PROBE TESTINGProbe stationsManual probe stations

D3 Dark box with chuck

Part Number

Designation

Dark box with chuck

APPLICATIONS

IV / CV Measurements & Failure analysis

Description

This small probe station has been designed for high themperature application, it includes a chuck (ambient or hot chuck) and a circular platen that allow several magnetic micropositioner.

- A microscope can be used to contact small pads
- An economical solution for a variety of probing applications

DOCUMENTS

D3 brochure (pdf)

Technical Specifications

Sample holding

Vacuum ring, zone selection

Stage Drive

Chuck stage Z travel

Planarity

< 10 µm

Platen material

Steel for vacuum or magnetic micropositioner

Maximum temperature

+600 °C

Options

Ambient chuck, microscope, nitrogen shower...

Connection

6 feedthrough connector (BNC or Trx)

Openning

Top opening

Associated products

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- LED or optical fiber illumination available

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S1080Thermal chuck controller

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- The temperature parameters setting is by touch screen panel or remote control
- The transition time from hot to cold or reverse is one of the fastest on the market
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