CM465      6'' semi-automatic probe station

Description Technical Specifications Documents Associated Products

CM465      6'' semi-automatic probe station

Description Technical Specifications Documents Associated Products

Part Number



6'' semi-automatic probe station


Semi-automatic probing stations for full wafer electrical characterization.

- Software : mapping, auto-alignment, pattern recognition, autofocus...
- X-Y stage drives by induction motor for high speed and accuracy
- Probecard application available
- High voltage (HV -10kV) and low leakage (fA) measurements
- Tool developed for design validation (R&D) and yield monitoring (production)


Technical Specifications

Wafer size

150 mm

Sample holding

Vacuum ring, zone selection

Stage Drive


Chuck travel X-Y

150 mm

Chuck material



1 µm


3 µm


10 µm

Chuck stage Z travel

12.5 mm

Z chuck repeatability

1 µm


< 10 µm

Chuck planarity adjustment


Theta range

20 Degree

Z range platen

35mm with lock

Contact/no contact platen lever

4 mm with +/- 1 µm repeatability


Steel for vacuum or magnetic micropositioner

Scope stage drive


Scope stage travel

X-Y 50x50mm - Résolution 10µm

Roll Out Stage for easy wafer loading



Probe card, dark box, themral chuck, triax chuck...

Associated products

MWPHV-3 - High Voltage Probe 3kV
The demands of off-state measurements require that signal path, from instrumentation to wafer, supports voltage in the thousand volts. The high voltage probe provides integrated triaxial capability for best high voltage and low current measurements. Both High Voltage and High Current Probes utilize replaceable tips for minimal interruption to user's measurements

- Specs PowerPro 3kV triax / 10kV coax, 450A pulsed / 10A DC
- Triaxial and coaxial versions
- Used with PowerPro configurations or separate
- Connector type to specify
SP100 - High precision micropositioner SP100
High-precision micropositioner with inline controls knobs, the SP100 will allow easy landing on pads as well as internal lines within micron accuracy.

- The down Z movement of the tip is totally vertical
- The knobs with micrometric graduations (100TPI) allow an optimal density on the platen.
- Pivot head (Quick down Z for pre-positioning then fine movement) or Standard head with Z knob
S926P - Precision micropositioner S926 with pivot head
This Precision positioner packaged in a small footprint allows placing probe tip on pads ou lines within accuracy of the micrometer.

- The Pivot head is perfect for a quick positioning in Z
- Other versions of the S926 offer Spring head (limiting needle pressure) or fixed head
MS12Z - Mono zoom videoscope
This microscope is composed by a single objective and an internal zoom.
It allows a wide range of magnification without turret disadvantage for probing application.

- Light and compact
- Large working distance WD (ideal for high frequencies measurements applications)
- C-mount for camera
- High brightness (optical fiber)
For technical and commercial information, quote, ordering or request of visit by our representative. +33 (0)476 561 617

5 rue de la Verrerie

38120 Le Fontanil-Cornillon

Grenoble / France

Fax : +33(0) 476 757 484

RCS Grenoble B 381 001 171 - APE 4652Z

TVA FR 48 381 001 171