S1160B-8N      8" manual analytical probe station

S1160B-8N : 8 S1160B-8N : 8
S1160B-8N : 8 S1160B-8N : 8

Part Number



8" manual analytical probe station


Probe station under tips for precision analyses, such as IV, CV, on chips alone, on wafers, on components, etc. Modular, the S1160 can accommodate several options and accessories for a multitude of applications (temperature, low current measurements, etc.).

- Rapid elevation of the plate by manual arm (contact / non-contact)
- Accepts binocular and trinocular microscopes
- Wafers up to 8'' (200mm wafers)
- Angular adjustment of the Wafer
- Accommodates up to 8 DC micropositioners or a pin board
- Massive chassis for better stability


S1160A-8N: Optical bridge movement for turret microscope
S1160B-8N: Movement of the optical bridge for trinocular stereozoom microscope
S1160C-8N: Fixed optical bridge for trinocular stereozoom microscope


Technical Specifications

Sample size

200 mm

Sample holding

Vacuum ring, zone selection

Stage Drive


Chuck travel X-Y

200 mm

Chuck material



<1μm (0.001mm) @ 250μm/rev

Chuck stage Z travel


Chuck planarity adjustment



< 10 µm

Theta range

360 Degree

Rotation lock


Z range platen

38 mm

Contact/no contact platen lever

10 mm with a repeatability of +/- 1µm

Platen material

Steel for vacuum or magnetic micropositioner

XY scope stage travel

X-Y 50x50mm - Résolution 10µm

Associated products

Customized dark box

MW-DBCustomized dark box

For probing systems that do not have local chamber option, Microworld manufactures Dark Boxes designed to completely enclose a micro probe station or other system.

- Electrical and light isolation
- User safety for high voltage applications
- Feed-thru connectors adapted to the instrumentation to be connected
- Goose-neck for cable access
- Customizable design dimensions
Triax probe holder

TRXTriax probe holder

Very low-noise probe holder (± 2 fA when used with a triaxial chuck and in an electrically shielded environment).

Can be mount onto S725P, S926P, SP100P, SP150P micropositioners.
Triaxial chuck

TRXCHUCKTriaxial chuck

The triaxial chuck will allow ultra-low current measurement down to fA when used with specific micropositioners with trixial arm and hermetic box for light and shield isolation.

- It is composed of 3 parts of which the middle part can be polarized,
- A high-temperature version is also available when associated with a hot or tri-temp chuck
- Available for wafers up to 300 mm (12")
- The triaxial chuck typically replaces the standard chuck onto a manual or semi-automatic prober to perform low level current measurement.

Micropositioner S725 with pivot head

S725PMicropositioner S725 with pivot head

This economic micropositioner will allow landing on pads or lines down to 20 µm.
Pivot head (quick Z down before fine adjust, ideal for probe station).
Precision micropositioner S926 with pivot head

S926PPrecision micropositioner S926 with pivot head

This precision positioner allows placing probe tip on pads or lines within accuracy of the micrometer.
The pivot head is perfect for a quick positioning in Z and fine adjust.
Stereozoom microscope

SMZ171Stereozoom microscope

Stereozoom microscope with middle magnification for probe tip placement.

- High working distance (WD = 110mm)
- C-mount for digital camera (trinocular version)
- Several objectives and eyepieces for wide range of magnification
- LED or optical fiber illumination available
Active antivibration table

TA-VIS-7575Active antivibration table

The table allows pneumatic filtering of vibrations, the 4 dampers efficiently filter the mechanical noise from the ground or neighbourhood for an ultra fine probe analysis, inspection or assembly.

- Platens available in several dimensions upon size and weight of the equipment
- Individually adjustable air pressure sensors at each corner
Thermal chuck controller

S1080Thermal chuck controller

The trip-temp chuck and controller (ambient-hot-cold) ranges from -60°C to +300°C and allows a complete temperature characterization of devices, whether they are partial wafers or full wafers up to 12".

- The temperature parameters setting is by touch screen panel or remote control
- The transition time from hot to cold or reverse is one of the fastest on the market
- It is possible to program a ramp while heating up
Digital camera

MOTICAM1080XDigital camera

This camera is very helpfull for direct vision to put probes easily.

- Compatible with our trinoculars microscopes
- C mount
- Multi-outputs for direct vision on monitor (HDMI) and USB
For technical and commercial information, quote, ordering or request of visit by our representative. +33 (0)476 561 617

5 rue de la Verrerie

38120 Le Fontanil-Cornillon

Grenoble / France

Fax : +33(0) 476 757 484

RCS Grenoble B 381 001 171 - APE 4652Z

TVA FR 48 381 001 171