soldering), please add the suffix ''N'' to the P/N

CM2108" high accuracy manual probe station

The Checkmate series represents the most accomplished probing stations, available for wafer up to 12".

- Upgradability from one version to another
- Manual or Semi-automatic version
- Test on Probecards available
- Optional thermal charactherization (-60°C to +300°C)
- High voltage (HV) and low current (fA) measurements possible
- Allows up to 8 DC micropositioners or probe card

MOST POPULAR REFERENCES

CM210 : Version 200 mm
CM310 : Version 300 mm

HVPHigh voltage probe holder

This probe holder series allow high voltage measurements, up to 20KV.

Tip holding by spindle or by screw.
Useful for IV measurements on HV transistors and HV diodes.

SP150 Ultra-stable submicronic micropositioner SP150

IV / CV Measurements & Failure analysis

High Power Probing

Low-Leakage-Current Testing

Description

DOCUMENTS

Technical Specifications

Associated products

TRXTriax probe holder

MW-SCA50Coaxial HF-Low-current probe

UxTBCoaxial Probe holder with teflon isolation

PTG20Tungsten probe tip

CM2108" high accuracy manual probe station

HVPHigh voltage probe holder