CM465      6" semi-automatic probe station


Semi-automatic probing stations for full wafer electrical characterization.

- Software : mapping, auto-alignment, pattern recognition, autofocus...
- X-Y stage drives by induction motor for high speed and accuracy
- Probecard application available
- High voltage (HV -10kV) and low leakage (fA) measurements
- Tool developed for design validation (R&D) and yield monitoring (production)


Technical Specifications

Sample size

6" (150 mm)

Sample holding

Vacuum ring, zone selection

Stage Drive


Chuck travel X-Y

150 mm

Chuck material



0.5 µm


3 µm


2 µm

Chuck stage Z travel

6 mm

Z chuck repeatability

1 µm

Chuck planarity adjustment



< 10 µm

Theta range

18 °

Theta resolution

0.000035 °

Theta repeatability

< 1.5 µm

Z range platen

38mm with lock

Contact/no contact platen lever

4 mm with +/- 1 µm repeatability

Platen material

Steel for vacuum or magnetic micropositioner

Scope stage drive type


XY scope stage travel

X-Y 50x50mm - Résolution 0.02µm

Roll Out Stage for easy wafer loading



Probe card, dark box, themral chuck, triax chuck...

Associated products

Coaxial HF-Low-current probe

MW-SCA50Coaxial HF-Low-current probe

The coaxial Probe is designed for low-level signal probing (lower than 10fA@150°C)

- The probe's single unit design is especially desirable for the best possible electrical characteristics
- The Coaxial Probe is also offered with optional Ground Plane, Kelvin and resistor series /parallel configurations
- The Probes are constructed of microwave-quality components with a 50 Ohm semi-rigid cable shield being achieved through the utilisation a Teflon dielectric
- The probe contact protrudes from the shielding by .150" (3 mm) to maintain low-level signal noise to the probe
- Tips available (replaceable) from 0.5 µm to 20 µm
- The connector is a standard SSMC
High precision micropositioner SP100

SP100High precision micropositioner SP100

High-precision micropositioner with inline controls knobs, the SP100 will allow easy landing on pads as well as internal lines within micron accuracy.

- The down Z movement of the tip is totally vertical.
- The knobs with micrometric graduations (100TPI) allow an optimal density on the platen.
- Pivot head (Quick down Z for pre-positioning then fine movement) or Standard head with Z knob.
Precision micropositioner S926 with pivot head

S926PPrecision micropositioner S926 with pivot head

This precision positioner allows placing probe tip on pads or lines within accuracy of the micrometer.
The pivot head is perfect for a quick positioning in Z and fine adjust.
Mono zoom microscope

MS12ZMono zoom microscope

This microscope is composed by a single objective and an internal zoom.
It allows a wide range of magnification without turret disadvantage for probing application.

- Light and compact
- Large working distance WD (ideal for high frequencies measurements applications)
- C-mount for camera
- High brightness (LED optical fiber)
For technical and commercial information, quote, ordering or request of visit by our representative. +33 (0)476 561 617

5 rue de la Verrerie

38120 Le Fontanil-Cornillon

Grenoble / France

Fax : +33(0) 476 757 484

RCS Grenoble B 381 001 171 - APE 4652Z

TVA FR 48 381 001 171