MW-DBCustomized dark box
- Electrical and light isolation
- User safety for high voltage applications
- Feed-thru connectors adapted to the instrumentation to be connected
- Goose-neck for cable access
- Customizable design dimensions
Part Number
S1160B-8N
Designation
8" manual analytical probe station
Probe station under tips for precision analyses, such as IV, CV, on chips alone, on wafers, on components, etc. Modular, the S1160 can accommodate several options and accessories for a multitude of applications (temperature, low current measurements, etc.).
- Rapid elevation of the plate by manual arm (contact / non-contact)
- Accepts binocular and trinocular microscopes
- Wafers up to 8'' (200mm wafers)
- Angular adjustment of the Wafer
- Accommodates up to 8 DC micropositioners or a pin board
- Massive chassis for better stability
COMMON REFERENCES:
S1160A-8N: Optical bridge movement for turret microscope
S1160B-8N: Movement of the optical bridge for trinocular stereozoom microscope
S1160C-8N: Fixed optical bridge for trinocular stereozoom microscope
Sample size
200 mm
Sample holding
Vacuum ring, zone selection
Stage Drive
Manual
Chuck travel X-Y
200 mm
Chuck material
Nickel
Resolution
<1μm (0.001mm) @ 250μm/rev
Chuck stage Z travel
No
Chuck planarity adjustment
Yes
Planarity
< 10 µm
Theta range
360 Degree
Rotation lock
No
Z range platen
38 mm
Contact/no contact platen lever
10 mm with a repeatability of +/- 1µm
Platen material
Steel for vacuum or magnetic micropositioner
XY scope stage travel
X-Y 50x50mm - Résolution 10µm