PROBE TESTINGProbe stationsManual probe stations

CM210 8" high accuracy manual probe station

Part Number

CM210

Designation

8" high accuracy manual probe station

APPLICATIONS

IV / CV Measurements & Failure analysis

Probing with a probecard & Mapping

Description

The Checkmate series represents the most accomplished probing stations, available for wafer up to 12".

- Upgradability from one version to another
- Manual or Semi-automatic version
- Test on Probecards available
- Optional thermal charactherization (-60°C to +300°C)
- High voltage (HV) and low current (fA) measurements possible
- Allows up to 8 DC micropositioners or probe card

MOST POPULAR REFERENCES

CM210 : Version 200 mm
CM310 : Version 300 mm

DOCUMENTS

CM210 brochure (pdf)

Technical Specifications

Sample size

200 mm

Sample holding

Vacuum ring, zone selection

Chuck travel X-Y

200 mm

Chuck material

Nickel

Resolution

14 µm per degree of knob rotation

Accuracy

1 µm

Chuck stage Z travel

250µm - Pneumatic

Chuck planarity adjustment

Yes

Planarity

< 10 µm

Theta range

+/- 11 °

Theta resolution

0.01 per degree of knob rotation

Rotation lock

Yes

Z range platen

38mm with lock

Contact/no contact platen lever

4 mm with +/- 1 µm repeatability

Platen material

Aluminum (vacuum basis only)

XY scope stage travel

X-Y 50x50mm - Resolution 2µm

Microscope lift

100mm (4 in) vertical Pneumatic

Associated products

MW-DBCustomized dark box

For probing systems that do not have local chamber option, Microworld manufactures Dark Boxes designed to completely enclose a micro probe station or other system.

- Electrical and light isolation
- User safety for high voltage applications
- Feed-thru connectors adapted to the instrumentation to be connected
- Goose-neck for cable access
- Customizable design dimensions

SP150Ultra-stable submicronic micropositioner SP150

High-precision ultra-stable micropositioner with inline controls knobs, the SP150 will allow easy landing on pads as well as internal lines with a submicron accuracy.

- The down Z movement of the tip is totally vertical.
- The knobs with micrometric graduations (100TPI) allow an optimal density on the platen.
- Standard head (down movement by the Z fine knob) or Pivot head for a quicker Z positioning.
- The SP150 today represents the state-of-the-art in term of accuracy of positioning.

AZOOMµSingle-objective microscope

This microscope allows the same magnification than a multi-objectives turret miscoscope in a smaller footprint.
Its trinocular head allows the use of digital camera and/or a laser.

- The illumination is made by LED
- C-mount for camera
- High working distance (WD)

TRXTriax probe holder

Very low-noise probe holder (± 2 fA when used with a triaxial chuck and in an electrically shielded environment).

Can be mount onto S725P, S926P, SP100P, SP150P micropositioners.

TRXCHUCKTriaxial chuck

The triaxial chuck will allow ultra-low current measurement down to fA when used with specific micropositioners with trixial arm and hermetic box for light and shield isolation.

- It is composed of 3 parts of which the middle part can be polarized,
- A high-temperature version is also available when associated with a hot or tri-temp chuck
- Available for wafers up to 300 mm (12")
- The triaxial chuck typically replaces the standard chuck onto a manual or semi-automatic prober to perform low level current measurement.

SP100High precision micropositioner SP100

High-precision micropositioner with inline controls knobs, the SP100 will allow easy landing on pads as well as internal lines within micron accuracy.

- The down Z movement of the tip is totally vertical.
- The knobs with micrometric graduations (100TPI) allow an optimal density on the platen.
- Pivot head (Quick down Z for pre-positioning then fine movement) or Standard head with Z knob.

MS12ZMono zoom microscope

This microscope is composed by a single objective and an internal zoom.
It allows a wide range of magnification without turret disadvantage for probing application.

- Light and compact
- Large working distance WD (ideal for high frequencies measurements applications)
- C-mount for camera
- High brightness (LED optical fiber)

S1080Thermal chuck controller

The trip-temp chuck and controller (ambient-hot-cold) ranges from -60°C to +300°C and allows a complete temperature characterization of devices, whether they are partial wafers or full wafers up to 12".

- The temperature parameters setting is by touch screen panel or remote control
- The transition time from hot to cold or reverse is one of the fastest on the market
- It is possible to program a ramp while heating up

HVPHigh voltage probe holder

This probe holder series allow high voltage measurements, up to 20KV.

Tip holding by spindle or by screw.
Useful for IV measurements on HV transistors and HV diodes.