MW-DBCustomized dark box
- Electrical and light isolation
- User safety for high voltage applications
- Feed-thru connectors adapted to the instrumentation to be connected
- Goose-neck for cable access
- Customizable design dimensions
Part Number
CM210
Designation
8" high accuracy manual probe station
The Checkmate series represents the most accomplished probing stations, available for wafer up to 12".
- Upgradability from one version to another
- Manual or Semi-automatic version
- Test on Probecards available
- Optional thermal charactherization (-60°C to +300°C)
- High voltage (HV) and low current (fA) measurements possible
- Allows up to 8 DC micropositioners or probe card
MOST POPULAR REFERENCES
CM210 : Version 200 mm
CM310 : Version 300 mm
Sample size
200 mm
Sample holding
Vacuum ring, zone selection
Chuck travel X-Y
200 mm
Chuck material
Nickel
Resolution
14 µm per degree of knob rotation
Accuracy
1 µm
Chuck stage Z travel
250µm - Pneumatic
Chuck planarity adjustment
Yes
Planarity
< 10 µm
Theta range
+/- 11 °
Theta resolution
0.01 per degree of knob rotation
Rotation lock
Yes
Z range platen
38mm with lock
Contact/no contact platen lever
4 mm with +/- 1 µm repeatability
Platen material
Aluminum (vacuum basis only)
XY scope stage travel
X-Y 50x50mm - Resolution 2µm
Microscope lift
100mm (4 in) vertical Pneumatic