PROBE TESTINGProbe stationsSemi-automatic probe stations

WL350-LE 12" HF semi-automatic probe station with local enclosure

Part Number

WL350-LE

Designation

12" HF semi-automatic probe station with local enclosure

APPLICATIONS

Probing with a probecard & Mapping

IV / CV Measurements & Failure analysis

Description

Semi-automatic probing stations for full wafer HF electrical characterization.

- Software : mapping, auto-alignment, pattern recognition, autofocus...
- Probecard application available
- Thermal characterization from -60°C to +300°C
- HF measurements up to 110 GHz
- Tool developed for design validation (R&D) and yield monitoring (production)
- Configuration : up 4 ports HF (N, S, E, W) and 4 DC
- Optional local enclosure for EMI shielding and light-tight

MOST POPULAR REFERENCES

WL250 : 200 mm version
WL350 : 300 mm version
WL250-LE : 200 mm with local enclosure
WL350-LE : 300 mm with local enclosure

DOCUMENTS

WL350 brochure (pdf)

Technical Specifications

Sample size

300 mm

Sample holding

Vacuum hole, zone selection

Stage Drive

Semi-automatic

Chuck travel X-Y

200 mm

Chuck material

Nickel

Resolution

0.5 µm

Accuracy

5 µm

Chuck stage Z travel

12.5 µm

Z chuck repeatability

1 µm

Chuck planarity adjustment

Yes

Planarity

< 10 µm

Theta range

+/- 7.5 °

Theta resolution

0.000035 °

Theta repeatability

< 1.5 µm

Z range platen

38mm with lock

Contact/no contact platen lever

4 mm with +/- 1 µm repeatability

Platen material

Steel for vacuum or magnetic micropositioner

Scope stage drive type

Motorized

XY scope stage travel

X-Y 50x50mm - Résolution 0.02µm

Calibration Chuck

Calibration chuck with independant angular setup

Roll Out Stage for easy wafer loading

Yes

Local enclosure

Yes

Option

Probe card, dark box, themral chuck, triax chuck...

Associated products

SM40RF & Microwave micropositioner

The SM40 micropositioner is specifically designed for RF probing, it has one inch translation capabilities in all axes and a cross-roller bearings to prevent accidentally moving the tip if bumped.

- Accepts all types of coplanar RF probes.
- Perfectly stable with screw-lock fixation on the platen (optional magnetic base).
- An integral co-planarity adjustment provides for adjusting multicontact planarities (GS, GSG, GSGSG configurations).
- It is available with various head configurations allowing the microwave head to be introduced from the front, rear.

AZOOMµSingle-objective microscope

This microscope allows the same magnification than a multi-objectives turret miscoscope in a smaller footprint.
Its trinocular head allows the use of digital camera and/or a laser.

- The illumination is made by LED
- C-mount for camera
- High working distance (WD)

SM90RF & Microwave micropositioner

The SM90 micropositioner is specifically designed for RF probing, it has one inch translation capabilities in all axes and a cross-roller bearings to prevent accidentally moving the tip if bumped.

- Accepts all types of coplanar RF probes.
- Perfectly stable with screw-lock fixation on the platen (optional magnetic base).
- An integral co-planarity adjustment provides for adjusting multicontact planarities (GS, GSG, GSGSG configurations).
- It is available with various head configurations allowing the microwave head to be introduced from the front, rear.

S1080Thermal chuck controller

The trip-temp chuck and controller (ambient-hot-cold) ranges from -60°C to +300°C and allows a complete temperature characterization of devices, whether they are partial wafers or full wafers up to 12".

- The temperature parameters setting is by touch screen panel or remote control
- The transition time from hot to cold or reverse is one of the fastest on the market
- It is possible to program a ramp while heating up

HVPHigh voltage probe holder

This probe holder series allow high voltage measurements, up to 20KV.

Tip holding by spindle or by screw.
Useful for IV measurements on HV transistors and HV diodes.